Patents by Inventor Kohei Kasamori
Kohei Kasamori has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230327039Abstract: A photodetection device includes a photodetection element and a package. The photodetection element includes a semiconductor substrate and a light absorption film. The light absorption film is provided on a region of at least a part of a region around a photodetection region on a principal surface of the semiconductor substrate. The light absorption film has a multi-layer structure including a light absorption layer, a resonance layer, and a reflection layer. At a wavelength of detection target light, a light transmittance inside the resonance layer is larger than a light transmittance inside the light absorption layer, and a light reflectance on a surface of the reflection layer is larger than a light reflectance on a surface of the resonance layer.Type: ApplicationFiled: July 7, 2021Publication date: October 12, 2023Applicant: HAMAMATSU PHOTONICS K.K.Inventors: Yoshinori TSUKADA, Kohei KASAMORI, Masaki HIROSE, Yoshihisa WARASHINA
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Publication number: 20230187462Abstract: A photodetection element includes a semiconductor substrate having a principal surface on which detection target light is incident and a rear surface, and including one or a plurality of photodetection regions on the principal surface side, and a light absorption film provided on the rear surface. The light absorption film includes a reflection layer being a metal layer, a resonance layer provided between the reflection layer and the substrate, and a light absorption layer provided between the resonance layer and the substrate. In at least one of a wavelength of the detection target light and a wavelength of spontaneous light, a light transmittance inside the resonance layer is larger than a light transmittance inside the light absorption layer, and a light reflectance on a surface of the reflection layer is larger than a light reflectance on a surface of the resonance layer.Type: ApplicationFiled: May 17, 2021Publication date: June 15, 2023Applicant: HAMAMATSU PHOTONICS K.K.Inventors: Yoshinori TSUKADA, Kohei KASAMORI, Masaki HIROSE, Yoshihisa WARASHINA
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Patent number: 10670461Abstract: An optical interferometer includes a branching-combining unit, a first optical system, a second optical system, and a drive unit. The branching-combining unit includes a branching surface, an incident surface, a first output surface, a combining surface, and a second output surface on an interface of a transparent member, the branching surface partially reflects incident light and outputs as first branched light, and transmits the rest of the incident light into the interior as second branched light, the combining surface partially combines the first branched light and the second branched light to be output to the outside as first combined light, and combines the rest of the first branched light and the second branched light to be propagated into the interior as second combined light, and the second output surface partially outputs the second combined light to the outside.Type: GrantFiled: September 3, 2015Date of Patent: June 2, 2020Assignee: HAMAMATSU PHOTONICS K.K.Inventors: Yoshihisa Warashina, Tomofumi Suzuki, Kohei Kasamori, Ryosuke Okumura, Kyosuke Kotani
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Publication number: 20200116571Abstract: A light detector includes: a support substrate; a light transmission substrate which forms an accommodation space along with the support substrate; a light detection element which is located in the accommodation space and includes a bolometer layer; a first base layer which includes a first corner portion; a second base layer which includes a second corner portion; a solder layer which is disposed between the first base layer and the second base layer, fixes the support substrate and the light transmission substrate to each other, and air-tightly seals the accommodation space; and a reinforcement portion which is integrally formed with the solder layer by the same material as that of the solder layer, in which the reinforcement portion reaches at least one of the first surface side and the second surface side inside the first corner portion and the second corner portion.Type: ApplicationFiled: February 5, 2018Publication date: April 16, 2020Applicant: HAMAMATSU PHOTONICS K.K.Inventors: Kohei KASAMORI, Masahiro YAMAZAKI, Katsumi SHIBAYAMA
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Patent number: 10422696Abstract: An optical module includes an actuator that includes a movable part to be moved along a predetermined direction; a first interference optical system that includes a first movable mirror, a first stationary mirror, and a first beam splitter; and a second interference optical system that includes a second movable mirror, a second stationary mirror, and a second beam splitter. The first interference optical system is adapted so that first light reciprocates m times (m is a natural number) between the first beam splitter and the first movable mirror along the predetermined direction. The second interference optical system is adapted so that second light reciprocates n times (n is a natural number greater than m) between the second beam splitter and the second movable mirror along the predetermined direction.Type: GrantFiled: February 2, 2017Date of Patent: September 24, 2019Assignee: HAMAMATSU PHOTONICS K.K.Inventors: Yoshihisa Warashina, Tomofumi Suzuki, Kohei Kasamori, Ryosuke Okumura, Kyosuke Kotani
