Abstract: A piezoelectric linear actuator comprising a laminated piezoelectric actuator having a cylindrical shape; a lower support member supporting the laminated piezoelectric actuator and extending laterally to the left and right of the laminated piezoelectric actuator; a pair of displacement transfer members extending along the left and right sides of the laminated piezoelectric actuator, respectively, to slidably intersect the lower support member and transferring displacement due to the piezoelectric effect of the laminated piezoelectric actuator; and an output part locked to the pair of displacement transfer members below the lower support member and coupling lower end portions of the displacement transfer members, wherein the pair of displacement transfer members are formed to have a width dimension that is the same or substantially the same as the width dimension of the laminated piezoelectric actuator.

Abstract: Passage members each have a required width, a required height, and a required length, and are provided at middle portions in the width direction with fluid passages, respectively. As coupling means, two bolts are used. The middle portion in the width direction of each of the passage members has opposite end portions that are each provided with a female screw and a bolt insertion hole to be faced by the female screw, respectively. The upper bolt is inserted into one of the passage members and is screwed into the female screw of the other passage member. The lower bolt is inserted into the other passage member and is screwed into the female screw of the one of the passage members. The passage members are coupled with use of the two upper and lower bolts whereby a seal member is securely fixed.

Abstract: A piezoelectric linear actuator includes a laminated piezoelectric actuator, a lower support member that supports the laminated piezoelectric actuator, a pressing member that biases the laminated piezoelectric actuator from the top thereof, a guide member connected to the lower support member to guide the pressing member; and a displacement transmission member which includes a pair of displacement transmission plates, an adjustment screw connected to the pair of displacement transmission plates, an output section connected to the pair of displacement transmission plates, and an elastic body that biases the output section downward.

Abstract: A piezoelectric linear actuator comprising a laminated piezoelectric actuator having a cylindrical shape; a lower support member supporting the laminated piezoelectric actuator and extending laterally to the left and right of the laminated piezoelectric actuator; a pair of displacement transfer members extending along the left and right sides of the laminated piezoelectric actuator, respectively, to slidably intersect the lower support member and transferring displacement due to the piezoelectric effect of the laminated piezoelectric actuator; and an output part locked to the pair of displacement transfer members below the lower support member and coupling lower end portions of the displacement transfer members, wherein the pair of displacement transfer members are formed to have a width dimension that is the same or substantially the same as the width dimension of the laminated piezoelectric actuator.

Abstract: Passage members each have a required width, a required height, and a required length, and are provided at middle portions in the width direction with fluid passages, respectively. As coupling means, two bolts are used. The middle portion in the width direction of each of the passage members has opposite end portions that are each provided with a female screw and a bolt insertion hole to be faced by the female screw, respectively. The upper bolt is inserted into one of the passage members and is screwed into the female screw of the other passage member. The lower bolt is inserted into the other passage member and is screwed into the female screw of the one of the passage members. The passage members are coupled with use of the two upper and lower bolts whereby a seal member is securely fixed.

Abstract: A flow control valve for a flow controller includes a valve main body provided with an open-top valve chamber hole, a metal diaphragm valve element, a lower support cylinder having notches facing each other, an upper support cylinder attached to the lower support cylinder, a support frame horizontally disposed through the notches of the lower support cylinder, a disc spring placed between the support frame and a bottom of the lower support cylinder, a lower cradle placed on the support frame, a piezoelectric element inserted into the support cylinder above the lower cradle, a guide fixed to the valve main body together with the support frame with the support cylinder being inserted through the guide cylinder in a vertically movable manner. The support cylinder is pressed upward by the extension of the piezoelectric element, whereby the metal diaphragm valve element is separated from the valve seat by the elastic force.

Abstract: A piezoelectric linear actuator includes a laminated piezoelectric actuator, a lower support member that supports the laminated piezoelectric actuator, a pressing member that biases the laminated piezoelectric actuator from the top thereof, a guide member connected to the lower support member to guide the pressing member; and a displacement transmission member which includes a pair of displacement transmission plates, an adjustment screw connected to the pair of displacement transmission plates, an output section connected to the pair of displacement transmission plates, and an elastic body that biases the output section downward.

