Abstract: A plasma processing apparatus includes a processing vessel; a placing table, serving as a lower electrode, disposed within the processing vessel; an upper electrode serving as a facing electrode of the placing table; a plasma processor configured to form a gas within the processing vessel into plasma by supplying a high frequency power and to process a processing target object on the placing table with the plasma; a cover member configured to cover the upper electrode from thereabove; a cooler provided within the cover member and configured to cool the upper electrode with a coolant having a temperature lower than a dew point temperature of exterior air outside the processing vessel; and a gas supply configured to supply a low-dew point gas having a dew point temperature lower than the dew point temperature of the exterior air into a space surrounded by the cover member and the upper electrode.

Abstract: Energy consumption of a temperature control unit can be reduced. A flexible pipe 13 includes a bellows pipe 130 made of a metal and an inner tube 131. The inner tube 131 is provided at an inner side of the bellows pipe 130, and an inner surface of the inner tube where a fluid flows is smooth. The inner surface of the inner tube 131 where the fluid flows may be smoother than a surface of a braided body. Further, the inner tube 131 may be made of, for example, a conductive material. An inner side of the inner tube 131 where the fluid flows may be coated with a conductive film.

Abstract: A substrate processing apparatus is provided. The apparatus comprises a chamber; a substrate support which is arranged in the chamber and has at least one first gas supply path; and at least one control valve configured to control a flow rate or pressure of gas supplied through the at least one first gas supply path. The substrate support includes a base, and an electrostatic chuck which is arranged on the base and has an upper surface. The upper surface has a plurality of protrusions and a first annular groove group. The first annular groove group comprises a first inner annular groove, a first intermediate annular groove, and a first outer annular groove. Any one of the first inner annular groove, the first intermediate annular groove, and the first outer annular groove communicates with the at least one first gas supply path.

Abstract: A plasma processing apparatus includes a processing vessel; a placing table, serving as a lower electrode, disposed within the processing vessel; an upper electrode serving as a facing electrode of the placing table; a plasma processor configured to form a gas within the processing vessel into plasma by supplying a high frequency power and to process a processing target object on the placing table with the plasma; a cover member configured to cover the upper electrode from thereabove; a cooler provided within the cover member and configured to cool the upper electrode with a coolant having a temperature lower than a dew point temperature of exterior air outside the processing vessel; and a gas supply configured to supply a low-dew point gas having a dew point temperature lower than the dew point temperature of the exterior air into a space surrounded by the cover member and the upper electrode.

Abstract: A plasma processing apparatus includes a processing vessel; a placing table, serving as a lower electrode, disposed within the processing vessel; an upper electrode serving as a facing electrode of the placing table; a plasma processor configured to form a gas within the processing vessel into plasma by supplying a high frequency power and to process a processing target object on the placing table with the plasma; a cover member configured to cover the upper electrode from thereabove; a cooler provided within the cover member and configured to cool the upper electrode with a coolant having a temperature lower than a dew point temperature of exterior air outside the processing vessel; and a gas supply configured to supply a low-dew point gas having a dew point temperature lower than the dew point temperature of the exterior air into a space surrounded by the cover member and the upper electrode.

Abstract: A processing system 100 includes a heat insulating pipe 12, a temperature measuring device 19, and a control device 20. The heat insulating pipe 12 has an inner pipe and an outer pipe. An airtight space is formed between the inner pipe and the outer pipe. A fluid having a temperature lower than that of an indoor space in which the heat insulating pipe 12 is placed is flown within the inner pipe. The temperature measuring device 19 measures a temperature of a surface of the heat insulating pipe 12. The control device 20 is controls a pressure within the airtight space by controlling an exhaust device 16 configured to exhaust a gas within the airtight space based on the temperature of the surface of the heat insulating pipe 12 and a dew-point temperature calculated from a humidity and the temperature of the indoor space.

Abstract: A plasma processing apparatus includes a processing vessel; a placing table, serving as a lower electrode, disposed within the processing vessel; an upper electrode serving as a facing electrode of the placing table; a plasma processor configured to form a gas within the processing vessel into plasma by supplying a high frequency power and to process a processing target object on the placing table with the plasma; a cover member configured to cover the upper electrode from thereabove; a cooler provided within the cover member and configured to cool the upper electrode with a coolant having a temperature lower than a dew point temperature of exterior air outside the processing vessel; and a gas supply configured to supply a low-dew point gas having a dew point temperature lower than the dew point temperature of the exterior air into a space surrounded by the cover member and the upper electrode.

