Abstract: Apparatus inspects the presence/absence of foreign substance on object having inspection region and non-inspection region arranged outside the inspection region. The apparatus includes sensor for illuminating the object and output, as image, result acquired by detecting light from region including the inspection region, and processor for detecting foreign substance based on inspection region image acquired by excluding non-inspection region image, which is image of the non-inspection region, from the image output from the sensor. The non-inspection region image includes first part generated by light from predetermined part of the non-inspection region of the inspected object and second part whose pixel value is continuous from pixel value of the first part and the processor specifies the second part based on fact that the pixel value of the second part is continuous from that of the first part.

Abstract: A transfer device, for transferring components at high speed and inspecting the components, includes a first transfer mechanism including a first transfer section including a first transfer surface that moves along a first transfer path connecting a loading position to a delivery position, and a second transfer mechanism including a second transfer section that moves along a second transfer path connecting a receiving position spaced from the delivery position by a first distance to a discharging position. The second transfer section includes a second transfer surface that continuously rotates about a rotation axis along the second transfer path. A moving direction of the first transfer surface at the delivery position intersects a moving direction of the second transfer surface at the receiving position in a plan view of the first transfer surface. The second transfer mechanism includes a generator that generates an attraction force toward the second transfer surface.

Abstract: A controller mounted on a small-sized hydraulic excavator includes an engine restart section that restarts an engine when a horn switch operation determining section determines that a horn switch is operated and a gate lock lever position determining section determines that a gate lock lever is at a lock position in a case where a restart standby time determining section determines that restart standby time does not yet elapse after the engine is automatically stopped by an idling stop function, and a power supply stopping section that stops an electric power supply of a vehicle body when the restart standby time determining section determines that the restart standby time has elapsed.

Abstract: A transfer device, for transferring components at high speed and inspecting the components, includes a first transfer mechanism including a first transfer section including a first transfer surface that moves along a first transfer path connecting a loading position to a delivery position, and a second transfer mechanism including a second transfer section that moves along a second transfer path connecting a receiving position spaced from the delivery position by a first distance to a discharging position. The second transfer section includes a second transfer surface that continuously rotates about a rotation axis along the second transfer path. A moving direction of the first transfer surface at the delivery position intersects a moving direction of the second transfer surface at the receiving position in a plan view of the first transfer surface. The second transfer mechanism includes a generator that generates an attraction force toward the second transfer surface.

Abstract: Apparatus inspects the presence/absence of foreign substance on object having inspection region and non-inspection region arranged outside the inspection region. The apparatus includes sensor for illuminating the object and output, as image, result acquired by detecting light from region including the inspection region, and processor for detecting foreign substance based on inspection region image acquired by excluding non-inspection region image, which is image of the non-inspection region, from the image output from the sensor. The non-inspection region image includes first part generated by light from predetermined part of the non-inspection region of the inspected object and second part whose pixel value is continuous from pixel value of the first part and the processor specifies the second part based on fact that the pixel value of the second part is continuous from that of the first part.

Abstract: A controller (27) mounted on a small-sized hydraulic excavator (1) includes an engine restart section (27E) that restarts an engine (10) when a horn switch operation determining section (27B) determines that a horn switch (14) is operated and a gate lock lever position determining section (27C) determines that a gate lock lever (16) is at a lock position in a case where a restart standby time determining section (27A) determines that restart standby time (T2) does not yet elapse after the engine (10) is automatically stopped by an idling stop function, and a power supply stopping section (27F) that stops an electric power supply of a vehicle body (2, 3) when the restart standby time determining section (27A) determines that the restart standby time (T2) has elapsed.

Abstract: A hydraulic oil tank attachment structure arranged in a construction machine secures the strength of a hydraulic oil tank as well as secures a large capacity thereof. The attachment structure is arranged in a compact excavator provided with a revolving superstructure, a working device attached to the revolving superstructure, a hydraulic actuator including a revolving motor that drives the revolving superstructure and an actuator that drives the working device. A hydraulic oil tank made of synthetic resin, which stores hydraulic oil to be supplied to the hydraulic actuator, is attached on a revolving frame of the revolving superstructure. The hydraulic oil tank attachment structure has a holding member provided with a projecting part formed on a side surface of the tank, which is fixed on the revolving frame of the revolving superstructure so as to surround side surfaces thereof to hold the hydraulic oil tank via the projecting part.

Abstract: A hydraulic oil tank capable of assuring strength at a gage installation part and bringing a gage close to a hole portion of an exterior cover while maintaining a predetermined clearance between the exterior cover and the hydraulic oil tank is provided. The hydraulic oil tank, mounted on a swing frame of a hydraulic excavator upperstructure, has a side wall opposing an upperstructure exterior cover with a predetermined clearance, and is adapted to store hydraulic oil to be fed to hydraulic actuators. The hydraulic oil tank has a gage enabling a visual check on the hydraulic oil level in the tank through a hole portion in the exterior cover. The gage is installed in the tank side wall, with an internally-hollow protruding portion protruding toward the exterior cover hole portion and a transparent window portion arranged at an end of the protruding portion.

Abstract: A hydraulic oil tank attachment structure arranged in a construction machine secures the strength of a hydraulic oil tank as well as secures a large capacity thereof. The attachment structure is arranged in a compact excavator provided with a revolving superstructure, a working device attached to the revolving superstructure, a hydraulic actuator including a revolving motor that drives the revolving superstructure and an actuator that drives the working device. A hydraulic oil tank made of synthetic resin, which stores hydraulic oil to be supplied to the hydraulic actuator, is attached on a revolving frame of the revolving superstructure. The hydraulic oil tank attachment structure has a holding member provided with a projecting part formed on a side surface of the tank, which is fixed on the revolving frame of the revolving superstructure so as to surround side surfaces thereof to hold the hydraulic oil tank via the projecting part.

