Patents by Inventor Koichi Nagoya
Koichi Nagoya has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 9964500Abstract: A defect inspection device is provided with an illumination optical system that irradiates light or an electron beam onto a sample, a detector that detects a signal obtained from the sample through the irradiation of the light or electron beam, a defect detection unit that detects a defect candidate on the sample through the comparison of a signal output by the detector and a prescribed threshold, and a display unit that displays a setting screen for setting the threshold. The setting screen is a two-dimensional distribution map that represents the distribution of the defect candidates in a three dimensional feature space having three features as the axes thereof and includes the axes of the three features and the threshold, which is represented in one dimension.Type: GrantFiled: December 8, 2014Date of Patent: May 8, 2018Assignee: Hitachi High-Technologies CorporationInventors: Hisashi Hatano, Koichi Nagoya, Mamoru Kobayashi
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Publication number: 20170328846Abstract: A defect inspection device is provided with an illumination optical system that irradiates light or an electron beam onto a sample, a detector that detects a signal obtained from the sample through the irradiation of the light or electron beam, a defect detection unit that detects a defect candidate on the sample through the comparison of a signal output by the detector and a prescribed threshold, and a display unit that displays a setting screen for setting the threshold. The setting screen is a two-dimensional distribution map that represents the distribution of the defect candidates in a three dimensional feature space having three features as the axes thereof and includes the axes of the three features and the threshold, which is represented in one dimension.Type: ApplicationFiled: December 8, 2014Publication date: November 16, 2017Inventors: Hisashi HATANO, Koichi NAGOYA, Mamoru KOBAYASHI
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Patent number: 8422009Abstract: In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.Type: GrantFiled: July 12, 2011Date of Patent: April 16, 2013Assignee: Hitachi High-Technologies CorporationInventors: Hiroyuki Yamashita, Mamoru Kobayashi, Eiji Imai, Yoshio Morishige, Koichi Nagoya, Hideki Fukushima
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Patent number: 8417769Abstract: Conventionally, in a system where devices for handling multiple media data such as audio and video are present, there is a problem that the number of audio channels that can be processed at the gateway is limited. In light of this problem, this invention offers a gateway having distributed processing function for a telephone or a data processing system featuring the capability to request address conversion to another terminal within the system to replace the address of stream-type packet data such as audio and video meant for itself, and if the aforementioned terminal to which the request was sent responds that it can handle the requested processing, to notify the address of the terminal processing the address conversion to the terminal transmitting the stream-type packet data.Type: GrantFiled: December 18, 2009Date of Patent: April 9, 2013Assignee: Nakayo Telecommunications, Inc.Inventors: Koichi Nagoya, Masaaki Kimura
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Patent number: 8154717Abstract: An optical apparatus for defect inspection having an illuminating optical system for irradiating illumination light beams on the surface of a specimen to form a beam spot and a detection optical system for detecting a reflection light ray originating from the beam spot comprises a storage unit in which the position and size of a standard particle of known size on a specimen for correction are stored in advance, a correction processing section which, when the correction specimen is used as an inspection target, correlates a detected scattering light quantity from the standard particle with the known size of standard particle stored at a corresponding position in the storage unit to prepare a correlation between the scattering light quantity and a true value, and a signal processing section which, when an inspection wafer is used as an inspection target, converts a detected scattering light quantity into a defect dimension.Type: GrantFiled: August 4, 2010Date of Patent: April 10, 2012Assignee: Hitachi High-Technologies CorporationInventors: Seiji Otani, Koichi Nagoya
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Publication number: 20110267605Abstract: In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.Type: ApplicationFiled: July 12, 2011Publication date: November 3, 2011Applicant: Hitachi High-Technologies CorporationInventors: Hiroyuki Yamashita, Mamoru Kobayashi, Eiji Imai, Yoshio Morishige, Koichi Nagoya, Hideki Fukushima
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Patent number: 7986405Abstract: In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.Type: GrantFiled: April 12, 2010Date of Patent: July 26, 2011Assignee: Hitachi High-Technologies CorporationInventors: Hiroyuki Yamashita, Mamoru Kobayashi, Eiji Imai, Yoshio Morishige, Koichi Nagoya, Hideki Fukushima
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Publication number: 20110158227Abstract: Conventionally, in a system where devices for handling multiple media data such as audio and video are present, there is a problem that the number of audio channels that can be processed at the gateway is limited. In light of this problem, this invention offers a gateway having distributed processing function for a telephone or a data processing system featuring the capability to request address conversion to another terminal within the system to replace the address of stream-type packet data such as audio and video meant for itself, and if the aforementioned terminal to which the request was sent responds that it can handle the requested processing, to notify the address of the terminal processing the address conversion to the terminal transmitting the stream-type packet data.Type: ApplicationFiled: December 18, 2009Publication date: June 30, 2011Applicant: NAKAYO TELECOMMUNICATIONS, INC.Inventors: Koichi Nagoya, Masaaki Kimura
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Publication number: 20100315626Abstract: An optical apparatus for defect inspection having an illuminating optical system for irradiating illumination light beams on the surface of a specimen to form a beam spot and a detection optical system for detecting a reflection light ray originating from the beam spot comprises a storage unit in which the position and size of a standard particle of known size on a specimen for correction are stored in advance, a correction processing section which, when the correction specimen is used as an inspection target, correlates a detected scattering light quantity from the standard particle with the known size of standard particle stored at a corresponding position in the storage unit to prepare a correlation between the scattering light quantity and a true value, and a signal processing section which, when an inspection wafer is used as an inspection target, converts a detected scattering light quantity into a defect dimension.Type: ApplicationFiled: August 4, 2010Publication date: December 16, 2010Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Seiji OTANI, Koichi NAGOYA
