Abstract: An oscillation gyro (1) including a stainless steel base member (4) which is a quadratic prism, wherein the base member (4) has through holes (10, 7) extending in the directions crossing at right angles at the upper and lower portions thereof respectively, and further includes slide plates (8, 9) constituting a parallel plate portion (2) and slide plates (10, 11) constituting a parallel plate portion (3). Preferably, a titanium film (13) is formed by sputtering on each of the outer side surfaces of the parallel plate portions (2, 3), and a thin PZT film (14) is formed on the entire outer surface of the titanium film (13). Pairs of electrode films (15, 16) of aluminum are formed on the respective thin PZT films (14) up and down. The respective electrode films (15, 16) have a thickness of several um and the same area. Pads (15b, 16b) are formed at the lower ends of the base member (4) serving as fixed ends, and are connected to extension portions (15a, 16a) extending from the electrode film (15).

Abstract: A small acceleration switch adapted to switch between ON and OFF states depending upon the magnitude of acceleration applied to the switch. The acceleration switch includes a first contact formed on a substrate and a movable part formed on a semiconductor chip by surface micromachining. The movable part includes a second contact. When the acceleration is equal to or greater than a predetermined value, the movable part moves and the second contact comes into contact with the first contact.

Abstract: A parallel plate structure (1) is provided with a pair of bimorph piezoelectric elements (2) and prismatic insulation spacers (3) inserted between the piezoelectric elements (2) at the upper and lower ends thereof for cementing the piezoelectric elements (2) together via the spacers (3). Each piezoelectric element (2) comprises a planar base material (4) of titanium, PZT thin films (5) formed on both sides of the base material (4) by the hydrothermal method, and electrode films (6) formed on the PZT thin films (5). The base material (4) is 20 &mgr;m thick and the PZT thin films (5) are several pm thick, while the aluminum electrode films (6) are several um thick.

Abstract: An oscillatory gyroscope having an improved detecting sensitivity. The oscillatory gyroscope includes an elastic metal body in the form of a rectangular column having first to fourth surfaces. The elastic metal body includes a distal portion having a distal through hole extending from the second surface to the fourth surface and a proximal portion having a second through hole extending from the first surface to the third surface. Two first ferroelectric substance films are provided on the first and third surfaces in the distal portion. Two second ferroelectric substance films are provided over the second and fourth surfaces in the proximal portion. First and second electrodes are provided on each of the first ferroelectric substance films, and third and fourth electrodes are provided on the respective second ferroelectric substance films. Voltages of reverse polarities are applied to the first and second electrodes.

Abstract: A highly sensitive oscillatory gyroscope that includes an elastic metal body in the form of a rectangular column having first to fourth sides. The elastic metal body includes a pair of end segments located at its ends and a pair of middle segments located at an upper middle portion and a lower middle portion of the elastic metal body. Each end segment has an opening extending from the second side to the fourth side, and each middle segment has an opening extending from the first side to the third side. A first ferroelectric substance film is provided on each of the first and third sides at the end segments. A second ferroelectric substance film is provided on each of the second and fourth sides at the middle segments. First and second electrodes are provided on each first ferroelectric substance film at each end segment. Third and fourth electrodes are provided on each second ferroelectric substance film at each middle segment.

Abstract: A acceleration actuated microswitch that accurately detects accelerations in various directions is provided. A mass is supported by first beams in a space defined in a silicon substrate. The mass can be reciprocated in a direction perpendicular to the silicon substrate. A pair of second beams extend from the mass. Each second beam includes an electrode layer. A cover is secured to the silicon substrate. A pair of steps are formed in the inner surface of the cover. A pair of fixed contacts is located on each step. Each pair of contacts faces a corresponding electrode layer. When an acceleration having a certain magnitude is applied to the switch, the first beams are vibrated and the electrode layers contact the steps, which closes the switch.

Abstract: A catheter includes a longitudinally extending catheter tube to be inserted into a body. A plurality of sensing portions are arranged in the catheter tube for detecting at least two types of pressures acting on the catheter when inserted into the body. Each sensing portion is arranged along the longitudinal direction of the catheter tube. A silicone gel transmits the two types of pressures acting in the body to each sensing portion. The two types of pressures act on each sensing portion in a radial direction of the catheter tube by way of the silicone gel.

Abstract: A method for manufacturing sensors using semiconductors that is optimal for obtaining compact sensors is described. The method includes the steps of (a) applying an n-type silicon layer to the upper surface of a silicon substrate, (b) applying a p-type silicon layer on either the upper surface of the n-type silicon layer or the upper surface of a base, (c) removing part of the p-type silicon layer by electrochemical etching, (d) joining the base with the p-type silicon layer applied to the n-type silicon layer or joining the n-type silicon layer with the p-type silicon layer applied to the base, (e) removing the silicon substrate and exposing the upper surface of the n-type silicon layer, and (f) forming a strain gage in a section of the upper surface of the silicon substrate so that a portion of the n-type silicon layer facing the upper surface of the base functions as a diaphragm.

Abstract: A catheter that is guided into an intra-corporeal passageway is set forth. A catheter tube accommodates an element having a piston for detecting a pressure in the intra-corporeal passageway. Silicone gel is accommodated in the catheter tube to transmit the detected pressure in the catheter tube. A strain gage is disposed on a semiconductor chip to output an electric signal based on an amount of a deformation thereof indicative of the pressure in the catheter tube.

Abstract: A catheter having a sensor for detecting forces acting on its distal end includes a catheter tube, a chamber defined in the catheter tube. The chamber is filled with silicon gel. The catheter also has a sensor chip and a cap. The sensor has a pressure sensing surface and a backside. The cap transmits the forces acting on the distal end of the catheter tube to the pressure sensing surface of the sensor chip. Further, the catheter has a pressure introducing hole. The pressure introducing hole transmits the forces acting on the periphery of the catheter tube to the backside of the sensor chip. The sensor chip issues signals externally in accordance with the pressures transmitted to its pressure sensing surface and its backside.

Abstract: A catheter provided with a catheter tube that is inserted into a human body. A sensor detects pressure acting on a distal end of the catheter tube when inserted into the human body and outputs an output signal indicating fluctuations of the pressure. A CPU judges whether the waveform of the output signal contains a regular component and an irregular component and separates the output signal into a regular component and an irregular component based on the judgment. Based on the separated irregular component, a judgment is made as to whether an obstruction is present within an insertion path of the catheter.