Abstract: A sprayer capable of avoiding clogging caused in the nozzle includes liquid supplies for supplying a liquid, and a nozzle connected to the liquid supply. The nozzle includes a first internal tube and a second internal tube through which a first liquid and a second liquid supplied from the liquid supply pass, respectively, and an external tube into which respective internal tubes are inserted, and which allows a gas to pass through the gap between it and each internal tube, for ejecting the first liquid and the second liquid with the gas. At least a part of the longitudinal direction of each internal tube is formed of a coil including a helically wound wire rod, so that the gas can flow into the inside of the coil from between the adjacent portions of the wire rod of the coil.

Abstract: A pattern inspection apparatus has a setting unit of a plurality of cell areas A and B of different cell comparison pitches and inspects the plurality of cell areas of the different cell comparison pitches in accordance with settings of the setting unit. As information to read out image data for an inspection image and a reference image from an image memory, in addition to position information of a defective image, identification information showing either a cell comparison or a die comparison and relative position information of the reference image can be set. The apparatus also has a unit for setting a plurality of inspection threshold values every inspection area and inspects a plurality of inspection areas by the plurality of inspection threshold values.

Abstract: A semiconductor laser device includes an n-type clad layer, an active layer, and a p-type clad layer having a ridge and wing regions. The wing regions are provided with a first trench present on one side of the ridge and a second trench provided on the other side thereof being interposed therebetween. A reflectivity Rf at a front end face of a resonator, a reflectivity Rr at a rear end face of the resonator, a minimum value W1 of a width of the first trench in a region adjacent to the front end face, a minimum value W2 of a width of the second trench in the region adjacent to the front end face, a width W3 of the first trench at the rear end face, and a width W4 of the second trench at the rear end face satisfy Rf<Rr, W1<W3, and W2<W4. A width Wf of the ridge at the front end face, and a width Wr of the ridge at the rear end face satisfy Wf>Wr. The ridge includes a region where a width decreases with distance from the front end side toward the rear end side.

Abstract: Inspection apparatus and method adapted to inspect a sample by irradiating it with an electron beam and detecting defects on the sample from an image formed based on a secondary signal generated from the sample. The inspection apparatus includes: a scanning deflector for scanning the sample with a beam having an irradiation energy for imaging irradiation regions of the sample, a blanking deflector for blanking the beam to prevent it from irradiating the sample during scanning, a moving stage for continuously moving the sample during scanning such that the beam is deflected and scanned continuously from one side of the sample to the other, and a controller for sending a deflection command to the blanking deflector to blank the beam over nonirradiation regions of the scanning regions of the sample according to selection of irradiation regions of the sample.

Abstract: A sprayer is capable of inhibiting or preventing clogging occurring in a nozzle upon ejection of a liquid through the nozzle. A sprayer includes liquid supply for separately supplying a first liquid and a second liquid different in liquid composition, and a nozzle. The nozzle includes a first flow path and a second flow path along which passes the first liquid and the second liquid supplied from the liquid supply. In addition, the nozzle includes a third flow path along which passes a gas. A merge part is provided at which the first flow path and the second flow path merge at their respective halfway parts. A vent is provided at the merge part for allowing the gas which has passed through the third flow path to flow into the merge part.

Abstract: A semiconductor laser device has a first light emitting portion and a second light emitting portion having a longer emission wavelength than that of the first light emitting portion. Each of the first light emitting portion and the second light emitting portion has a stripe-shaped ridge structure used for carrier injection. The ridge structure in the first light emitting portion includes a first front end region having a width Wf1 and having a length L3 from a front facet, a first rear end region having a width Wr1 and having a length L1 from a rear facet, and a first tapered region located between the first front end region and the first rear end region and having a length L2, and the relation of Wf1>Wr1 is satisfied.

