Patents by Inventor Koji Hadano

Koji Hadano has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND ION IMPLANTER
    Publication number: 20120329256
    Abstract: According to an embodiment, a method of manufacturing a semiconductor device is provided. This method of manufacturing a semiconductor device sets a first voltage to be applied to an electrode configured to extract an ion beam from an ion source, and a second voltage to be applied to a decelerator through which an ion beam extracted from the ion source is to pass, on the basis of a second impurity profile which is formed in a substrate by neutral particles included in the ion beam.
    Type: Application
    Filed: March 9, 2012
    Publication date: December 27, 2012
    Applicant: Kabushiki Kaisha Toshiba
    Inventors: Takayuki ITO, Koji Hadano, Masayuki Jinguji