Patents by Inventor Kohei Tsugita

Kohei Tsugita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for analyzing quartz member
    Patent number: 8268185
    Abstract: A method of analyzing a quartz member includes the step of supplying an etchant to the quartz member so as to etch the quartz member. The method also includes analyzing the etchant used in the supplying step. The etchant is supplied to a concave etchant receiving portion that is formed in the quartz member prior to the supplying step and has an inner wall thereof formed of the quartz member.
    Type: Grant
    Filed: May 28, 2007
    Date of Patent: September 18, 2012
    Assignee: Tokyo Electron Limited
    Inventors: Kazuya Dobashi, Teruyuki Hayashi, Kohei Tsugita, Misako Saito
  • Analysis method and analysis apparatus
    Patent number: 7923680
    Abstract: An analysis apparatus includes a first process part for removing a film formed on a substrate by irradiating the film with ultraviolet light, a second process part for providing a solution onto a surface of the substrate for dissolving an object being analyzed on the substrate, and a third process part for analyzing the object being analyzed in the solution that is used in the second step.
    Type: Grant
    Filed: June 21, 2007
    Date of Patent: April 12, 2011
    Assignee: Tokyo Electron Limited
    Inventors: Kazuya Dobashi, Shigeru Kawamura, Kohei Tsugita, Teruyuki Hayashi
  • Analyzing Method and Analyzing Apparatus
    Publication number: 20090218483
    Abstract: An analysis apparatus includes a first process part for removing a film formed on a substrate by irradiating the film with ultraviolet light, a second process part for providing a solution onto a surface of the substrate for dissolving an object being analyzed on the substrate, and a third process part for analyzing the object being analyzed in the solution that is used in the second step.
    Type: Application
    Filed: June 21, 2007
    Publication date: September 3, 2009
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Kazuya Dobashi, Shigeru Kawamura, Kohei Tsugita, Teruyuki Hayashi
  • Method for Analyzing Quartz Member
    Publication number: 20080302762
    Abstract: A disclosed method of analyzing a quartz member includes steps of supplying an etchant to an etchant receiving portion formed concavely in the quartz member so as to etch the quartz member; and analyzing the etchant used in the supplying step.
    Type: Application
    Filed: May 28, 2007
    Publication date: December 11, 2008
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Kazuya Dobashi, Teruyuki Hayashi, Kohei Tsugita, Misako Saito