Abstract: A processing system 100 includes a heat insulating pipe 12, a temperature measuring device 19, and a control device 20. The heat insulating pipe 12 has an inner pipe and an outer pipe. An airtight space is formed between the inner pipe and the outer pipe. A fluid having a temperature lower than that of an indoor space in which the heat insulating pipe 12 is placed is flown within the inner pipe. The temperature measuring device 19 measures a temperature of a surface of the heat insulating pipe 12. The control device 20 is controls a pressure within the airtight space by controlling an exhaust device 16 configured to exhaust a gas within the airtight space based on the temperature of the surface of the heat insulating pipe 12 and a dew-point temperature calculated from a humidity and the temperature of the indoor space.

Abstract: Energy consumption of a temperature control unit can be reduced. A flexible pipe 13 includes a bellows pipe 130 made of a metal and an inner tube 131. The inner tube 131 is provided at an inner side of the bellows pipe 130, and an inner surface of the inner tube where a fluid flows is smooth. The inner surface of the inner tube 131 where the fluid flows may be smoother than a surface of a braided body. Further, the inner tube 131 may be made of, for example, a conductive material. An inner side of the inner tube 131 where the fluid flows may be coated with a conductive film.

Abstract: A navigation device includes: a search request transmitting unit to transmit a route search request including an avoidance range specified by using longitude and latitude; and a search result receiving unit to receive route information transmitted in response to the route search request. A route providing device includes a search request receiving unit to receive the route search request transmitted from the navigation device; an avoidance road identifying unit to identify a road corresponding to the avoidance range included in the route search request; a route search processing unit to determine an optimal route to reach a destination by bypassing the road corresponding to the avoidance range; and a search result transmitting unit to transmit, to the navigation device, the route information indicating the determined route.

Abstract: A navigation device includes: a search request transmitting unit to transmit a route search request including an avoidance range specified by using longitude and latitude; and a search result receiving unit to receive route information transmitted in response to the route search request. A route providing device includes a search request receiving unit to receive the route search request transmitted from the navigation device; an avoidance road identifying unit to identify a road corresponding to the avoidance range included in the route search request; a route search processing unit to determine an optimal route to reach a destination by bypassing the road corresponding to the avoidance range; and a search result transmitting unit to transmit, to the navigation device, the route information indicating the determined route.

Abstract: The present invention provides a navigation system and roadway search method capable of easily searching for a roadway even if a user does not accurately know the name of the roadway. The navigation system includes an icon display unit that displays roadway icons by road type on a screen, and a search key setting unit that specifies a road type corresponding to the icon selected from the icons displayed on the screen, and sets a roadway name corresponding to the icon selected from the icons displayed on the screen as a search key through a user operation. The navigation system displays icons on the screen that are constituted by marks that are similar to marks actually used for roadways in paper maps or road signs. Thus the user is able to search for a roadway without needing to know the complete name of the desired roadway.

Abstract: A navigation apparatus is disclosed comprising update functions to update nationwide updated version map data using route-specific update data, and to update the nationwide updated version map data to the next nationwide updated version map data using nationwide update data. A map update processing portion of this navigation apparatus performs updates of map data in the background of navigation control, gives priority to update processing using the route-specific update data over update processing using the nationwide update data, and, if map files to be updated using route-specific update files included in the route-specific update data have not been updated using the nationwide update data, performs updates using the nationwide update data, and then performs updates using route-specific update files.

Abstract: In a new map, links not constituting a new road and connected to links constituting the new road, are set as boundary links. Further, in an old map, the same links as the boundary links of the new map are set as boundary links of the old map. Then, in the new map, links connecting between the boundary links are searched for as new road constituent links. Further, in the old map, links connecting between the boundary links are searched for as deletion links. Then, link information of the respective boundary links of the old map data is replaced with link information of the respective boundary links of the corresponding new map data. The link information of the deletion links is then deleted from the old map data, and link information of the new road constituent links is added to the old map data, to thereby create delivery map data.

Abstract: The present invention provides a navigation system and roadway search method capable of easily searching for a roadway even if a user does not accurately know the name of the roadway. The navigation system includes an icon display unit that displays roadway icons by road type on a screen, and a search key setting unit that specifies a road type corresponding to the icon selected from the icons displayed on the screen, and sets a roadway name corresponding to the icon selected from the icons displayed on the screen as a search key through a user operation. The navigation system displays icons on the screen that are constituted by marks that are similar to marks actually used for roadways in paper maps or road signs. Thus the user is able to search for a roadway without needing to know the complete name of the desired roadway.

Abstract: A navigation apparatus is disclosed comprising update functions to update nationwide updated version map data using route-specific update data, and to update the nationwide updated version map data to the next nationwide updated version map data using nationwide update data. A map update processing portion of this navigation apparatus performs updates of map data in the background of navigation control, gives priority to update processing using the route-specific update data over update processing using the nationwide update data, and, if map files to be updated using route-specific update files included in the route-specific update data have not been updated using the nationwide update data, performs updates using the nationwide update data, and then performs updates using route-specific update files.