Patents by Inventor Kohei ASAI

Kohei ASAI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Processing apparatus
    Patent number: 11398400
    Abstract: A processing apparatus includes a chuck table mechanism including a chuck table configured to hold the wafer and a table base configured to support the chuck table in a detachable manner. The chuck table includes a porous plate having a suction surface that sucks the wafer, a frame body surrounding surfaces of the porous plate other than the suction surface of the porous plate, a wafer suction hole formed in the frame body and configured to transmit a suction force to the suction surface of the porous plate, and a bolt hole formed in the frame body and configured to fix the frame body to the table base.
    Type: Grant
    Filed: June 10, 2021
    Date of Patent: July 26, 2022
    Assignee: DISCO CORPORATION
    Inventor: Kohei Asai
  • PROCESSING APPARATUS
    Publication number: 20220005725
    Abstract: A processing apparatus includes a chuck table mechanism including a chuck table configured to hold the wafer and a table base configured to support the chuck table in a detachable manner. The chuck table includes a porous plate having a suction surface that sucks the wafer, a frame body surrounding surfaces of the porous plate other than the suction surface of the porous plate, a wafer suction hole formed in the frame body and configured to transmit a suction force to the suction surface of the porous plate, and a bolt hole formed in the frame body and configured to fix the frame body to the table base.
    Type: Application
    Filed: June 10, 2021
    Publication date: January 6, 2022
    Inventor: Kohei ASAI