Abstract: According to one embodiment, a coating head includes a coating bar, nozzles, a first member, second members, third members, elastic members, and a position controller. The coating bar faces a coating member. The nozzles supply a liquid toward the coating bar. The first member includes first recesses. A portion of the nozzles is between the first recesses and the third members. The portion of the nozzles and the third members are fixed to the first member by the second members. The elastic members are located in at least first, second, or third positions. The first position is between the third members and the second members. The second position is between the portion of the first recesses and the nozzles. The third position is between the portion of the nozzles and the third members. The position controller controls a relative position between the coating bar and the nozzles.

Abstract: In embodiments, a holding device includes a suction pad, a first link, a second link, a base, and a tube member. The first link supports the suction pad so that the suction pad can rotate around a first rotation axis. The second link supports the first link so that the first link can rotate around a second rotation axis. The base supports the second link so that the second link can rotate around a third rotation axis. The tube member communicates the suction pad with the base and can be bent. The second rotation axis and the third rotation axis are not parallel to each other.

Abstract: According to an embodiment, an article posture changing device includes: a first end effector configured to grasp a projected tag of an article by adsorption; an arm unit configured to support the first end effector and move the first end effector along at least a vertical direction; and a controller configured to control the arm unit and the first end effector to grasp the tag, lift the article upward, separate the article from a placement surface, change an angle of the article by weight thereof, move the article downward, place the article on the placement surface, and release the grasp of the tag.

Abstract: According to one embodiment of the invention, a coating apparatus includes a first pipe, a first pump, a first nozzle, a second nozzle, and a holder. The first pipe includes a first inflow port, a first outflow port, and a second outflow port. The first pump is configured to supply liquid toward the first inflow port. The first nozzle includes a first nozzle inflow port and a first nozzle discharge port. The first nozzle inflow port is connected to the first outflow port. The first nozzle discharge port is configured to discharge the liquid passing through the first pipe. The second nozzle includes a second nozzle inflow port and a second discharge port. The second nozzle inflow port is connected to the second outflow port. The second nozzle discharge port is configured to discharge the liquid passing through the first pipe. The holder holds the first nozzle and the second nozzle. The holder is configured to form a first state and a second state.

Abstract: According to one embodiment, a coating head includes a coating bar, nozzles, a first member, second members, third members, elastic members, and a position controller. The coating bar faces a coating member. The nozzles supply a liquid toward the coating bar. The first member includes first recesses. A portion of the nozzles is between the first recesses and the third members. The portion of the nozzles and the third members are fixed to the first member by the second members. The elastic members are located in at least first, second, or third positions. The first position is between the third members and the second members. The second position is between the portion of the first recesses and the nozzles. The third position is between the portion of the nozzles and the third members. The position controller controls a relative position between the coating bar and the nozzles.

Abstract: A paper feeding device has a paper feed tray, a device body, a fan, a rectifying member, and a retreat mechanism. A paper bundle in which a plurality of sheets of paper are stacked can be placed on the paper feed tray. The rectifying member is positioned above the paper bundle placed on the paper feed tray in a state in which the paper feed tray is accommodated in an accommodating part of the device body. The rectifying member generates a negative pressure between the rectifying member and an uppermost sheet of paper of the paper bundle using airflow from the fan in a state in which the paper feed tray is accommodated in the accommodating part. The retreat mechanism displaces the rectifying member in conjunction with the paper feed tray so that the rectifying member retreats from the paper feed tray in at least one of a pull-out operation and a push-in operation of the paper feed tray.

Abstract: In embodiments, a holding device includes a suction pad, a first link, a second link, a base, and a tube member. The first link supports the suction pad so that the suction pad can rotate around a first rotation axis. The second link supports the first link so that the first link can rotate around a second rotation axis. The base supports the second link so that the second link can rotate around a third rotation axis. The tube member communicates the suction pad with the base and can be bent. The second rotation axis and the third rotation axis are not parallel to each other.

