Abstract: To provide an optical nanofiber resonator having an optical waveguide whose diameter is equal to or smaller than the wavelength of a propagation light, a light emitter disposed at a predetermined position of the optical waveguide, and a first reflector and a second reflector formed in the optical waveguide with the light emitter interposed therebetween, wherein at least one of the first reflector and the second reflector transmits a part of the propagation light. With such a configuration, the channeling efficiency of the light emitted from the light emitter and the propagation mode of the optical waveguide is dramatically improved.

Abstract: To provide an optical nanofiber resonator having an optical waveguide whose diameter is equal to or smaller than the wavelength of a propagation light, a light emitter disposed at a predetermined position of the optical waveguide, and a first reflector and a second reflector formed in the optical waveguide with the light emitter interposed therebetween, wherein at least one of the first reflector and the second reflector transmits a part of the propagation light. With such a configuration, the channeling efficiency of the light emitted from the light emitter and the propagation mode of the optical waveguide is dramatically improved.

Abstract: The concentration of molecular fluorine in a mixed gas such as an excimer laser gas can be determined easily, quickly and accurately by passing the mixed gas through a column packed with an alkali metal or alkaline earth metal compound which has no halogen atom and reacts with fluorine to form a solid fluoride together with molecular oxygen and/or carbon dioxide and measuring the concentration of oxygen or carbon dioxide in the fluorine-free gas flowed out of the packed column. If the mixed gas initially contains molecular oxygen or carbon dioxide, its concentration is measured separately after fixing fluorine in another column packed with an element which forms a fluoride. This analyzing method can be used in a feedback control system for controlling the concentration of fluorine in an excimer laser gas during operation of the laser to thereby stabilize the laser output power.

Abstract: The concentration of molecular fluorine in a mixed gas such as an excimer laser gas can be determined easily, quickly and accurately by passing the mixed gas through a column packed with an alakli metal or alkaline earth metal compound which has no halogen atom and reacts with fluorine to form a solid fluoride together with molecular oxygen and/or carbon dioxide and measuring the concentration of oxygen or carbon dioxide in the fluorine-free gas flowed out of the packed column. If the mixed gas initially contains molecular oxygen or carbon dioxide, its concentration is measured separately after fixing fluorine in another column packed with an element which forms a fluoride. This analyzing method can be used in a feedback control system for controlling the concentration of fluorine in an excimer laser gas during operation of the laser to thereby stabilize the laser output power.

Abstract: A laser gas used in a rare gas halide excimer laser is efficiently refined with little loss of the essential rare gas such as Kr, Ar or Xe by contact of the laser gas with a solid alkaline compound, e.g. Ca(OH).sub.2, for conversion of acidic impurities and also the halogen source gas such as F.sub.2 or HCl into solid metal halides and contact of the remaining gas with zeolite which is adsorbent of the remaining impurities. When the halogen source gas comprises a highly oxidizing fluorine matter the laser gas is first brought into contact with a reactive metal, e.g. Si or Fe, to convert the oxidizing fluorine matter into metal fluorides to thereby prevent formation of O.sub.2, which is obstructive to the laser operation, by reaction of the oxidizing matter with the alkaline compound.