Abstract: An optical recording medium with a high productivity is provided which can certainly record/reproduce data even when a blue or blue-violet laser beam is used as an irradiation light. An optical recording medium has a substrate and a recording layer. The recording layer includes a recording portion and a coating portion. The recording portion and the coating portion are all made substantially from Bi and O. The ratio of the number of O atoms to the total number of Bi atoms and O atoms of the coating portion is less than that of the recording portion. The ratio of the number of O atoms of the recording portion is in the range of from 62% to 77%. The ratio of the number of O atoms to the total number of Bi atoms and O atoms of the coating portion is in the range of from 60% to 70%.

Abstract: A high-speed, write-once type optical recording medium, which utilizes laser light that is either blue or an even shorter wavelength, as well as an optical recording method and an optical recording apparatus for recording onto this optical recording medium. A high-speed, write-once type optical recording medium 10 having a recording layer 18 and a light transmission layer 22 formed sequentially on top of a support substrate 12, wherein the recording layer 18 is formed by laminating first and second vice-recording layers 18A, 18B which include Al and Sb respectively as primary components, and irradiation of a laser light of blue wavelength from a laser light source 24, through the light transmission layer 22 and onto the recording layer 18, causes diffusion and mixing of the Al and Sb contained within the first and second vice-recording layers 18A, 18B, and this mixing enables the formation of a recording mark based on an irreversible change in reflectance.

Abstract: An optical recording medium includes a substrate, a first recording layer formed on the substrate and containing an element selected from the group consisting of Si, Sn and Ge as a primary component, and a second recording layer located in the vicinity of the first recording layer and containing Ag as a primary component, the optical recording medium being constituted to be irradiated by a laser beam projected onto the side opposite from the substrate. According to the thus constituted optical recording medium, it is possible to decrease a noise level and improve a C/N ratio in a reproduced signal.

Abstract: A refrigerator stated is characterized in that it includes a machine room (14) formed on a lower part of a rear of a main body of the refrigerator; a refrigerant compressor (12) installed offset to one side in the machine room (14) in a width direction; and a cooler (9) for receiving a refrigerant from the refrigerant compressor (12) and cooling an inside of a storage chamber; wherein the cooler (9) is arranged inside the refrigerator via a heat insulating wall (3a) of the main body above the refrigerant compressor (12) arranged on one side of the machine room (14) and at a position on an opposite side of the refrigerant compressor (12) in a width direction; and control and power source boards (21) of the refrigerator are arranged in another wide space of the refrigerant compressor (12) in the machine room (14) in a width direction.

Abstract: A multilayer optical recording medium enabled to retain an ideal signal regenerating property in spite of accidental adhesion of finger mark or alien substance is provided. The multilayer optical recording medium 1 is provided with a plurality of information-recording layers 20, 22, 24, and 26 capable of reading information with a reading light irradiated through a light incidence surface 38A on one side and is so adapted that the light incidence side information-recording layer 26 approximating most closely to the light incidence surface 38A may be set at a small recording capacity as compared with the recording capacities of at least one of the other information-recording layers.

Abstract: A substrate processing method comprising steps for forming a copper film on a surface of a substrate. These steps includes the step of filling a first metal in the trenches so as to form a plated film of the first metal on an entire surface of the substrate by electroplating, wherein the electromagnetic field is adjusted by the virtual anode so that differences of thickness of the plated film between the central portion and the peripheral portion of the substrate being minimized, and polishing and removing the plated film by pressing the substrate to the polishing surface, wherein the pressures pressing the substrate to the polishing surface at a central portion and a peripheral portion are adjusted.

Abstract: A substrate processing apparatus fills a metal such as copper or the like in fine interconnection patterns or trenches defined in a semiconductor substrate. The substrate processing apparatus has a loading/unloading unit for placing a substrate cassette to allow a substrate to be loaded and unloaded, a substrate treating unit for treating a substrate, and a transfer robot for transferring a substrate between the loading/unloading unit and the substrate treating unit. The loading/unloading unit, the substrate treating unit, and the transfer robot are installed in a single facility. The loading/unloading unit has a rotary table which is horizontally rotatable for positioning the substrate cassette in a position to detect the substrate cassette placed in the loading/unloading unit and to remove the substrate from the substrate cassette with the transfer robot.

Abstract: There is provided a substrate processing method which, even when a material having a low mechanical strength is employed as an interlayer dielectric, can produce a semiconductor device having a multi-layer interconnect structure of fine interconnects in higher yield. A substrate processing method according to the present invention includes steps of: providing a substrate having interconnect recesses formed in a surface; forming a metal film on the surface of the substrate by plating to embed the metal film in the interconnect recesses; removing the metal film formed in an ineffective region of the substrate and an extra metal film formed in an effective region of the substrate; and flattening the surface of the substrate after removal of the metal film by performing chemical-mechanical polishing.

Abstract: An optical recording medium is provided which includes a plurality of recording layers and provides any of the recording layers with a good recording mark. An optical recording medium includes a first recording layer and a second recording layer, in which the second recording layer located relatively closer to an incidence plane of a laser beam is thicker than the first recording layer located farther away from the incidence plane of the laser beam with respect to the second recording layer.

Abstract: An optical information recording medium which makes it possible to reduce the noise level and improve the C/N ratio. An optical information recording medium has a recording layer formed on a substrate, for having a laser beam irradiated thereto for recording and reproducing record data. The recording layer includes a first sub-recording film and a second sub-recording film. The first sub-recording film is formed of a first material containing Si as a main component. The second sub-recording film is formed of a second material containing Zn as a main component and having Al added thereto, and disposed in the vicinity of the first recording film. The laser beam is irradiated to the recording layer via a light transmitting layer formed in a manner covering the recording layer.