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Patent number: 7787115Abstract: An optical apparatus for defect inspection having an illuminating optical system for irradiating illumination light beams on the surface of a specimen to form a beam spot and a detection optical system for detecting a reflection light ray originating from the beam spot comprises a storage unit in which the position and size of a standard particle of known size on a specimen for correction are stored in advance, a correction processing section which, when the correction specimen is used as an inspection target, correlates a detected scattering light quantity from the standard particle with the known size of standard particle stored at a corresponding position in the storage unit to prepare a correlation between the scattering light quantity and a true value, and a signal processing section which, when an inspection wafer is used as an inspection target, converts a detected scattering light quantity into a defect dimension.Type: GrantFiled: June 8, 2009Date of Patent: August 31, 2010Assignee: Hitachi High-Technologies CorporationInventors: Seiji Otani, Koichi Nagoya
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Publication number: 20100195095Abstract: In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.Type: ApplicationFiled: April 12, 2010Publication date: August 5, 2010Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATIONInventors: Hiroyuki YAMASHITA, Mamoru Kobayashi, Eiji Imai, Yoshio Morishige, Koichi Nagoya, Hideki Fukushima
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Patent number: 7719671Abstract: In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.Type: GrantFiled: February 23, 2007Date of Patent: May 18, 2010Assignee: Hitachi High-Technologies CorporationInventors: Hiroyuki Yamashita, Mamoru Kobayashi, Eiji Imai, Yoshio Morishige, Koichi Nagoya, Hideki Fukushima
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Publication number: 20090251690Abstract: An optical apparatus for defect inspection having an illuminating optical system for irradiating illumination light beams on the surface of a specimen to form a beam spot and a detection optical system for detecting a reflection light ray originating from the beam spot comprises a storage unit in which the position and size of a standard particle of known size on a specimen for correction are stored in advance, a correction processing section which, when the correction specimen is used as an inspection target, correlates a detected scattering light quantity from the standard particle with the known size of standard particle stored at a corresponding position in the storage unit to prepare a correlation between the scattering light quantity and a true value, and a signal processing section which, when an inspection wafer is used as an inspection target, converts a detected scattering light quantity into a defect dimension.Type: ApplicationFiled: June 8, 2009Publication date: October 8, 2009Applicant: Hitachi High-Technologies CorporationInventors: Seiji Otani, Koichi Nagoya
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Patent number: 7557913Abstract: An optical apparatus for defect inspection having an illuminating optical system for irradiating illumination light beams on the surface of a specimen to form a beam spot and a detection optical system for detecting a reflection light ray originating from the beam spot comprises a storage unit in which the position and size of a standard particle of known size on a specimen for correction are stored in advance, a correction processing section which, when the correction specimen is used as an inspection target, correlates a detected scattering light quantity from the standard particle with the known size of standard particle stored at a corresponding position in the storage unit to prepare a correlation between the scattering light quantity and a true value, and a signal processing section which, when an inspection wafer is used as an inspection target, converts a detected scattering light quantity into a defect dimension.Type: GrantFiled: June 29, 2007Date of Patent: July 7, 2009Assignee: Hitachi High-Technologies CoroprationInventors: Seiji Otani, Koichi Nagoya
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Publication number: 20080002195Abstract: An optical apparatus for defect inspection having an illuminating optical system for irradiating illumination light beams on the surface of a specimen to form a beam spot and a detection optical system for detecting a reflection light ray originating from the beam spot comprises a storage unit in which the position and size of a standard particle of known size on a specimen for correction are stored in advance, a correction processing section which, when the correction specimen is used as an inspection target, correlates a detected scattering light quantity from the standard particle with the known size of standard particle stored at a corresponding position in the storage unit to prepare a correlation between the scattering light quantity and a true value, and a signal processing section which, when an inspection wafer is used as an inspection target, converts a detected scattering light quantity into a defect dimension.Type: ApplicationFiled: June 29, 2007Publication date: January 3, 2008Inventors: Seiji Otani, Koichi Nagoya
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Publication number: 20070201019Abstract: In a foreign matter inspection apparatus comprising: irradiating unit for irradiating inspection light to an inspection area of an article to be inspected; intensity detecting unit for detecting intensity of either reflected light or scattered light, which is generated from the inspection area by irradiating thereto the inspection light; position detecting unit for detecting a position of either the reflected light or the scattered light within the inspection area; and deciding unit for deciding whether or not a foreign matter is present within the inspection area; the foreign matter inspection apparatus is comprised of: display unit capable of displaying thereon both a threshold image in which the threshold value is indicated over an entire area of the inspection area, and a detection sensitivity image indicated by being converted from the threshold image.Type: ApplicationFiled: February 23, 2007Publication date: August 30, 2007Inventors: Hiroyuki Yamashita, Mamoru Kobayashi, Eiji Imai, Yoshio Morishige, Koichi Nagoya, Hideki Fukushima