Abstract: A method of treating semiconductor wafers in a sealed container is provided and includes transferring and vertically placing a plurality of wafers in the container and sealing the container. An inert gas is fed into the sealed container and a quantity of warm pure water is fed into the sealed container sufficient to completely submerge the plurality of wafers and establish a level of the warm pure water in the sealed container. A vapor or fog of an organic solvent is fed into at least a space in the sealed container above the level of the warm pure water and is then terminated at a prescribed time. The plurality of wafers is dried by aspirating the warm pure water through an outlet in the bottom of the container wherein the pressure in the container is reduced during the aspiration. The inert gas is fed into the sealed container until at least the termination of the drying of the plurality of wafers.

Abstract: A treatment method of semiconductor wafers and the like, for carrying out step by step in a sealed container, a series of processes comprising chemical process with a cleaning chemical (chemical process) and final water rinsing process by using rinsing pure water (rinse process) and a drying process of removing attached water from the surface of an object through mixing substitution using an organic solvent, and a treatment system for the same, wherein warm pure water is fed into the sealed container after the final water rinsing process of the cleaning process is completed. The vapor or fog of the organic solvent is fed into the space procured on the upper side of the container upward the water surface of pure warm water, where the object as placed vertically in parallel arrangement is immersed and sunk.

Abstract: An outer environment of the vehicle is inputted as an image. Image processing is performed to the input image, and many edge segments are extracted. The edge segments which are colinear are clustered in order to perform a matching operation. Matching is performed in a respective set of plural longer edge segments representing plural clusters in correspondence with a set of plural guide signs as standards of guide of the vehicle mapped on the image input surface, and a set of longer edge segments being most matched each other is extracted. From position and headings of the extracted longer edge segments on the image input surface, the position and heading in the outer environment are calculated. The position and heading of the vehicle are detected from these values. The position and heading of the vehicle obtained in the above-mentioned image processing and the position and heading of the vehicle measured by other techniques and are evaluated synthetically.

Abstract: An automatic guidance system for an unmanned vehicle causes the unmanned vehicle to move to a destination by a combination of traveling along a preset course, and turning and stopping at predetermined positions. A running control unit is provided to determine optimal control values in such a manner that a running state of the unmanned vehicle after a predetermined period of time is predicted by changing control values set in a drive unit in accordance with state values (e.g., position information and heading angle information) representing the current running state, and that the running state after the predetermined period of time matches with the directed operation of the unmanned vehicle, thereby accurately guiding the unmanned vehicle along the preset path.