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Publication number: 20190033136Abstract: An optical module includes an actuator that includes a movable part to be moved along a predetermined direction; a first interference optical system that includes a first movable mirror, a first stationary mirror, and a first beam splitter; and a second interference optical system that includes a second movable mirror, a second stationary mirror, and a second beam splitter. The first interference optical system is adapted so that first light reciprocates m times (m is a natural number) between the first beam splitter and the first movable mirror along the predetermined direction. The second interference optical system is adapted so that second light reciprocates n times (n is a natural number greater than m) between the second beam splitter and the second movable mirror along the predetermined direction.Type: ApplicationFiled: February 2, 2017Publication date: January 31, 2019Applicant: HAMAMATSU PHOTONICS K.K.Inventors: Yoshihisa WARASHINA, Tomofumi SUZUKI, Kohei KASAMORI, Ryosuke OKUMURA, Kyosuke KOTANI
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Publication number: 20180217001Abstract: An optical interferometer includes a branching-combining unit, a first optical system, a second optical system, and a drive unit. The branching-combining unit includes a branching surface, an incident surface, a first output surface, a combining surface, and a second output surface on an interface of a transparent member, the branching surface partially reflects incident light and outputs as first branched light, and transmits the rest of the incident light into the interior as second branched light, the combining surface partially combines the first branched light and the second branched light to be output to the outside as first combined light, and combines the rest of the first branched light and the second branched light to be propagated into the interior as second combined light, and the second output surface partially outputs the second combined light to the outside.Type: ApplicationFiled: September 3, 2015Publication date: August 2, 2018Applicant: HAMAMATSU PHOTONICS K.K.Inventors: Yoshihisa WARASHINA, Tomofumi SUZUKI, Kohei KASAMORI, Ryosuke OKUMURA, Kyosuke KOTANI
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Publication number: 20180195853Abstract: An optical interferometer includes a branching-combining unit, a first optical system, a second optical system, and a drive unit, which can be MEMS-based components. The branching-combining unit includes a branching surface, an incident surface, an output surface, and a combining surface on an interface between the interior and the exterior of a transparent member. The branching-combining unit, on the branching surface, partially reflects incident light and outputs as first branched light, and transmits the rest of the incident light into the interior as second branched light. The branching-combining unit, on the combining surface, outputs the first branched light to the outside, reflects the second branched light, and combines the light beams to be output to the outside as combined light.Type: ApplicationFiled: July 10, 2015Publication date: July 12, 2018Applicant: HAMAMATSU PHOTONICS K.K.Inventors: Yoshihisa WARASHINA, Tomofumi SUZUKI, Kohei KASAMORI, Ryosuke OKUMURA, Kyosuke KOTANI
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Patent number: 9618323Abstract: A method of manufacturing an optical interferometer includes a first step of forming a first semiconductor portion for a beam splitter and a second semiconductor portion for a movable mirror on a main surface of a support substrate and a first insulating layer formed on the main surface, a second step of disposing a first wall portion between a first side surface of the first semiconductor portion and a second side surface in the second semiconductor portion, and a third step of forming a mirror surface in the second semiconductor portion by forming a first metal film on the second side surface using a shadow mask. In the third step, the first side surface is masked by the mask portion and the first wall portion and the first metal film is formed in a state in which the second side portion is exposed from an opening portion.Type: GrantFiled: July 31, 2014Date of Patent: April 11, 2017Assignee: HAMAMATSU PHOTONICS K.K.Inventors: Tomofumi Suzuki, Yoshihisa Warashina, Kohei Kasamori, Tatsuya Sugimoto, Jo Ito