Abstract: A degradation in throughput is prevented even in cases where it is necessary to reduce a pixel size during inspection according to a finer circuit pattern. In an inspection method and an inspection apparatus in which an inspected sample having a circuit pattern is irradiated with a charged particle beam to generate a signal, an image is obtained from the signal, and in which a defect of the circuit pattern is detected from the image, the inspection is performed while an inspected pixel size in a direction in which the charged particle beam is scanned relative to the inspected sample and an inspected pixel size in a stage moving direction are separately set. The stage is moved while the inspected sample is placed thereon.

Abstract: A semiconductor laser device 100 having a ridge stripe structure comprises: an n-type clad layer 105 having a protrusion; and an n-type current block layer 107 covering the clad layer, except the upper surface of the protrusion. When the width of the upper surface is W, the distance between front and rear cleavage planes is L, the width of the upper surface at the front cleavage plane is Wf, and the width of the upper surface at the rear cleavage is Wr. In a range where a distance from the front cleavage plane is shorter than or equal to L/2, an area Sc of the upper surface is in a range of L/8×(3Wf+Wr)<Sc?L/2×Wf, and W in an arbitrary position in the range is in a range of ½(Wf+Wr)<W?Wf.

Abstract: The semiconductor laser device includes first and second light emitting portions each including a first cladding layer, an active layer and a second cladding layer, and each having a stripe structure. The stripe structure of the first light emitting portion has a section having a width changing along a resonator direction and includes a first front end face, and relationships of Wf1?W1; W1>W2; and (Wf1?W1)/2L1<(W1?W2)/2L2 hold wherein Wf1 is a width on the first front end face; W1 is a width in a position away from the first front end face by a distance L1; and W2 is a width in a position away from said the front end face by a distance L1+L2 (whereas L1+L2?L).

Abstract: A semiconductor laser device includes a red-light-emission portion and an infrared-light-emission portion on a single substrate. The red-light-emission portion has a structure in which an AlGaInP-based active layer is sandwiched by a first cladding layer of a first conductivity type having a striped portion and a second cladding layer of a second conductivity type. The infrared-light-emission portion has a structure in which an AlGaAs-based active layer is sandwiched by a third cladding layer of the first conductivity type having a striped portion and a fourth cladding layer of the second conductivity type. The first, second, third, and fourth cladding layers are all made of an AlGaInP-based material. When in these layers, the Al:Ga contents are represented by X1:1-X1, X2:1-X2, X3:1-X3, and X4:1-X4, respectively, X1?X2 and X3?X4 are satisfied.

Abstract: A sprayer which inhibits or prevents clogging from occurring in a nozzle when a liquid is ejected from the nozzle includes a nozzle having a first internal tube through which a first liquid passes, and a second internal tube through which a second liquid passes. An external tube is provided in which the first internal tube and the second internal tube are positioned so that the gas passes therebetween. In the sprayer, each distal end part of the first internal tube and the second internal tube includes a gas permeable film impermeable to each liquid, and permeable to the gas.

Abstract: A sprayer includes a nozzle through which gas is to be ejected with positiveness and uniformity. The sprayer is provided with a nozzle having inner tubes through the interior of which liquid is to pass and an outer tube receiving the inner tubes therein and allowing gas to pass through a space defined with the inserted inner tubes. The inner tubes have respective liquid orifices through which liquids are to be ejected. The outer tube is arranged therein with the liquid orifices and a gas orifice for ejecting gas. When the nozzle is viewed from front, the outer peripheries of the liquid orifices each assume a circular form while the inner peripheries of the gas orifices are differently shaped to provide plural point contact between the outer periphery of the liquid orifice and the inner periphery of the gas orifice.

Abstract: A sprayer includes first and second syringes that respectively supply first and second liquids, at least one orifice at which the first and second liquids, or a mixture of such liquids, are ejected, and first and second passages through which the first and second liquids are respectively fed toward the nozzle. At least one of the passages is provided with a deformable volume changer adapted to deform to change the internal capacity or volume. A deformer operates to deform the volume changer, and the volume of the volume changer is ultimately allowed to expand so as to have a larger volume in a state in which liquid ejection ceases as compared to during ejection.

