Abstract: A surface inspection apparatus and a surface inspection method aim to securely deal with finer repetition pitch without shortening the wavelength of illumination light. To this end, the apparatus includes a unit illuminating repetitive pattern(s) formed on the substrate surface to be inspected with linearly polarized light, a unit setting to an oblique angle an angle between the direction of an intersecting line of a vibration plane of the linearly polarized light on the substrate surface and the repetition direction of repetitive pattern(s), a unit extracting a polarized light component perpendicular to the vibration plane of the linearly polarized light, from light having been emitted from the repetitive pattern(s) in a specular direction, and a unit detecting a defect of the repetitive pattern(s) according to the light intensity of the polarized light component.

Abstract: A surface inspection apparatus and a surface inspection method aim to securely deal with finer repetition pitch without shortening the wavelength of illumination light. To this end, the apparatus includes a unit illuminating repetitive pattern(s) formed on the substrate surface to be inspected with linearly polarized light, a unit setting to an oblique angle an angle between the direction of an intersecting line of a vibration plane of the linearly polarized light on the substrate surface and the repetition direction of repetitive pattern(s), a unit extracting a polarized light component perpendicular to the vibration plane of the linearly polarized light, from light having been emitted from the repetitive pattern(s) in a specular direction, and a unit detecting a defect of the repetitive pattern(s) according to the light intensity of the polarized light component.

Abstract: A data storage device is provided. At least a storage section configured to store information therein and a connection terminal configured to transmit information are mounted on a substrate. A casing accommodates the substrate, the casing is formed with an opening to expose a connection portion of the connection terminal to the outside. A shield plate configured to shield the opening of the casing. A shield plate actuation mechanism is configured to detect a connection state between the connection terminal and a receiving terminal to which the connection terminal is connected and actuate the shield plate. The shield plate actuation mechanism actuates the shield plate to shield the opening when the shield plate actuation mechanism detects that the connection terminal is separated from the receiving terminal.

Abstract: A measuring device includes a light-sending part sending light in a first direction which is a depth direction of a hollow shape, a conversion part converting a direction of the light into a circumference direction approximately orthogonal to the first direction, a detection part detecting light reflected inside a measuring object, the direction of which is converted by the conversion part, and a shape measurement part measuring an inside shape of the measuring object by obtaining a shift from a reference position according to a detection result of the detection part. Thereby, it is possible to obtain the hollow shape of an object at one time without a need of rotating the object or a light source, and to carry out a highly accurate measurement using a simple device.

Abstract: A data storage device is provided. At least a storage section configured to store information therein and a connection terminal configured to transmit information are mounted on a substrate. A casing accommodates the substrate, the casing is formed with an opening to expose a connection portion of the connection terminal to the outside. A shield plate configured to shield the opening of the casing. A shield plate actuation mechanism is configured to detect a connection state between the connection terminal and a receiving terminal to which the connection terminal is connected and actuate the shield plate. The shield plate actuation mechanism actuates the shield plate to shield the opening when the shield plate actuation mechanism detects that the connection terminal is separated from the receiving terminal.

Abstract: A surface inspection apparatus and a surface inspection method aim to securely deal with finer repetition pitch without shortening the wavelength of illumination light. To this end, the apparatus includes a unit illuminating repetitive pattern(s) formed on the substrate surface to be inspected with linearly polarized light, a unit setting to an oblique angle an angle between the direction of an intersecting line of a vibration plane of the linearly polarized light on the substrate surface and the repetition direction of repetitive pattern(s), a unit extracting a polarized light component perpendicular to the vibration plane of the linearly polarized light, from light having been emitted from the repetitive pattern(s) in a specular direction, and a unit detecting a defect of the repetitive pattern(s) according to the light intensity of the polarized light component.

Abstract: A surface inspection apparatus and a surface inspection method aim to securely deal with finer repetition pitch without shortening the wavelength of illumination light. To this end, the apparatus includes a unit illuminating repetitive pattern(s) formed on the substrate surface to be inspected with linearly polarized light, a unit setting to an oblique angle an angle between the direction of an intersecting line of a vibration plane of the linearly polarized light on the substrate surface and the repetition direction of repetitive pattern(s), a unit extracting a polarized light component perpendicular to the vibration plane of the linearly polarized light, from light having been emitted from the repetitive pattern(s) in a specular direction, and a unit detecting a defect of the repetitive pattern(s) according to the light intensity of the polarized light component.

Abstract: A measuring device includes a light-sending part sending light in a first direction which is a depth direction of a hollow shape, a conversion part converting a direction of the light into a circumference direction approximately orthogonal to the first direction, a detection part detecting light reflected inside a measuring object, the direction of which is converted by the conversion part, and a shape measurement part measuring an inside shape of the measuring object by obtaining a shift from a reference position according to a detection result of the detection part. Thereby, it is possible to obtain the hollow shape of an object at one time without a need of rotating the object or a light source, and to carry out a highly accurate measurement using a simple device.

Abstract: A surface inspection apparatus and a surface inspection method aim to securely deal with finer repetition pitch without shortening the wavelength of illumination light. To this end, the apparatus includes a unit illuminating repetitive pattern(s) formed on the substrate surface to be inspected with linearly polarized light, a unit setting to an oblique angle an angle between the direction of an intersecting line of a vibration plane of the linearly polarized light on the substrate surface and the repetition direction of repetitive pattern(s), a unit extracting a polarized light component perpendicular to the vibration plane of the linearly polarized light, from light having been emitted from the repetitive pattern(s) in a specular direction, and a unit detecting a defect of the repetitive pattern(s) according to the light intensity of the polarized light component.

