Patents by Inventor Koichi SUMITANI

Koichi SUMITANI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Vacuum apparatus and method for manufacturing semiconductor device
    Patent number: 10418268
    Abstract: A vacuum tweezer includes: a tweezer body including a suction distal end portion that performs vacuum suction of an object to be suctioned; and a light source causing a beam to be condensed at a position on an extension of the suction distal end portion on which a vacuum suction force acts.
    Type: Grant
    Filed: October 28, 2015
    Date of Patent: September 17, 2019
    Assignee: Mitsubishi Electric Corporation
    Inventor: Koichi Sumitani
  • VACUUM TWEEZER AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
    Publication number: 20160247705
    Abstract: A vacuum tweezer includes: a tweezer body including a suction distal end portion that performs vacuum suction of an object to be suctioned; and a light source causing a beam to be condensed at a position on an extension of the suction distal end portion on which a vacuum suction force acts.
    Type: Application
    Filed: October 28, 2015
    Publication date: August 25, 2016
    Applicant: Mitsubishi Electric Corporation
    Inventor: Koichi SUMITANI