Patents by Inventor Kohsuke Tsuchiya
Kohsuke Tsuchiya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230331930Abstract: To provide a polyvinyl alcohol composition effectively suppressed in generation of an aggregated product, in a method for producing a wetting agent for a semiconductor, containing a polyvinyl alcohol composition. A method for producing a wetting agent for a semiconductor, containing a polyvinyl alcohol composition, wherein the polyvinyl alcohol composition is obtained through an addition-in-liquid step of adding into the inside of any one solution of a first liquid containing polyvinyl alcohol and water and a second liquid other than the first liquid, the other liquid of the first liquid and the second liquid.Type: ApplicationFiled: June 9, 2021Publication date: October 19, 2023Applicant: FUJIMI INCORPORATEDInventors: Hisanori TANSHO, Kohsuke TSUCHIYA, Hiroki YAMAGUCHI, Reiko AKIZUKI, Ryunosuke ANDO
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Publication number: 20230174821Abstract: Provided is a polishing composition that contains a cellulose derivative and can improve the polishing removability and enhance the wettability of a polished surface of a silicon wafer. The polishing composition contains an abrasive, a cellulose derivative, a basic compound, and water. Here, the polishing composition has a zeta potential of -24.0 mV or more.Type: ApplicationFiled: March 4, 2021Publication date: June 8, 2023Applicant: FUJIMI INCORPORATEDInventors: Kohsuke TSUCHIYA, Taiki ICHITSUBO
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Publication number: 20230143074Abstract: Provided is a polishing composition that can achieve wettability enhancement and haze reduction of a polished surface of a silicon wafer. The polishing composition for a silicon wafer contains an abrasive, a cellulose derivative, a surfactant, a basic compound, and water. Here, the cellulose derivative has a weight average molecular weight of more than 120×104, and the surfactant has a molecular weight of less than 4000.Type: ApplicationFiled: March 1, 2021Publication date: May 11, 2023Applicant: FUJIMI INCORPORATEDInventor: Kohsuke TSUCHIYA
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Publication number: 20230106868Abstract: Provided is a polishing composition that can achieve haze reduction and wettability enhancement of a polished surface of a silicon wafer. This polishing composition contains silica particles, a cellulose derivative, a basic compound, and water. Here, the silica particles have an average primary particle diameter of 30 nm or less and an average secondary particle diameter of 60 nm or less. The cellulose derivative has a weight average molecular weight of more than 120×104.Type: ApplicationFiled: March 4, 2021Publication date: April 6, 2023Applicant: FUJIMI INCORPORATEDInventor: Kohsuke TSUCHIYA
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Publication number: 20230073290Abstract: Provided is a polishing composition which contains a water-soluble polymer and is suitable for reducing LPDs. The polishing composition provided in this application includes an abrasive, a water-soluble polymer, and a basic compound. In the polishing composition, the content of a reaction product of a polymerization initiator and a polymerization inhibitor is 0.1 ppb or less of the polishing composition on a weight basis.Type: ApplicationFiled: July 21, 2022Publication date: March 9, 2023Applicant: FUJIMI INCORPORATEDInventors: Kohsuke TSUCHIYA, Hisanori TANSHO, Yusuke SUGA, Taiki ICHITSUBO, Takayuki TAKEMOTO, Naohiko SAITO, Michihiro KAAI
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Publication number: 20220267644Abstract: Provided is a method for filtering an additive-containing liquid that can achieve a polishing composition exhibiting excellent defect reducing capability while maintaining a practical filter life. The method for filtering a polishing additive-containing liquid provided by the present invention includes the step of: filtering the polishing additive-containing liquid with a filter that satisfies the following conditions (1) and (2). (1) The average pore diameter P measured by a palm porometer is 0.15 ?m or less. (2) The pore diameter gradient (Sin/Sout), which is the ratio of the inlet-side average pore diameter (SO to the outlet-side average pore diameter (Sout), both diameters being measured through observation with an SEM, is 3 or less.Type: ApplicationFiled: July 30, 2020Publication date: August 25, 2022Applicant: FUJIMI INCORPORATEDInventors: Shinji FURUTA, Takashi HAYAKAWA, Keiji ASHITAKA, Naoya MIWA, Kohsuke TSUCHIYA, Hisanori TANSHO, Reiko AKIZUKI
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Patent number: 11421131Abstract: Provided is a polishing composition which contains a water-soluble polymer and is suitable for reducing LPDs. The polishing composition provided in this application includes an abrasive, a water-soluble polymer, and a basic compound. In the polishing composition, the content of a reaction product of a polymerization initiator and a polymerization inhibitor is 0.1 ppb or less of the polishing composition on a weight basis.Type: GrantFiled: October 19, 2018Date of Patent: August 23, 2022Assignees: FUJIMI INCORPORATED, TOAGOSEI CO., LTD.Inventors: Kohsuke Tsuchiya, Hisanori Tansho, Yusuke Suga, Taiki Ichitsubo, Takayuki Takemoto, Naohiko Saito, Michihiro Kaai
