Abstract: There is provided a probe unit correction method for correcting linear expansion of a probe unit to obtain an accurate measurement value. First, a probe offset value is calculated as a model. Then, a probe unit correction method includes a temperature data acquisition step of acquiring a temperature difference between a temperature at a time of calibration and a temperature of a current measurement environment, a reference tip coordinate correction step of calculating, as a reference tip correction coordinate value, a correction value of a reference tip coordinate value to which linear expansion is added, and a probe offset correction step of calculating, as a probe offset correction value, a correction value of a probe offset value to which the linear expansion is added.

Abstract: There is provided a probe unit correction method for correcting linear expansion of a probe unit to obtain an accurate measurement value. First, a probe offset value is calculated as a model. Then, a probe unit correction method includes a temperature data acquisition step of acquiring a temperature difference between a temperature at a time of calibration and a temperature of a current measurement environment, a reference tip coordinate correction step of calculating, as a reference tip correction coordinate value, a correction value of a reference tip coordinate value to which linear expansion is added, and a probe offset correction step of calculating, as a probe offset correction value, a correction value of a probe offset value to which the linear expansion is added.

Abstract: A measurement system includes a measuring instrument having coordinate measurement capabilities, and a control device generating a command for controlling operation of the measuring instrument. The measuring instrument includes an NC controller executing an operation that is based on a command stored in a command storage that can be browsed by the measuring instrument, and writing a result of the executed operation to the command storage. The control device includes an NC driver writing the command to the command storage, and writing information contingent on the command and on the result of the operation by the measuring instrument to the command storage.

Abstract: A measurement system includes a measuring instrument having coordinate measurement capabilities, and a control device generating a command for controlling operation of the measuring instrument. The measuring instrument includes an NC controller executing an operation that is based on a command stored in a command storage that can be browsed by the measuring instrument, and writing a result of the executed operation to the command storage. The control device includes an NC driver writing the command to the command storage, and writing information contingent on the command and on the result of the operation by the measuring instrument to the command storage.