Abstract: According to one embodiment, a holding device includes a suction device, a sucker, a light amount sensor, and a controller. The suction device is configured to suction gas. The sucker is configured to communicate with the suction device and to adhere to an object by suction of the suction device. The light amount sensor is configured to two-dimensionally detect an amount of light from the object. The controller is configured to control the suction device on the basis of information detected by the light amount sensor.

Abstract: A paper feeding device has a paper feed tray, a device body, a fan, a rectifying member, and a retreat mechanism. A paper bundle in which a plurality of sheets of paper are stacked can be placed on the paper feed tray. The rectifying member is positioned above the paper bundle placed on the paper feed tray in a state in which the paper feed tray is accommodated in an accommodating part of the device body. The rectifying member generates a negative pressure between the rectifying member and an uppermost sheet of paper of the paper bundle using airflow from the fan in a state in which the paper feed tray is accommodated in the accommodating part. The retreat mechanism displaces the rectifying member in conjunction with the paper feed tray so that the rectifying member retreats from the paper feed tray in at least one of a pull-out operation and a push-in operation of the paper feed tray.

Abstract: According to an embodiment, an article posture changing device includes: a first end effector configured to grasp a projected tag of an article by adsorption; an arm unit configured to support the first end effector and move the first end effector along at least a vertical direction; and a controller configured to control the arm unit and the first end effector to grasp the tag, lift the article upward, separate the article from a placement surface, change an angle of the article by weight thereof, move the article downward, place the article on the placement surface, and release the grasp of the tag.

Abstract: According to one embodiment, an object holding apparatus includes a suction device, a suction pad, and a proximal sensor. The suction device is configured to suction gas. The suction pad is connected to the suction device, and is configured to hold an object based on suction by the suction device. The proximal sensor is configured to detect that the object is in close proximity to the suction pad. The suction device is controlled to perform suction when the proximal sensor detects that the object is in close proximity to the suction pad.

Abstract: According to one embodiment, a holding device includes a suction device, a sucker, a light amount sensor, and a controller. The suction device is configured to suction gas. The sucker is configured to communicate with the suction device and to adhere to an object by suction of the suction device. The light amount sensor is configured to two-dimensionally detect an amount of light from the object. The controller is configured to control the suction device on the basis of information detected by the light amount sensor.

Abstract: According to one embodiment, an object holding apparatus includes a suction device, a suction pad, and a proximal sensor. The suction device is configured to suction gas. The suction pad is connected to the suction device, and is configured to hold an object based on suction by the suction device. The proximal sensor is configured to detect that the object is in close proximity to the suction pad. The suction device is controlled to perform suction when the proximal sensor detects that the object is in close proximity to the suction pad.

Abstract: The present invention transmits upgrade information as appropriate from a server apparatus to one or more manufacturing apparatuses for performing a predetermined semiconductor process on processing target substrates. A server apparatus is provided with an upgrade information receiving portion that receives upgrade information, which is information for upgrading an execution software program for controlling the manufacturing apparatus; a state information storage portion in which state information, which is information relating to a state of the manufacturing apparatus, is stored; a transmission judging portion that judges whether or not to transmit the upgrade information to the manufacturing apparatus, using the state information; and a transmitting portion that transmits the upgrade information to the manufacturing apparatus to which the transmission judging portion has judged to transmit the upgrade information.

Abstract: The present invention transmits upgrade information as appropriate from a server apparatus to one or more manufacturing apparatuses for performing a predetermined semiconductor process on processing target substrates. A server apparatus is provided with an upgrade information receiving portion that receives upgrade information, which is information for upgrading an execution software program for controlling the manufacturing apparatus; a state information storage portion in which state information, which is information relating to a state of the manufacturing apparatus, is stored; a transmission judging portion that judges whether or not to transmit the upgrade information to the manufacturing apparatus, using the state information; and a transmitting portion that transmits the upgrade information to the manufacturing apparatus to which the transmission judging portion has judged to transmit the upgrade information.