Abstract: A directional coupler includes a main line, a first sub-line, a second sub-line, a first phase shift circuit, a first short-circuit path, and a first short-circuit switch. The first phase shift circuit is connected between the first sub-line and the second sub-line. The first short-circuit path short-circuits both ends of the first phase shift circuit. The first short-circuit switch switches between conduction and non-conduction of the first short-circuit path.

Abstract: A frame member for an electron beam lithography device of the present disclosure includes a frame body comprising sapphire or aluminum oxide-based ceramics having an open porosity of 0.2% or less and a conductive film disposed at least on a main surface of an electron gun side of the frame body.

Abstract: A frame member for an electron beam lithography device of the present disclosure includes a frame body comprising sapphire or aluminum oxide-based ceramics having an open porosity of 0.2% or less and a conductive film disposed at least on a main surface of an electron gun side of the frame body.

Abstract: [Purpose] The present invention relates to an ultrasonic motor having a stator which includes a piezoelectric element for moving a rotor in a prescribed direction by applying a predetermined ultrasonic voltage thereto, and the rotor which is fixed to the stator by a frictional force, and a method for manufacturing an ultrasonic motor, and it has for its purpose to attain decrease of dust appearance by enhancement of a wear resistance, a different hardness, or the like in such a way that a contact part of at least either of a stator and a rotor which constitute the ultrasonic motor is irradiated with ions. [Constitution] An ultrasonic motor characterized in that either or both of contact parts of a stator and a rotor is/are irradiated with ions, thereby to enhance a wear resistance of the contact part or parts.

Abstract: In a heat exchanger according to the present invention, there are provided a filling container having a first containing section containing a hydrogen-absorbing metal material for middle or high temperature, a second containing section containing a hydrogen-absorbing metal material for low temperature which is higher in equilibrium hydrogen pressure at the same temperature than the hydrogen-absorbing metal material for middle or high temperature, and a hydrogen passage for moving hydrogen between the first containing section and the second containing section; a guiding section having a heating section provided with heating means for heating the filling container, a heat radiating section provided with a heat exchanging section for radiating heat generated in the filling container outward, and a heat absorbing section provided with a heat exchanging section for cooling the outside by absorption of heat in the filling container; and moving means for moving the filling container back and forth in the guiding sec

Abstract: An air compressor includes a compressor unit, an intake regulator valve connected to the compressor unit, and intake filter connected to the intake regulator valve, an oil separator connected to the compressor unit, an oil supply line connecting the lower part of the oil separator to various points inside the compressor unit, and an oil return line connecting the oil collector unit to the passage connecting the intake filter and the intake regulator valve. The passage connecting the intake filter to the intake regulator valve has a section of reduced cross-sectional area, including an inner tube having holes to connect to a surrounding hollow region. The oil return line opens into the passage at a point higher than the level of oil in the intake regulator valve.

Abstract: An oil-cooled air compressor in which a control unit effects operation of the compressor unit in the condition that a specified period of time has elapsed since the last time the compressor unit was operated for a specified period of time or more at a temperature greater than a specified temperature, to thereby effect dewatering operation of the separator of the compressor only when necessary, resulting in the reduction of wasteful consumption of energy.

Abstract: This invention provides a package-type oil-cooled air compressor in which the housing is divided into two chambers, in one of which, a first chamber, are located the compressor unit, motor used to drive the compressor unit, air intake filter and intake regulator valve connected to the compressor unit, and in the other of which, a second chamber, are located the oil cooler and sirocco fan. An air duct connects the two chambers. Air outlets are formed in each of the chambers and an air inlet is formed in the second chamber. Air is introduced through the rotation of the sirocco fan into the second chamber via the air inlet. A portion of this air is directed into the first chamber via the air duct where a part is used to supply the compressor unit and the remainder flows over the components located in the first chamber to cool them and leaves via the outlet formed in the first chamber.