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Publication number: 20220186078Abstract: Provided is a polishing composition having excellent capability of reducing haze on the surface of an object to be polished. The polishing composition provided by the present invention includes an abrasive, a basic compound, a water-soluble polymer, and water. The water-soluble polymer includes at least a water-soluble polymer P1 and a water-soluble polymer P2. Here, the water-soluble polymer P1 is an acetalized polyvinyl alcohol-based polymer, and the water-soluble polymer P2 is a water-soluble polymer other than the acetalized polyvinyl alcohol-based polymer.Type: ApplicationFiled: March 25, 2020Publication date: June 16, 2022Applicant: FUJIMI INCORPORATEDInventors: Kohsuke TSUCHIYA, Maki ASADA, Taiki ICHITSUBO
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Publication number: 20220186077Abstract: The present invention provides means capable of achieving both a reduction in the number of defects and a reduction in haze in an object to be polished after polishing at a high level in a method of polishing the object to be polished containing a material having a silicon-silicon bond. The present invention relates to a method of polishing an object to be polished containing a material having a silicon-silicon bond, and the polishing method includes a final polishing step Pf.Type: ApplicationFiled: January 30, 2020Publication date: June 16, 2022Applicant: FUJIMI INCORPORATEDInventors: Kohsuke TSUCHIYA, Maki ASADA, Satoshi MOMOTA
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Publication number: 20220162477Abstract: The polishing composition provided by the present invention contains an abrasive, a polyvinyl alcohol polymer as a water-soluble polymer, a basic compound, and water, and further contains a trivalent or higher polyvalent organic acid (salt).Type: ApplicationFiled: March 23, 2020Publication date: May 26, 2022Applicant: FUJIMI INCORPORATEDInventors: Yoshiko YAMAGUCHI, Osamu GOTO, Kohsuke TSUCHIYA, Taiki ICHITSUBO
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Patent number: 11332640Abstract: The present invention relates to a polishing composition containing an abrasive, a water-soluble polymer, an anionic surfactant, a basic compound, and water, in which the anionic surfactant has an oxyalkylene unit, and an average addition mole number of the oxyalkylene unit of the anionic surfactant is more than 3 and 25 or less. According to the present invention, it is possible to provide a polishing composition which can reduce the haze of a polished object and is also excellent in a polishing removal rate.Type: GrantFiled: February 8, 2017Date of Patent: May 17, 2022Assignee: FUJIMI INCORPORATEDInventors: Megumi Taniguchi, Kohsuke Tsuchiya, Maki Asada, Taiki Ichitsubo, Hisanori Tansho
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Patent number: 11130883Abstract: Provided is a polishing composition that includes a cellulose derivative and is effective for reducing surface defects after polishing. According to the present application, a polishing composition comprising an abrasive, a basic compound and a surface protective agent is provided. The surface protective agent contains a cellulose derivative and a vinyl alcohol-based dispersant. The surface protective agent has a dispersibility parameter ? of less than 100.Type: GrantFiled: November 15, 2017Date of Patent: September 28, 2021Assignee: FUJIMI INCORPORATEDInventors: Kohsuke Tsuchiya, Maki Asada
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Publication number: 20210189177Abstract: Provided is a polishing composition which contains a water-soluble polymer and is suitable for reducing LPDs. The polishing composition provided in this application includes an abrasive, a water-soluble polymer, and a basic compound. In the polishing composition, the content of a reaction product of a polymerization initiator and a polymerization inhibitor is 0.1 ppb or less of the polishing composition on a weight basis.Type: ApplicationFiled: October 19, 2018Publication date: June 24, 2021Applicants: FUJIMI INCORPORATED, TOAGOSEI CO., LTD.Inventors: Kohsuke TSUCHIYA, Hisanori TANSHO, Yusuke SUGA, Taiki ICHITSUBO, Takayuki TAKEMOTO, Naohiko SAITO, Michihiro KAAI
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Patent number: 10745588Abstract: This invention provides a silicon wafer polishing composition used in the presence of an abrasive. The composition comprises a silicon wafer polishing accelerator, an amide group-containing polymer, and water. The amide group-containing polymer has a building unit A in its main chain. The building unit A comprises a main chain carbon atom constituting the main chain of the amide group-containing polymer and a secondary amide group or a tertiary amide group. The carbonyl carbon atom constituting the secondary amide group or tertiary amide group is directly coupled to the main chain carbon atom.Type: GrantFiled: May 23, 2017Date of Patent: August 18, 2020Assignees: FUJIMI INCORPORATED, TOAGOSEI CO., LTD.Inventors: Kohsuke Tsuchiya, Hisanori Tansho, Taiki Ichitsubo, Yoshio Mori