Abstract: A flow control valve for a flow controller includes a valve main body provided with an open-top valve chamber hole, a metal diaphragm valve element, a lower support cylinder having notches facing each other, an upper support cylinder attached to the lower support cylinder, a support frame horizontally disposed through the notches of the lower support cylinder, a disc spring placed between the support frame and a bottom of the lower support cylinder, a lower cradle placed on the support frame, a piezoelectric element inserted into the support cylinder above the lower cradle, a guide fixed to the valve main body together with the support frame with the support cylinder being inserted through the guide cylinder in a vertically movable manner. The support cylinder is pressed upward by the extension of the piezoelectric element, whereby the metal diaphragm valve element is separated from the valve seat by the elastic force.

Abstract: This invention provides a fluid control device capable of making compact a fluid control device in which a valve and a limit switch are combined. A valve 6 includes a piston 26 as a moving member which includes a protruding portion protruding from an opening of a casing 21, and which linearly moves according to opening and closing of the valve 6 so as to abut against a limit switch 7. The limit switch 7 is made to face the piston 26 and is attached via a limit switch positioning unit 8 so as to be adjustable about its position. The limit switch positioning unit 8 includes a first bolt 42 fixed to a body 2, a second bolt 43 fixed to the limit switch 7, and a connection screw 44 which connects both the bolts 42, 43. The first bolt 42 and the second bolt 43 have different pitches from each other.

Abstract: A gasket type orifice includes a first orifice base having a through-type passage in a central area thereof, a second orifice base having in a central area thereof a through-type passage communicating with the passage of the first orifice base, and an orifice plate having an orifice hole formed in a central area thereof, wherein the orifice plate is mounted by insertion in an airtight manner between both orifice bases, and the gasket type orifice is installed in a fluid passage, in which the outer end faces of both orifice bases respectively serve as sealing faces, and an outer diameter of the second orifice base, located on the downstream side, is larger than an outer diameter of the first orifice base located on the upstream side, and an outer peripheral edge portion of an inner end face of the second orifice base serves as another sealing face.

Abstract: This invention provides a fluid control device which is capable of visually recognizing its opening and closing states with a simple configuration. The casing 3 is formed so as to be opened upward. The piston 8 is disposed at an upper end portion of a valve rod 7 such that a piston upper end portion is exposed from an opening of the casing 3 when the valve rod 7 is located at the upper position.

Abstract: This invention provides a fluid control device capable of making compact a fluid control device in which a valve and a limit switch are combined. A valve 6 includes a piston 26 as a moving member which includes a protruding portion protruding from an opening of a casing 21, and which linearly moves according to opening and closing of the valve 6 so as to abut against a limit switch 7. The limit switch 7 is made to face the piston 26 and is attached via a limit switch positioning unit 8 so as to be adjustable about its position. The limit switch positioning unit 8 includes a first bolt 42 fixed to a body 2, a second bolt 43 fixed to the limit switch 7, and a connection screw 44 which connects both the bolts 42, 43. The first bolt 42 and the second bolt 43 have different pitches from each other.

Abstract: This invention provides a fluid control device which is capable of visually recognizing its opening and closing states with a simple configuration. The casing 3 is formed so as to be opened upward. The piston 8 is disposed at an upper end portion of a valve rod 7 such that a piston upper end portion is exposed from an opening of the casing 3 when the valve rod 7 is located at the upper position.

Abstract: A gasket type orifice includes a first orifice base having a through-type passage in a central area thereof, a second orifice base having in a central area thereof a through-type passage communicating with the passage of the first orifice base, and an orifice plate having an orifice hole formed in a central area thereof, wherein the orifice plate is mounted by insertion in an airtight manner between both orifice bases, and the gasket type orifice is installed in a fluid passage, in which the outer end faces of both orifice bases respectively serve as sealing faces, and an outer diameter of the second orifice base, located on the downstream side, is larger than an outer diameter of the first orifice base located on the upstream side, and an outer peripheral edge portion of an inner end face of the second orifice base serves as another sealing face.