Patents by Inventor Kohtaro Hosoya

Kohtaro Hosoya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for adjusting charged particle beam device and adjusting beam aperture based on a selected emission condition and charged particle beam device for same
    Patent number: 10176968
    Abstract: The present invention relates to enabling a versatile charged particle beam device, which is used for a wide range of kinds of samples to be observed and has parameters of emission conditions of a primary charged particle beam that is difficult to be registered in advance, to be operated easily and accurately even by a less-experienced operator and to obtain high-resolution images.
    Type: Grant
    Filed: April 4, 2014
    Date of Patent: January 8, 2019
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Kunji Shigeto, Mitsugu Sato, Tsutomu Saito, Kohtaro Hosoya, Yoshihiro Takahoko, Tohru Ando
  • Charged particle beam apparatus and sample observation method
    Patent number: 9362083
    Abstract: There is provided a charged particle beam apparatus having the function of permitting observation of a sample in a gas atmosphere or in a liquid state, the apparatus being intended to let a dry sample be observed as it is getting saturated with an introduced liquid and to prevent a charged particle beam from getting scattered by an unwanted liquid introduced between a diaphragm and the sample. This invention provides a structure including an inlet-outlet part (300) that brings in and out a desired liquid or gas in the direction of the underside or the side of the sample (6), the structure being arranged so that the sample (6) is irradiated with a primary charged particle beam while the sample (6) and the diaphragm (10) are kept out of contact with each other.
    Type: Grant
    Filed: July 8, 2013
    Date of Patent: June 7, 2016
    Assignee: Hitachi High-Technologies Corporation
    Inventors: Yusuke Ominami, Shinsuke Kawanishi, Hiroyuki Suzuki, Kohtaro Hosoya, Masanari Furiki
  • Charged Particle Beam Device and Method for Adjusting Charged Particle Beam Device
    Publication number: 20160118218
    Abstract: The present invention relates to enabling a versatile charged particle beam device, which is used for a wide range of kinds of samples to be observed and has parameters of emission conditions of a primary charged particle beam that is difficult to be registered in advance, to be operated easily and accurately even by a less-experienced operator and to obtain high-resolution images.
    Type: Application
    Filed: April 4, 2014
    Publication date: April 28, 2016
    Inventors: Kunji SHIGETO, Mitsugu SATO, Tsutomu SAITO, Kohtaro HOSOYA, Yoshihiro TAKAHOKO, Tohru ANDO
  • Charged Particle Beam Apparatus and Sample Observation Method
    Publication number: 20150221470
    Abstract: There is provided a charged particle beam apparatus having the function of permitting observation of a sample in a gas atmosphere or in a liquid state, the apparatus being intended to let a dry sample be observed as it is getting saturated with an introduced liquid and to prevent a charged particle beam from getting scattered by an unwanted liquid introduced between a diaphragm and the sample. This invention provides a structure including an inlet-outlet part (300) that brings in and out a desired liquid or gas in the direction of the underside or the side of the sample (6), the structure being arranged so that the sample (6) is irradiated with a primary charged particle beam while the sample (6) and the diaphragm (10) are kept out of contact with each other.
    Type: Application
    Filed: July 8, 2013
    Publication date: August 6, 2015
    Inventors: Yusuke Ominami, Shinsuke Kawanishi, Hiroyuki Suzuki, Kohtaro Hosoya, Masanari Furiki