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Patent number: 9557555Abstract: An optical module includes a first plate-shaped member having a light transmissive optical component which is formed by applying etching to a silicon region, and a second plate-shaped member having light reflective optical components (mirrors) for reflecting light transmitting through the light transmissive optical component. The first and second plate-shaped members are bonded to one another, and an optical path for light transmitting through the light transmissive optical component is along a component forming surface of the first plate-shaped member and a principal surface of the second plate-shaped member. Thereby, realizing an optical module in which it is possible to dispose the light reflective optical component and the light transmissive optical component close to one another, and a manufacturing method for the optical module.Type: GrantFiled: April 4, 2012Date of Patent: January 31, 2017Assignee: HAMAMATSU PHOTONICS K.K.Inventors: Yoshihisa Warashina, Tomofumi Suzuki, Kohei Kasamori
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Publication number: 20160202037Abstract: A method of manufacturing an optical interferometer includes a first step of forming a first semiconductor portion for a beam splitter and a second semiconductor portion for a movable mirror on a main surface of a support substrate and a first insulating layer formed on the main surface, a second step of disposing a first wall portion between a first side surface of the first semiconductor portion and a second side surface in the second semiconductor portion, and a third step of forming a mirror surface in the second semiconductor portion by forming a first metal film on the second side surface using a shadow mask. In the third step, the first side surface is masked by the mask portion and the first wall portion and the first metal film is formed in a state in which the second side portion is exposed from an opening portion.Type: ApplicationFiled: July 31, 2014Publication date: July 14, 2016Inventors: Tomofumi SUZUKI, Yoshihisa WARASHINA, Kohei KASAMORI, Tatsuya SUGIMOTO, Jo ITO
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Patent number: 9372285Abstract: A method for manufacturing a light transmissive optical component, includes a first etching process of forming a depressed portion by applying etching to a silicon region of a plate-shaped member, a thermal oxidation process of forming a silicon oxide film by thermally oxidizing an inner side surface of the depressed portion, and a nitride film formation process of forming a silicon nitride film that covers the silicon oxide film. Accordingly, it is possible to realize a manufacturing method for an optical component which is capable of uniformly forming a silicon oxide film on a semi-transmissive reflecting surface which is largely inclined (or nearly vertical) with respect to a substrate surface, and an optical component produced by this method.Type: GrantFiled: April 4, 2012Date of Patent: June 21, 2016Assignee: HAMAMATSU PHOTONICS K.K.Inventors: Yoshihisa Warashina, Tomofumi Suzuki, Kohei Kasamori
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Publication number: 20140139924Abstract: An optical module includes a first plate-shaped member having a light transmissive optical component which is formed by applying etching to a silicon region, and a second plate-shaped member having light reflective optical components (mirrors) for reflecting light transmitting through the light transmissive optical component. The first and second plate-shaped members are bonded to one another, and an optical path for light transmitting through the light transmissive optical component is along a component forming surface of the first plate-shaped member and a principal surface of the second plate-shaped member. Thereby, realizing an optical module in which it is possible to dispose the light reflective optical component and the light transmissive optical component close to one another, and a manufacturing method for the optical module.Type: ApplicationFiled: April 4, 2012Publication date: May 22, 2014Applicant: HAMAMATSU PHOTONICS K.K.Inventors: Yoshihisa Warashina, Tomofumi Suzuki, Kohei Kasamori
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Publication number: 20140104687Abstract: A method for manufacturing a light transmissive optical component, includes a first etching process of forming a depressed portion by applying etching to a silicon region of a plate-shaped member, a thermal oxidation process of forming a silicon oxide film by thermally oxidizing an inner side surface of the depressed portion, and a nitride film formation process of forming a silicon nitride film that covers the silicon oxide film. Accordingly, it is possible to realize a manufacturing method for an optical component which is capable of uniformly forming a silicon oxide film on a semi-transmissive reflecting surface which is largely inclined (or nearly vertical) with respect to a substrate surface, and an optical component produced by this method.Type: ApplicationFiled: April 4, 2012Publication date: April 17, 2014Applicant: HAMAMATSU PHOTONICS K.K.Inventors: Yoshihisa Warashina, Tomofumi Suzuki, Kohei Kasamori