Abstract: An oil pan structure includes a tubular level-gauge guide into which an oil level-gauge that measures the amount of oil stored in the oil pan is inserted. The oil pan structure further includes a nozzle guide that guides the end of a nozzle of an oil changer, which is inserted into the level-gauge-guide when the oil in the oil pan is replaced with new oil, to a position near the deepest portion of the reservoir portion.

Abstract: A microscope includes a microscope optical system that forms an enlarged image of an observation position by an immersion objective lens with an immersion liquid is filled between the observation position and the objective lens, a moving mechanism that moves a state that a first observation position among a plurality of observation positions on a substrate is positioned in a field of view of the microscope to another state that a second observation position is positioned in the field of view of the microscope, an immersion supplier that supplies the immersion liquid to fill between the objective lens and the observation position, an immersion remover that removes the immersion liquid filled between the objective lens and the observation position, and an immersion remove controller that makes the immersion remover remove the immersion liquid before operating the moving mechanism.

Abstract: A wiping apparatus has a cover box which covers at least a feeding reel, a take-up reel, a wiping member and a spray head, as well as a sheet-feeding passage for the wiping sheet. The passage extends from the feeding reel to the take-up reel. The cover box has formed therein a member opening through which the wiping member protrudes.

Abstract: A surface inspection apparatus and a surface inspection method aim to securely deal with finer repetition pitch without shortening the wavelength of illumination light. To this end, the apparatus includes a unit illuminating repetitive pattern(s) formed on the substrate surface to be inspected with linearly polarized light, a unit setting to an oblique angle an angle between the direction of an intersecting line of a vibration plane of the linearly polarized light on the substrate surface and the repetition direction of repetitive pattern(s), a unit extracting a polarized light component perpendicular to the vibration plane of the linearly polarized light, from light having been emitted from the repetitive pattern(s) in a specular direction, and a unit detecting a defect of the repetitive pattern(s) according to the light intensity of the polarized light component.

Abstract: A surface inspection apparatus and a surface inspection method aim to securely deal with finer repetition pitch without shortening the wavelength of illumination light. To this end, the apparatus includes a unit illuminating repetitive pattern(s) formed on the substrate surface to be inspected with linearly polarized light, a unit setting to an oblique angle an angle between the direction of an intersecting line of a vibration plane of the linearly polarized light on the substrate surface and the repetition direction of repetitive pattern(s), a unit extracting a polarized light component perpendicular to the vibration plane of the linearly polarized light, from light having been emitted from the repetitive pattern(s) in a specular direction, and a unit detecting a defect of the repetitive pattern(s) according to the light intensity of the polarized light component.

Abstract: An oil pan structure includes a tubular level-gauge guide into which an oil level-gauge that measures the amount of oil stored in the oil pan is inserted. The oil pan structure further includes a nozzle guide that guides the end of a nozzle of an oil changer, which is inserted into the level-gauge-guide when the oil in the oil pan is replaced with new oil, to a position near the deepest portion of the reservoir portion.

Abstract: A microscope includes a microscope optical system that forms an enlarged image of an observation position by an immersion objective lens with an immersion liquid is filled between the observation position and the objective lens, a moving mechanism that moves a state that a first observation position among a plurality of observation positions on a substrate is positioned in a field of view of the microscope to another state that a second observation position is positioned in the field of view of the microscope, an immersion supplier that supplies the immersion liquid to fill between the objective lens and the observation position, an immersion remover that removes the immersion liquid filled between the objective lens and the observation position, and an immersion remove controller that makes the immersion remover remove the immersion liquid before operating the moving mechanism.

Abstract: A wiping apparatus has a cover box which covers at least a feeding reel, a take-up reel, a wiping member and a spray head, as well as a sheet-feeding passage for the wiping sheet. The passage extends from the feeding reel to the take-up reel. The cover box has formed therein a member opening through which the wiping member protrudes.

Abstract: A surface inspection method for inspecting a pattern formed at a surface of a test piece, includes: a first step in which a plurality of inspection conditions that are different from each other are set; a second step in which light from the surface of the test piece is detected by irradiating illumination light onto the surface of the test piece under each of the plurality of inspection conditions; a third step in which a plurality of sets of detection information corresponding to the plurality of inspection conditions are generated based upon the detected light; a fourth step in which a logical OR of the plurality of sets of detection information is obtained; and a fifth step in which a decision is made as to whether or not the pattern at the surface of the test piece is acceptable based upon results of the logical OR.

Abstract: A surface inspection method for inspecting a pattern formed at a surface of a test piece, includes: a first step in which a plurality of inspection conditions that are different from each other are set; a second step in which light from the surface of the test piece is detected by irradiating illumination light onto the surface of the test piece under each of the plurality of inspection conditions; a third step in which a plurality of sets of detection information corresponding to the plurality of inspection conditions are generated based upon the detected light; a fourth step in which a logical OR of the plurality of sets of detection information is obtained; and a fifth step in which a decision is made as to whether or not the pattern at the surface of the test piece is acceptable based upon results of the logical OR.

Abstract: The present invention has one object to provide a method and an apparatus for surface inspection capable of excellently inspecting a substrate on which repeated pattern with finer pitch is formed. In order to carry out above object, the present invention provides a surface inspection apparatus comprising; a light source unit which provides light flux; an illumination optical system which leads the light flux to a test substrate, having either one of a reflection mirror or a positive lens for illumination; a light receiving optical system which receives a diffracted light from the test substrate, having either one of a reflection mirror or a positive lens for light receiving; and a processing unit which detects surface condition of the test substrate based on output from a light receiving unit consisting of the light receiving optical system and an imaging device; wherein the light source unit provides ultraviolet light having a wavelength shorter than 400 nm.