Abstract: A sensor element suitable for miniaturization. This pressure sensor element has: a metal plate; an insulating film provided on a first surface, which is one surface of the metal plate, so as to form a covered region in which the first plate is covered and an exposed region in which the first surface is exposed; and a pressure detection circuit formed on the insulating film so as to be insulated from the first surface by means of the insulating film.

Abstract: A temperature-sensitive and strain-sensitive composite sensor includes a strain-sensitive resistive film and a temperature-sensitive resistive film. The strain-sensitive resistive film is represented by a formula of Cr(100-x-y)AlxNy, and 5<x?50 and 0.1?y?20 are satisfied. The temperature-sensitive resistive film has an absolute value of temperature coefficient of resistance (TCR) of 2000 ppm/° C. or more in a temperature range of ?50° C. or more and 450° C. or less.

Abstract: There is provided a multilayer electrode including a contact layer capable of being superposed on a strain resistance film; a diffusion prevention layer superposed on the contact layer; and a mounting layer superposed on the diffusion prevention layer, in which the diffusion prevention layer contains a transition element belonging to the fifth or sixth periods.

Abstract: A distortion resistance film is capable of reducing a property change accompanying a composition change and a pressure sensor uses the distortion resistance film. The distortion resistance film is represented by a formula Cr100-x-yAlxNy, in which composition regions of x and y satisfy 25<x?50 and 0.1<y?20, respectively.

Abstract: A distortion resistance film, etc., which includes Cr, Al, and N and in which film separation can be prevented. A distortion resistance film including an alloy material including Cr, Al, N, and Si.

Abstract: A stacked electrode is provided on a strain resistance film, wherein: the strain resistance film contains Cr and Al; the stacked electrode has a contact layer that overlaps the strain resistance film, a diffusion prevention layer that overlaps the contact layer, and a mounting layer that overlaps the diffusion prevention layer; and the diffusion prevention layer or the mounting layer covers the contact layer so that an end surface of the contact layer is not exposed.

Abstract: A strain resistance film containing a composition represented by Cr100-x-y-zAlxNyOz, satisfying 5?x?50, 0.1?y?20, 0.1?z?17, and y+z?25.

Abstract: A metal member with insulating film includes a metal member, an insulating film, and a reinforcement portion. The metal member includes a film formation surface and a connection surface facing in a different direction from the film formation surface and connecting to the film formation surface. The insulating film covers at least a part of the film formation surface and the connection surface over a connection position between the film formation surface and the connection surface. The reinforcement portion is formed along a periphery of the insulating film at the connection position and covers at least a part of the periphery of the insulating film from an opposite side to the metal member.

Abstract: [Problem] To provide a pressure sensor that has a plurality of detection parts in a lamination direction, and moreover has improved detection accuracy. [Solution] A pressure sensor 10 has a membrane 22 in which deformation corresponding to pressure occurs, a first gauge layer 40 which is formed on the membrane 22, an intermediate insulation layer 50 which is formed on the first gauge layer 40, and a second gauge layer 60 which is formed on the intermediate insulation layer 50. The first gauge layer 40 and the second gauge layer 60 respectively include a first detection part 42 and a second detection part 62 which detect the deformation of the membrane. The distance from the surface of the membrane 22 to the second detection part 62 is no more than 30 ?m.

Abstract: A sensor element suitable for miniaturization. This pressure sensor element has: a metal plate; an insulating film provided on a first surface, which is one surface of the metal plate, so as to form a covered region in which the first plate is covered and an exposed region in which the first surface is exposed; and a pressure detection circuit formed on the insulating film so as to be insulated from the first surface by means of the insulating film.