Abstract: A hydraulic oil tank capable of assuring strength at a gage installation part and bringing a gage close to a hole portion of an exterior cover while maintaining a predetermined clearance between the exterior cover and the hydraulic oil tank is provided. The hydraulic oil tank, mounted on a swing frame of a hydraulic excavator upperstructure, has a side wall opposing an upperstructure exterior cover with a predetermined clearance, and is adapted to store hydraulic oil to be fed to hydraulic actuators. The hydraulic oil tank has a gage enabling a visual check on the hydraulic oil level in the tank through a hole portion in the exterior cover. The gage is installed in the tank side wall, with an internally-hollow protruding portion protruding toward the exterior cover hole portion and a transparent window portion arranged at an end of the protruding portion.

Abstract: A foreign particle inspection apparatus includes a light projecting unit, a photo-receiving unit which receives the scattered light, and a controller. The photo-receiving unit is arranged such that its optical axis is tilted by a first angle with respect to a plane including the optical axis and the normal axis to the surface. When the angle of the polarization axis of the projected light with respect to the plane is defined as a second angle, the controller controls at least one of the polarization axis and the arrangement of the photo-receiving unit so that the differences between the first angle and the second angle become a first state and a second state, thereby determining a foreign particle based on the outputs from the photo-receiving unit in the first state and the second state.

Abstract: A foreign particle inspection apparatus includes a light projecting unit, a photo-receiving unit which receives the scattered light, and a. The photo-receiving unit is arranged such that its optical axis is tilted by a first angle with respect to a plane including the optical axis and the normal axis to the surface. When the angle of the polarization axis of the projected light with respect to the plane is defined as a second angle, the controller controls at least one of the polarization axis and the arrangement of the photo-receiving unit so that the differences between the first angle and the second angle become a first state and a second state, thereby determining a foreign particle based on the outputs from the photo-receiving unit in the first state and the second state.

Abstract: A position measurement apparatus includes a first beam splitter configured to split light from a light source into reference light and measurement light, a reference mirror configured to receive the reference light and a second beam splitter configured to synthesize the reference light reflected on the reference mirror with the measurement light that enters and is reflected on an object to be measured. The position measurement apparatus drives an object to be measured through a driving mechanism, detects the interference pattern through a photoelectric conversion element, and calculates a surface position of the object to be measured based on a change of a detection signal obtained from the interference pattern. The position measurement apparatus further includes a selector configured to select a signal from an interference area between reflected measurement light and reflected reference light.

Abstract: An exposure method for exposing a pattern of a reticle onto a plate, via a projection optical system, while synchronously scanning the reticle and the plate. The exposure method includes the steps of (a) measuring before exposing, the measuring step including (i) a first substep of obtaining surface form data that shows a surface form of the reticle, and (ii) a second substep of detecting a measurement position having an abnormal measurement result as an error measurement position among measurement positions, to measure the surface form of the reticle based on a measurement result of the obtaining substep, and (b) controlling synchronous scanning of the reticle and the plate using the measurement result of the detecting substep, except for the detecting result of the error measurement position.

Abstract: An exposure method for exposing a pattern of a reticle onto a plate, via a projection optical system, while synchronously scanning the reticle and the plate, said exposure method comprising the steps of obtaining surface form data that shows a surface form of the reticle, and controlling synchronous scanning of the reticle and the plate based on the surface form data, wherein said surface form obtaining step includes the steps of detecting a measurement position having an abnormal measurement result as an error measurement position among measurement positions to measure the surface form of the reticle, and measuring the surface form of the reticle at a scan speed used for exposure, and wherein said controlling step uses, as the surface form data, a measurement result of the measuring step that excludes a measurement result with the error measurement position.

Abstract: A position detecting system including a detecting system for detecting positions, at different points on a surface of a reticle having a predetermined pattern formed thereon, with respect to a direction substantially perpendicular to the reticle surface, wherein the detecting system includes a light projecting portion for directing light from a light source to the reticle surface and a light receiving portion for receiving reflection light from the reticle surface, and wherein the angle of incidence of light from the light projecting portion, being incident on the reticle surface, is not less than 45 degrees.

Abstract: An exposure apparatus includes a projection optical system for projecting a pattern formed a mask onto an object to be exposed, a correction optical element, provided between the mask and the projection optical system, for reducing a deformation of the pattern, and a detector of an oblique light projection system, provided at a side of a pattern surface of the mask, for detecting a surface shape of the mask through the correction optical element.

Abstract: An exposure apparatus includes a projection optical system for projecting a pattern formed a mask onto an object to be exposed, a correction optical element, provided between the mask and the projection optical system, for reducing a deformation of the pattern, and a detector of an oblique light projection system, provided at a side of a pattern surface of the mask, for detecting a surface shape of the mask through the correction optical element.

Abstract: A position detecting sensor for detecting that a sheet having come into an openable both-face conveying path for reversing the surfaces of the sheet having an image formed on one surface thereof and conveying the reversed sheet to an image forming portion has arrived at a predetermined re-feeding position, and the position detecting sensor is designed to be capable of detecting also the presence or absence of the occurrence of jam in the both-face conveying path, the mounting and dismounting of a both-face conveying portion and the opening and closing of the both-face conveying path.

Abstract: In a one-face mode, a first sheet discharge portion arranged on an upper face of an apparatus body, or a second sheet discharge portion arranged in the apparatus body so as to be freely opened and closed is opened, and a sheet forming an image on one surface thereof is discharged to this second sheet discharge portion. In a both-face mode, a sheet forming images on both surfaces thereof is conveyed to the first sheet discharge portion through a sheet discharge path formed by closing the second sheet discharge portion.