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Patent number: 10748778Abstract: There is provided a polishing method capable of more reducing defects on a silicon wafer surface. A polishing method of a silicon wafer, which includes a polishing step and a surface treatment step conducted after the polishing step and in which the number of abrasives in a surface treatment composition used in the surface treatment step is 1.0×1010 particles/mL or more and 1.0×1013 particles/mL or less by calculating from (1 [mL]×specific gravity of the composition [g/mL]×concentration of the abrasives [wt %])/((4/3)?×(average secondary particle diameter×10?7 [cm]/2)3 [/particle]×specific gravity of the abrasives [g/cm3]), using concentration of the abrasives in the surface treatment composition and an average secondary particle diameter measured by dynamic light scattering method, provided that all of the abrasives in the surface treatment composition used in the surface treatment step are assumed to have the average secondary particle diameter.Type: GrantFiled: February 26, 2019Date of Patent: August 18, 2020Assignee: FUJIMI INCORPORATEDInventor: Kohsuke Tsuchiya
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Patent number: 10717899Abstract: Provided are polishing compositions comprising a water-soluble polymer and water. The water-soluble polymer of an embodiment has a repeat unit that does not have any hydroxyl groups, and the water-soluble polymer has a hydroxyl group content in a range of 4 mmol/g or higher and 21 mmol/g or lower. The water-soluble polymer of another embodiment has a repeat unit A that has a hydroxyl group and a repeat unit B, and the number of moles of the repeat unit B in the total number of moles of all the repeat units of the water-soluble polymer is 5% or greater.Type: GrantFiled: November 9, 2018Date of Patent: July 21, 2020Assignee: FUJIMI INCORPORATEDInventors: Kohsuke Tsuchiya, Hisanori Tansho, Taiki Ichitsubo
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Publication number: 20200010727Abstract: Provided is a polishing composition which is used in a step upstream of a final polishing step of a silicon substrate and can effectively realize a high-quality surface after the final polishing step. According to the present invention, there is provided an intermediate polishing composition to be used in the intermediate polishing step in a silicon substrate polishing process including both of the intermediate polishing step and the final polishing step. The intermediate polishing composition includes an abrasive A1, a basic compound B1, and a surface protective agent S1. The surface protective agent S1 includes a water-soluble polymer P1 having a weight average molecular weight of higher than 30×104 and a dispersant D1, and has a dispersibility parameter ?1 of less than 80%.Type: ApplicationFiled: February 6, 2018Publication date: January 9, 2020Applicant: FUJIMI INCORPORATEDInventors: Kohsuke TSUCHIYA, Maki ASADA, Satoshi MOMOTA
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Publication number: 20190359856Abstract: Provided is a polishing composition that includes a cellulose derivative and is effective for reducing surface defects after polishing. According to the present application, a polishing composition comprising an abrasive, a basic compound and a surface protective agent is provided. The surface protective agent contains a cellulose derivative and a vinyl alcohol-based dispersant. The surface protective agent has a dispersibility parameter ? of less than 100.Type: ApplicationFiled: November 15, 2017Publication date: November 28, 2019Applicant: FUJIMI INCORPORATEDInventors: Kohsuke TSUCHIYA, Maki ASADA
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Patent number: 10351732Abstract: Provided are a polishing composition comprising a water-soluble polymer that has a molecular structure comprising a plurality of repeat unit species having different SP values and a polishing composition exhibiting an etching rate and an abrasive adsorption in prescribed ranges when determined by prescribed methods. Also provided is a method for producing a polishing composition, using an abrasive, a basic compound, a water-soluble polymer having an alkaline-hydrolytic functional group, and water. The method comprises a step of obtaining an agent A comprising at least the basic compound and a step of obtaining an agent B comprising at least the water-soluble polymer H.Type: GrantFiled: March 14, 2014Date of Patent: July 16, 2019Assignee: FUJIMI INCORPORATEDInventors: Kohsuke Tsuchiya, Hisanori Tansho, Taiki Ichitsubo
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Patent number: 10344185Abstract: Provided is a composition for polishing silicon wafers, having an excellent effect of reducing haze and having low agglomerating property. A composition for polishing silicon wafers provided here includes: an amido group-containing polymer A; and an organic compound B not containing an amido group. The amido group-containing polymer A has, on a main chain, a building block S derived from a monomer represented by General Formula (1). Molecular weight MA of the amido group-containing polymer A and molecular weight MB of the organic compound B have a relation satisfying 200?MB<MA.Type: GrantFiled: June 17, 2015Date of Patent: July 9, 2019Assignee: Fujimi IncorporatedInventors: Kohsuke Tsuchiya, Hisanori Tansho, Yusuke Suga