Abstract: At a first timing after mounting a semiconductor wafer W on an electrostatic chuck 38, a susceptor 12 is switched from an electrically grounded state into a floated state. From a second timing after the first timing, a second high frequency power HF for plasma generation is applied to the susceptor 12, and a processing gas is excited into plasma in a chamber 10. From a third timing after the second timing, a first high frequency power LF for ion attraction is applied to the susceptor 12, and a self-bias (?Vdc) is generated. From a fourth timing close to the third timing, a negative second DC voltage ?BDC corresponding to the self-bias (?Vdc) is applied to the susceptor 12. From the fifth timing after the fourth timing, a positive first DC voltage ADC is applied to an inner electrode 42 of the electrostatic chuck 38.

Abstract: At a first timing after mounting a semiconductor wafer W on an electrostatic chuck 38, a susceptor 12 is switched from an electrically grounded state into a floated state. From a second timing after the first timing, a second high frequency power HF for plasma generation is applied to the susceptor 12, and a processing gas is excited into plasma in a chamber 10. From a third timing after the second timing, a first high frequency power LF for ion attraction is applied to the susceptor 12, and a self-bias (?Vdc) is generated. From a fourth timing close to the third timing, a negative second DC voltage ?BDC corresponding to the self-bias (?Vdc) is applied to the susceptor 12. From the fifth timing after the fourth timing, a positive first DC voltage ADC is applied to an inner electrode 42 of the electrostatic chuck 38.

Abstract: A linear feedback shift calculation apparatus, into which input data is input, and which outputs output data, including: an L generation unit which generates q values of q0 to qN?2 represented by: q k = { p 0 ( k = 0 ) p k + ? i = 0 k - 1 ? q k - 1 - i × p i ( 1 ? k ? N - 2 ) Equation ? ? 1 (where, p0, p1, . . . , pN?1, q0, q1, . . .

Abstract: A linear feedback shift calculation apparatus, into which input data is input, and which outputs output data, including: an L generation unit which generates q values of q0 to qN?2 represented by: q k = { p 0 ( k = 0 ) p k + ? i = 0 k - 1 ? q k - 1 - i × p i ( 1 ? k ? N - 2 ) Equation ? ? 1 (where, p0, p1, . . . , pN?1, q0, q1, . . .