Abstract: A lid opening/closing device includes a lid box, a lid, and an opening/closing mechanism. The opening/closing mechanism includes, as a link interposed between the lid box and the lid, a main arm rotatably supported on the lid box at one main arm end portion thereof and an auxiliary arm configured to restrict a posture of the lid during opening/closing of the lid so as to keep the lid in a predetermined posture by rotating in conjunction with rotation of the main arm. The main arm includes an arm-side restriction portion configured to come into contact with a back surface side of the lid at an opened position of the lid to restrict the main arm from rotating to an open side. An axial length of the arm-side restriction portion is longer than an axial length of the one main arm end portion.

Abstract: In a lid assembly structure 1 which includes a base member 2, a lid 3, and an opening/closing mechanism 5 and in which the opening/closing mechanism 5 includes a biasing member 8, during assembling of the base member 2 and the opening/closing mechanism 5, the biasing member 8 is guided by a guide portion 90 which is a part of the opening/closing mechanism 5, and a state of the biasing member 8 is changed from a temporary assembled state where a second engagement end 82 of the biasing member 8 and a temporary engagement portion 93 engage with each other to a main assembled state where the second engagement end 82 and a main engagement portion 91 of a mating member engage with each other, thereby accumulating at least a part of a biasing force in the biasing member 8.

Abstract: A lid opening/closing device includes a lid box, a lid, and an opening/closing mechanism. The opening/closing mechanism includes, as a link interposed between the lid box and the lid, a main arm rotatably supported on the lid box at one main arm end portion thereof and an auxiliary arm configured to restrict a posture of the lid during opening/closing of the lid so as to keep the lid in a predetermined posture by rotating in conjunction with rotation of the main arm. The main arm includes an arm-side restriction portion configured to come into contact with a back surface side of the lid at an opened position of the lid to restrict the main arm from rotating to an open side. An axial length of the arm-side restriction portion is longer than an axial length of the one main arm end portion.

Abstract: In a lid assembly structure 1 which includes a base member 2, a lid 3, and an opening/closing mechanism 5 and in which the opening/closing mechanism 5 includes a biasing member 8, during assembling of the base member 2 and the opening/closing mechanism 5, the biasing member 8 is guided by a guide portion 90 which is a part of the opening/closing mechanism 5, and a state of the biasing member 8 is changed from a temporary assembled state where a second engagement end 82 of the biasing member 8 and a temporary engagement portion 93 engage with each other to a main assembled state where the second engagement end 82 and a main engagement portion 91 of a mating member engage with each other, thereby accumulating at least a part of a biasing force in the biasing member 8.

Abstract: An object of the present invention is to provide the X-ray tube which improves the workability of the baking for obtaining the ultra-high vacuum of the X-ray tube having a field emission type electron gun and have a stable performance. The X-ray tube comprises a field emission type electron gun chamber, an electron beam aperture, an X-ray target and a vacuum pump, in one body with a vacuum sealing structure (vacuum tube section). The vacuum tube section is attachable and detachable to the electromagnetic lens section in the X-ray tube, thereby it is possible to perform the baking by removing only the vacuum tube section. The fitting portions for positioning are provided at the vacuum tube section and the electromagnetic lens section, and therefore it is a constitution to easily perform an optical axis alignment at a mounting time after the baking.

Abstract: An object of the present invention is to provide the X-ray tube which improves the workability of the baking for obtaining the ultra-high vacuum of the X-ray tube having a field emission type electron gun and have a stable performance. The X-ray tube comprises a field emission type electron gun chamber, an electron beam aperture, an X-ray target and a vacuum pump, in one body with a vacuum sealing structure (vacuum tube section). The vacuum tube section is attachable and detachable to the electromagnetic lens section in the X-ray tube, thereby it is possible to perform the baking by removing only the vacuum tube section. The fitting portions for positioning are provided at the vacuum tube section and the electromagnetic lens section, and therefore it is a constitution to easily perform an optical axis alignment at a mounting time after the baking.

Abstract: An X-ray tube and an X-ray inspection apparatus using the X-ray tube have improved workability of the baking for obtaining an ultra-high vacuum of the X-ray tube having a field emission type electron gun, and have stable performance. The X-ray tube includes a field emission type electron gun chamber, an electron beam aperture, an X-ray target and a vacuum pump in one body with a vacuum sealing structure (vacuum tube section). The vacuum tube section is attachable and detachable to an electromagnetic lens section in the X-ray tube. It is thereby possible to perform the baking by removing only the vacuum tube section. Fitting portions for positioning are provided at the vacuum tube section and the electromagnetic lens section to easily perform an optical axis alignment at a mounting time after the baking.

Abstract: A method and apparatus for automatically focussing a specimen image in an electron microscope. Excitation currents for an objective lens of the microscope are previously determined in accordance with predetermined magnifications in one-to-one correspondence. When one of the magnifications is selected, the objective lens is automatically excited with the current corresponding to the magnification, whereby the specimen image is automatically properly focussed.

Abstract: A symmetrical magnetic field type objective lens for an electron microscope comprises an upper magnetic pole piece and a lower magnetic pole piece disposed below the upper pole piece with a predetermined inter-pole distance S. Bores of a same diameter b are formed in the upper and the lower pole pieces, respectively. The distance S and the diameter are selected so that 1.ltoreq.S/b.ltoreq.5. Additionally, excitation J of the objective lens is so selected with respect to a predetermined magnetomotive force Jc.o. of a Riecke-Ruska's condenser objective lens that the condition that 1.4 Jc.o..ltoreq.J.ltoreq.1.7 Jc.o. is fulfilled. The objective lens assures a wide field of view without being accompanied with blurs or distortion of image.

Abstract: This invention relates to a method and apparatus for obtaining a single photograph of electron microscope images, with low gain in magnification, of relatively thick specimen, which photograph is suitable for direct comparison with a corresponding photograph of the same specimen obtained with an optical microscope: wherein either the specimen or the electron beam is so manipulated that the electron beam passes discretely and stepwisely through sequential portions of the specimen, and prior to impinging on the photographic plate the electron beam is screened to eliminate any portion thereof which would produce aberrations or other distortion and is controllably directed to impinge on a portion of the photographic plate which corresponds to the portion of the specimen through which the beam is passing.