Abstract: An outer peripheral end of a substrate is held with a plurality of chuck pins provided at a spin plate abutting against a plurality of portions of the outer peripheral end of the substrate, and the spin plate is rotated about a rotation axis. A cleaning head is moved by a head moving mechanism while being pressed against a back surface of the substrate held by the plurality of chuck pins by the head moving mechanism, and foreign matter on the back surface of the substrate is removed by polishing with the cleaning head. A reaction force against a load applied to the back surface of the substrate by the cleaning head is generated in the substrate by auxiliary pins. Alternatively, the back surface of the substrate, which has been cleaned or is being cleaned by the cleaning head, is further cleaned by a cleaning brush.

Abstract: A substrate cleaning device includes a cleaning brush having a circular upper end surface, and cleans a lower surface of a substrate by bringing the upper end surface of the cleaning brush into contact with the lower surface of the substrate rotated by a spin chuck. A space forming member is provided for cleaning of the cleaning brush. The space forming member has a lower end surface. Further, the space forming member has a circular opening in a lower end surface and forms an inner space. A cleaning liquid is supplied to the inner space of the space forming member with the circular opening closed by the upper end surface of the cleaning brush, whereby the cleaning liquid is allowed to flow out from the inner space through the circular opening and a gap between the upper end surface of the cleaning brush and the lower end surface of the space forming member.

Abstract: The present invention relates to an auto-tensioner containing a base having a cylindrical part, a rotating member supported rotatably to the base, a pulley provided at the rotating member, a friction member sandwiched between the cylindrical part and the rotating member, and a coil spring locked to the friction member and the base and disposed in a state of being compressed in an axial direction, thereby biasing the rotating member in one direction, in which the friction member has an arcuate surface capable of sliding along the cylindrical part, a first locking part located further toward the one direction side than the arcuate surface in a circumferential direction of the cylindrical part and locked to the rotating member, and a second locking part locked to one end of the coil spring.

Abstract: A cleaning drying processing unit includes a lower spin chuck, a splash prevention cup, and a storage member. The splash prevention cup is provided to surround the lower spin chuck, and has an annular opening that can be opposite to an outer peripheral end of a substrate rotated by the lower spin chuck. A lower portion of the splash prevention cup is stored in the storage member. Cleaning and drying processing using a cleaning liquid are performed on the substrate rotated by the lower spin chuck. At this time, the splash prevention cup is supported such that the annular opening is opposite to the outer peripheral end of the substrate. Gas in a space opposite to the annular opening is sucked from the annular opening through a first annular space of the splash prevention cup and a second annular space in the storage member.

Abstract: A substrate cleaning device includes a rotation holder and a cleaner. The rotation holder includes a rotator provided to be rotatable about a rotation axis, and a plurality of holders provided at the rotator to be capable of abutting against a plurality of portions of an outer peripheral end of a substrate and holding the substrate. The cleaner includes a cleaning tool provided to be capable of removing foreign matter on a back surface of the substrate by polishing, a mover that moves the cleaning tool while pressing the cleaning tool against the back surface of the substrate held by the plurality of holders, and a reaction force generator that generates a reaction force in the substrate against a load applied to the back surface of the substrate by the cleaning tool.

Abstract: A substrate treating apparatus includes a treating section for treating substrates, and an interface section disposed adjacent the treating section and adjacent an exposing machine provided separately from the apparatus. The interface section has a first treating-section-side transport mechanism, a second treating-section-side transport mechanism, and an exposing-machine-side transport mechanism. Each of the first and second treating-section-side transport mechanisms is arranged to receive the substrates from the treating section, pass the substrates to the exposing-machine-side transport mechanism, receive the substrates from the exposing-machine-side transport mechanism and pass the substrates to the treating section.