Abstract: A plating method is capable of depositing a plated film having excellent in-plane uniformity with respect to a thin seed layer and excellent embeddability with respect to fine damascene structures. The plating method includes: positioning an electric resistor between a conductive layer formed on at least a portion of a surface of a substrate and an anode; introducing respectively a plating solution into a space between the conductive layer and the anode on a conductive layer side, and an anode solution into a space between the conductive layer and the anode on an anode side, thereby filling the space with a plating bath composed of the plating solution and the anode solution, with the plating solution containing 25 to 75 g/L of copper ions and at least 0.4 mole/L of an organic acid or an inorganic acid, and the anode solution being of the same composition as the plating solution, or containing 0 to 75 g/L of copper ions and at most 0.

Abstract: An optical information recording medium which makes it possible to reduce the noise level, improve the C/N ratio and store record data for a long time period. An optical information recording medium has a recording layer formed on a substrate, for having a laser beam irradiated thereto for recording and reproduction of record data. The recording layer includes a first sub-recording film and a second sub-recording film. The first sub-recording film is formed of a first material containing Si as the main component. The second sub-recording film is formed of a second material containing Al as the main component and having Cu added thereto, and disposed in the vicinity of the first recording film. The laser beam is irradiated to the recording layer via a light transmitting layer formed in a manner covering the recording layer side.

Abstract: A plating apparatus and method which smoothly perform contact of a plating liquid with a surface of the substrate and which can prevent air bubbles from remaining on the surface to be plated. The plating apparatus includes a plating bath containing a plating liquid in which an anode is immersed, a head portion for holding a substrate detachably and bringing a lower surface, to be plated, of the substrate into contact with an overflow surface of the plating liquid held in the plating bath, a drive mechanism for rotating the head portion, and a tilt mechanism for tilting the head portion so that the substrate held by the head portion is inclined relative to a horizontal plane.

Abstract: An optical information recording medium which makes it possible to reduce the noise level, improve the C/N ratio and store record data for a long time period. An optical information recording medium has a recording layer formed on a substrate, for having a laser beam irradiated thereto for recording and reproduction of record data. The recording layer includes a first sub-recording film and a second sub-recording film. The first sub-recording film is formed of a first material containing Si as the main component. The second sub-recording film is formed of a second material containing Al as the main component and having Ti added thereto, and disposed in the vicinity of the first recording film. The laser beam is irradiated to the recording layer via a light transmitting layer formed in a manner covering the recording layer side.

Abstract: An optical recording medium is provided which has a plurality of recording layers, in which a favorable recording mark can be formed and desired reproduction accuracy can be obtained in any of the recording layers. The optical recording medium has a first recording layer and a second recording layer. In the first and second layers, a recording mark, having an increased thickness larger than that of a neighboring space portion, is formed by an irradiation with a laser beam. The refractive index of the second recording layer placed relatively closer to an incident surface of a laser beam is lower than that of the first recording layer placed farther away from the incident surface of the laser beam than the second recording layer.

Abstract: An optical information recording medium which makes it possible to reduce the noise level and improve the C/N ratio and store record data for a long time period. An optical information recording medium has a recording layer formed on a substrate, for having a laser beam irradiated thereto for recording and reproduction of record data. The recording layer includes a first sub-recording film and a second sub-recording film. The first sub-recording film is formed of a first material containing Si as a main component. The second sub-recording film is formed of a second material containing Al as a main component and having Mg added thereto, and disposed in the vicinity of the first recording film. The laser beam is irradiated to the recording layer via a light transmitting layer formed in a manner covering the recording layer.

Abstract: An optical information recording medium which is capable of performing high-density recording of record data, and storing the recorded data for a long time period such that the recorded data can be normally reproduced during the long time period. An optical information recording medium has a recording layer formed on a substrate, for having a laser beam irradiated thereto for recording and reproduction of record data. The recording layer includes a first sub-recording film and a second sub-recording film. The first sub-recording film is formed of a first material containing Si as the main component. The second sub-recording film is formed of a second material containing Cu as the main component and having Si added thereto, and disposed in the vicinity of the first recording film.

Abstract: An optical recording/reproducing method and an optical recording medium capable of performing excellent optical recording with a simple structure in a recording layer made of environmentally friendly materials. The optical recording medium has a recording layer on a substrate. The recording layer has a pair of dielectric layers of which states are altered by a laser beam that is an energy beam of which intensity is modulated according to information to be recorded. This recording layer also has a assisting material layer sandwiched by these dielectric layers. The assisting material layer includes an element selected from Sn, Ti, Si, Bi, Ge, and C as a principle component, while the dielectric material as a base material for the dielectric layers is any one of ZnS, SiO2, AlN, and Ta2O5.

Abstract: An optical information recording medium which is capable of performing high-density recording of record data, and storing the recorded data for a long time period such that the recorded data can be normally reproduced during the long time period. An optical information recording medium has a recording layer formed on a substrate, for having a laser beam irradiated thereto for recording and reproduction of record data. The recording layer includes a first sub-recording film and a second sub-recording film. The first sub-recording film is formed of a first material containing Si as the main component. The second sub-recording film is formed of a second material containing Cu as the main component and having Mg added thereto, and disposed in the vicinity of the first recording film.

Abstract: An optical information recording medium which is capable of performing high-density recording of record data, and storing the recorded data for a long time period such that the recorded data can be normally reproduced during the long time period. An optical information recording medium has a recording layer formed on a substrate, for having a laser beam irradiated thereto for recording and reproduction of record data. The recording layer includes a first sub-recording film and a second sub-recording film. The first sub-recording film is formed of a first material containing Si as the main component. The second sub-recording film is formed of a second material containing Cu as the main component and having Zn added thereto, and disposed in the vicinity of the first recording film.