Abstract: The semiconductor laser device includes first and second light emitting portions each including a first cladding layer, an active layer and a second cladding layer, and each having a stripe structure. The stripe structure of the first light emitting portion has a section having a width changing along a resonator direction and includes a first front end face, and relationships of Wf1?W1; W1>W2; and (Wf1?W1)/2L1<(W1?W2)/2L2 hold wherein Wf1 is a width on the first front end face; W1 is a width in a position away from the first front end face by a distance L1; and W2 is a width in a position away from said the front end face by a distance L1+L2 (whereas L1+L2?L).

Abstract: A semiconductor laser device includes a red-light-emission portion and an infrared-light-emission portion on a single substrate. The red-light-emission portion has a structure in which an AlGaInP-based active layer is sandwiched by a first cladding layer of a first conductivity type having a striped portion and a second cladding layer of a second conductivity type. The infrared-light-emission portion has a structure in which an AlGaAs-based active layer is sandwiched by a third cladding layer of the first conductivity type having a striped portion and a fourth cladding layer of the second conductivity type. The first, second, third, and fourth cladding layers are all made of an AlGaInP-based material. When in these layers, the Al:Ga contents are represented by X1:1-X1, X2:1-X2, X3:1-X3, and X4:1-X4, respectively, X1?X2 and X3?X4 are satisfied.

Abstract: By installing a device control module (DCM), a functional component module (FCM), and a guarantee card FCM of a digital video cassette recorder (DVCR) into an integrated receiver decoder (IRD), the IRD is able to control the DVCR. The guarantee card FCM is used for accessing an electronic guarantee card stored in a non-volatile memory of the DVCR. The IRD stores purchase information or repair information of the DVCR into the non-volatile memory of the DVCR via an IEEE-1394 serial bus in response to an instruction from a requester. The IRD also reads the purchase information or the repair information from the non-volatile memory of the DVCR via the IEEE-1394 serial bus.

Abstract: The via chain conduction failure due to non-conduction caused by insufficient etching in a contact plug/via plug forming process can be detected precisely in a short time. For its achievement, a defect is detected at high speed by taxing advantage of characteristics of a potential contrast method using a via chain defect inspection structure and an electron beam defect detection apparatus which can perform continuous inspection while changing an inspection direction without rotating a wafer. Accordingly, the capturing efficiency of a critical electric defect and search efficiency of a defect point can be improved.

Abstract: The present invention relates to a defect inspection apparatus for inspecting defects in patterns formed on a semiconductor device, on the GUI of which for the confirmation of the inspection results an area is provided for displaying any one of or facing each other the features amount of defects, and the image during inspection or the reacquired image, and on the GUI of which a means is provided for setting the classification class and importance of the defects, and based on the classification class and the importance of the defects information set by this setting means, the classification conditions or the defect judging conditions are automatically or manually set so that the inspection conditions may be set easily.

Abstract: A laser induced liquid jet generating device comprising: a main body 6 adapted to be filled with a specified laser beam absorbing liquid and configured such that it can contain a laser irradiating part 4 of an optical fiber from which laser beams are emitted to generate jet streams J of said liquid W by irradiating said liquid W with laser beams, with said jet streams J ejected from said main body 6 to the outside; said main body 6 comprising: a catheter mounting unit mounted integrally or in a removable manner on a catheter member 13 into which said jet stream J is introduced; a jet generating tube unit 10 in which said laser irradiation part 4 is adapted to be positioned; and a heat transfer inhibition means 11 for inhibiting thermal effect due to laser beams irradiated by said laser irradiating part 4 from being transferred outside through said jet generating tube unit 10.

Abstract: A pattern inspection apparatus has a setting unit of a plurality of cell areas A and B of different cell comparison pitches and inspects the plurality of cell areas of the different cell comparison pitches in accordance with settings of the setting unit. As information to read out image data for an inspection image and a reference image from an image memory, in addition to position information of a defective image, identification information showing either a cell comparison or a die comparison and relative position information of the reference image can be set. The apparatus also has a unit for setting a plurality of inspection threshold values every inspection area and inspects a plurality of inspection areas by the plurality of inspection threshold values.