Abstract: A method for making a piezoelectric element including a piezoelectric film formed on a substrate by a gas deposition technique includes the steps of ejecting ultra-fine particles of a piezoelectric material having a perovskite structure from an ejecting device toward the substrate, and applying an electric field to the ultra-fine particles traveling to the substrate. The substrate may be composed of a metal or a resin.

Abstract: An ion beam sputtering film deposition apparatus is provided which can form a high-quality thin film that is dense, smooth and faultless. The film deposition apparatus has ion beam irradiating unit, a target 105 containing a film forming substance to be sputtered, and holding unit 112 to hold a substrate 106 on which the sputtered film forming substance is deposited. The ion beam irradiating unit irradiates gas cluster ions to both the target 105 and the substrate 106.

Abstract: A liquid discharge head comprises a substrate, on which are formed energy generating means for generating energy to be used for the discharge of a liquid through a discharge port, and a precious metal protective layer for protecting the energy generating means, an inorganic adhesive layer formed of at least one material selected from titanium, titanium nitride, tantalum nitride and chromium nitride, said inorganic adhesive layer being closely adhered to the precious metal protective layer, an organic adhesive layer made of an organic material, and a flow path formation member, serving as a wall of a flow path communicated with the discharge port. The substrate, the inorganic adhesive layer, the adhesive layer and the flow path formation member are bonded to the substrate in the this order.

Abstract: In order to suppress peeling of a film formed on a base, and improve the durability and reliability of the film, an overhang is provided on a side surface of a sacrifice layer, whereby a film is formed, which has an edge portion having a thickness distribution, in which a thickness is gradually decreased to substantially zero at an edge of a formed film.

Abstract: A method for making a piezoelectric element including a piezoelectric film formed on a substrate by a gas deposition technique includes the steps of ejecting ultra-fine particles of a piezoelectric material having a perovskite structure from an ejecting device toward the substrate, and applying an electric field to the ultra-fine particles traveling to the substrate. The substrate may be composed of a metal or a resin.

Abstract: In a thin-film formation process and system, a target and a substrate are placed in a sputtering space and a film-forming space, respectively, the pressure in the film-forming space is maintained at a pressure lower than the pressure in the sputtering space and a pressure sufficient for sputtered particles to move in the film-forming space with their mean free path which is longer than the distance between the grid plate and the substrate, and the target is sputtered to form a thin film on the substrate.

Abstract: In a thin-film formation process and system, a target and a substrate are placed in a sputtering space and a film-forming space, respectively, the pressure in the film-forming space is maintained at a pressure lower than the pressure in the sputtering space and a pressure sufficient for sputtered particles to move in the film-forming space with their mean free path which is longer than the distance between the grid plate and the substrate, and the target is sputtered to form a thin film on the substrate.

Abstract: A friction member is used in a friction portion in a vibration wave driving apparatus. The friction member comprises a composite resin which comprises polytetrafluoroethylene as a matrix and which further comprises at least an inorganic fiber substance and a heat-resistant resin. A ratio of a content Vf (vol %) of the inorganic fiber substance to a content Vr (vol %) of the heat-resistant resin satisfies the following relation: ⅓≦Vf/Vr≦3.

Abstract: A control apparatus for driving a vibration wave motor, in which localized fixation between a vibration member and a contact member in contact with the vibration member is peeled off by shifting the frequency of an applied frequency signal from a frequency higher than the resonant frequency to a lower frequency.

Abstract: A long-life vibration wave motor which abrades little and can be driven for long time periods. causes a vibration member to form a vibration wave and thereby moves the vibration member and a contact member in tight contact with the vibration member relative to each other by a frictional force. The vibration wave motor includes a sliding material made from hard particles and a soft metal softer than the hard particles and having a sliding surface obtained by projecting the hard particles by 0.2 to 2 .mu.m from the surface of the soft metal used in one of two contact portions of the vibration member and the contact member.

Abstract: A vibration driven motor of a construction in which the hardness of the sliding surface of a vibration member is lower than the hardness of the sliding contact portion of a member brought into pressure contact therewith, and the lateral width of the sliding contact portion of the vibration member is smaller than the width of the sliding contact portion of the member brought into pressure contact therewith, whereby the sliding member of the vibration member is caused to wear more than the sliding member of the member brought into pressure contact therewith, thereby to facilitate the discharge of the wear powder thereof and to eliminate the level difference wear of the movable member attributable to the comb-shaped projections and the deterioration of the planarity of the movable member similar thereto.

Abstract: As a combination of sliding members of a vibration member and a driven member in a vibration driven motor or actuator, one member adopts an aluminum alloy containing dispersed Si (silicon), and the other member adopts a PTFE resin filled with polyimide.

Abstract: Disclosed is feeding apparatus comprising a first vibration apparatus having projections provided with a predetermined distance therebetween, the first vibration apparatus producing a first travelling vibration wave in response to an electrical signal applied thereto, and a second vibration apparatus having projections located at the positions substantially corresponding to the projections of the first vibration apparatus, the second vibration apparatus producing a second travelling vibration wave proceeding in the same direction as the first travelling vibration wave in response to an electrical signal supplied thereto thereby the sheet inserted between the projections of the first vibration apparatus and the projections of the second vibration apparatus being fed by the first and second travelling vibration waves.

Abstract: This specification discloses a vibration wave driven motor in which frequency signals differing in phase from each other are applied to an electro-mechanical energy conversion element on a vibration member to thereby form a travelling vibration wave and a movable member is driven by the travelling vibration wave. The value of a factor which determines the natural frequency of the resonance system of the motor including a driven member when the driven member is driven by the motor or the frequency of wow-flutter is set so that the frequency of wow-flutter may not coincide with the natural frequency, thereby minimizing the unnecessary vibration of the driven member.

Abstract: In a vibration wave driven apparatus, a vibration member of a closed loop shape having at least one set of parallel straight portions is provided on one of the straight portions with a projection group in which in the driving frequency of the vibration member, the vibration mode is the 1st-order mode of the fixed end-free end vibration and on the other straight portion with a projection group in which the vibration mode is the 2nd-order mode of the fixed end-free end vibration, whereby forces in the same direction which are not couples are generated in the both straight portions to thereby enable an object to be rectilinearly driven in a plane formed by the straight portions, thus preventing the irregularity of feeding speed and any partial wear caused by one-sided contact and enabling the drive force to be increased.

Abstract: In a vibration wave driven motor wherein a vibration member and a member brought into pressure contact with the vibration member is frictionally driven relative to each other through a sliding material secured to the sliding surface of one of them, the sliding material is a compound resin material comprising fluorine resin as a matrix material, and thermosetting resin or thermoplastic resin having a higher melting point than the fluorine resin.