Abstract: There are provided a vacuum pump self-diagnosis method, a vacuum pump self-diagnosis system, a vacuum pump central monitoring system capable of making self-diagnosis of a dry vacuum pump. A vacuum pump self-diagnosis method decides the occurrence of failure and generates an alarm when a predetermined alarm set value is exceeded by an integrated value or an average value of a current of a motor for rotating a rotor of said vacuum pump. In a vacuum pump self-diagnosis system for making self-diagnosis of a vacuum pump which comprises a casing and a rotor rotatably arranged in the casing for sucking and discharging a gas through rotations of the rotor, the rotor comprises a plurality of stages and a pressure sensor is provided between the rotor stages.

Abstract: To provide an operation control device for a vacuum pump and a method for stopping the operation of the vacuum pump that make it possible to effectively remove products, resulting from solidification and liquefaction of gas in a casing and possibly hindering the rotation of a pump rotor, so that the vacuum pump may be started normally. An operation control device 10 for a vacuum pump having a pump rotor 1 disposed in a casing 2 for free rotation includes a pump rotor control section 15 for controlling the rotation of the pump rotor 1. The pump rotor control section 15 has a function to, after a pump stop action has been taken, rotate the pump rotor 1 in forward and/or reverse directions according to a predetermined timing pattern and then stop the pump rotor 1.

Abstract: To provide an operation control device for a vacuum pump and a method for stopping the operation of the vacuum pump that make it possible to effectively remove products, resulting from solidification and liquefaction of gas in a casing and possibly hindering the rotation of a pump rotor, so that the vacuum pump may be started normally. An operation control device 10 for a vacuum pump having a pump rotor 1 disposed in a casing 2 for free rotation includes a pump rotor control section 15 for controlling the rotation of the pump rotor 1. The pump rotor control section 15 has a function to, after a pump stop action has been taken, rotate the pump rotor 1 in forward and/or reverse directions according to a predetermined timing pattern and then stop the pump rotor 1.

Abstract: There are provided a vacuum pump self-diagnosis method, a vacuum pump self-diagnosis system, a vacuum pump central monitoring system capable of making self-diagnosis of a dry vacuum pump. A vacuum pump self-diagnosis method decides the occurrence of failure and generates an alarm when a predetermined alarm set value is exceeded by an integrated value or an average value of a current of a motor for rotating a rotor of said vacuum pump. In a vacuum pump self-diagnosis system for making self-diagnosis of a vacuum pump which comprises a casing and a rotor rotatably arranged in the casing for sucking and discharging a gas through rotations of the rotor, the rotor comprises a plurality of stages and a pressure sensor is provided between the rotor stages.

Abstract: A photomask provided with a light-shielding coating on a surface of a glass substrate is cleaned with O3 gas solved water to eliminate organic substances adhered on a surface of the photomask (S120). Using an alkaline chemical such as alkaline ionized water or hydrogenated water, the photomask is then cleaned to eliminate contamination (S122). After completion of these cleaning steps, the photomask is dried (S124).

Abstract: A photomask provided with a light-shielding coating on a surface of a glass substrate is cleaned with O3 gas solved water to eliminate organic substances adhered on a surface of the photomask (S120). Using an alkaline chemical such as alkaline ionized water or hydrogenated water, the photomask is then cleaned to eliminate contamination (S122). After completion of these cleaning steps, the photomask is dried (S124).

Abstract: A photomask provided with a light-shielding coating on a surface of a glass substrate is cleaned with O3 gas solved water to eliminate organic substances adhered on a surface of the photomask (S120). Using an alkaline chemical such as alkaline ionized water or hydrogenated water, the photomask is then cleaned to eliminate contamination (S122). After completion of these cleaning steps, the photomask is dried (S124).

Abstract: A vacuum pump control system is used for controlling a plurality of vacuum pumps comprising at least one type of cryopump, turbomolecular pump, cryoturbo pump, and dry pump such as a Roots type vacuum pump. The vacuum pump control system for controlling a plurality of vacuum pumps, comprises a host computer; a plurality of vacuum pump controllers connected respectively to said vacuum pumps; and a network control unit for transmitting information between the host computer and the vacuum pump controllers. The vacuum pump controllers are connected in parallel to the network control unit by respective communication lines.

Abstract: An afterimage elimination circuit for a liquid crystal display apparatus provides a substantial improvement of the transient response characteristics of the liquid crystal display elements, by adding to an input video signal of the display apparatus a compensation signal, derived from that video signal, having a transient response that is determined in accordance with whether a change in the input video signal level will result in an increase or decrease of electric field strength applied to the display elements, to thereby achieve optimum compensation for both rise time and fall time response of the display elements.

Abstract: A control pulse recording circuit for a magnetic recording and reproducing apparatus comprises a control head, a circuit for detecting leading edges of control pulses reproduced by the control head, a circuit for generating a recording voltage having a polarity which changes at a time in accordance with recording data to be recorded in a re-write operation, and a switching circuit for blocking supply of the recording voltage to the control head at a time which is after a predetermined time from a time when the re-writing operation is ended and is immediately before a next leading edge of the control pulses.

Abstract: A magnetic recording and/or reproducing apparatus comprises a cassette discriminating circuit for discriminating whether a loaded tape cassette accommodates a standard tape or a high performance tape in a recording mode, a mode discriminating circuit for discriminating from a signal reproduced from the tape in a reproducing mode a mode with which the tape was recorded at the time of the recording, and a switching circuit for automatically switching the operation mode to a predetermined mode responsive to the discrimination made by the cassette discriminating circuit in the recording mode and responsive to the discrimination made by the mode discriminating circuit in the reproducing mode. The high performance tape is playable either in a standard mode or a high quality mode.

Abstract: A noise reduction system for reducing noise in a video signal comprises a pre-emphasis circuit for subjecting the video signal which is supplied to a transmission system to a pre-emphasis in a vertical direction of a picture and in a direction oblique to the vertical direction, and a de-emphasis circuit for subjecting the pre-emphasized video signal obtained through the transmission system to a de-emphasis complementary to the pre-emphasis.

Abstract: A magnetic recording apparatus for carrying out a recording by selectively using one of two kinds of recording systems comprises first through fourth rotary magnetic heads, a first circuit for producing an FM luminance signal, second and third circuits for producing first and second frequency division multiplexed signals, and a switching circuit. The first and second heads are mounted on a rotary body at mutually opposing positions, and have the same height position. The third and fourth heads are mounted on the rotary body at mutually opposing positions respectively in vicinities of the first and second heads along a rotating direction of the rotary body, and have the same height position.