Abstract: A substrate treating apparatus includes a treating section for treating substrates, and an interface section disposed adjacent the treating section and adjacent an exposing machine provided separately from the apparatus. The interface section has a first treating-section-side transport mechanism, a second treating-section-side transport mechanism, and an exposing-machine-side transport mechanism. Each of the first and second treating-section-side transport mechanisms is arranged to receive the substrates from the treating section, pass the substrates to the exposing-machine-side transport mechanism, receive the substrates from the exposing-machine-side transport mechanism and pass the substrates to the treating section.

Abstract: Disclosed is a substrate treating apparatus including a substrate holder, a rotating drive unit, a treatment liquid supplying unit, an exterior cup, and an interior cup. The interior cup is movable between a collection position where the interior cup collects the treatment liquid and a retracting position where the exterior cup collects the treatment liquid, and includes an interior cup main body with an annular contour, a liquid outlet in the interior cup main body for draining the treatment liquid in the interior cup main body, and an exhaust port in the interior cup main body for exhausting gas in the interior cup main body. The exterior cup includes an exterior cup main body with an annular contour, a liquid outlet in the exterior cup main body for draining the treatment liquid in the exterior cup main body, and an exhaust port in the exterior cup main body for exhausting gas in the exterior cup main body.

Abstract: A data processing apparatus that can set the magnification factor according to the distance from the antenna is provided so that the display of objects close to the antenna is easier to see and with which the changes in the settings of the magnification factor is easy. The buffer memory stores the digital signals converted by the A/D converter in association with the distance and azimuth with respect to the antenna. The digital filter filters the digital signals read from the buffer memory. A digital filter is provided that converts a value of data of interest, of digital data stored in the memory, to a value based on values of the data of interest to be processed and peripheral data in a periphery of the data of interest, and the digital filter changes a range of the peripheral data used for a filter processing according to the distance from the antenna to the data of interest.

Abstract: An object of the present invention is to provide a technique of suppressing precipitation of an anthocyanin pigment in a range other than the highly acidic range. The present invention provides an anthocyanin pigment preparation, comprising: an anthocyanin pigment; and an emulsifier, wherein the pH when the anthocyanin pigment preparation is diluted with water or dissolved in water so that a color value becomes 10 is more than 3.

Abstract: Disclosed is a substrate treating apparatus including a substrate holder, a rotating drive unit, a treatment liquid supplying unit, an exterior cup, and an interior cup. The interior cup is movable between a collection position where the interior cup collects the treatment liquid and a retracting position where the exterior cup collects the treatment liquid, and includes an interior cup main body with an annular contour, a liquid outlet in the interior cup main body for draining the treatment liquid in the interior cup main body, and an exhaust port in the interior cup main body for exhausting gas in the interior cup main body. The exterior cup includes an exterior cup main body with an annular contour, a liquid outlet in the exterior cup main body for draining the treatment liquid in the exterior cup main body, and an exhaust port in the exterior cup main body for exhausting gas in the exterior cup main body.

Abstract: A rotating substrate is cleaned by a polishing head and a cleaning brush. A first trajectory is formed by movement of the polishing head along a first path. A second trajectory is formed by movement of the cleaning brush along a second path. A region in which the first and second paths overlap with each other is defined as an interference region. The polishing head moves from a center towards an outer peripheral end of the substrate, and it is determined whether the polishing head has moved out of the interference region. At a time point at which it is determined that the polishing head has moved out of the interference region, the cleaning brush starts moving from the outer peripheral end towards the center of the substrate.

Abstract: In a substrate cleaning device, with a polishing head in contact with one surface of a substrate rotated by a spin chuck, the polishing head is moved at least between a center and an outer periphery of the substrate. Thus, the one surface of the substrate is polished by the polishing head, and contaminants present on the one surface of the substrate are removed. At this time, capacity for removing contaminants by the polishing head is changed according to a position in a radial direction of the substrate. The capacity for removing contaminants refers to capacity for scraping contaminants adhering to the one surface of the substrate, and suction marks, contact marks and the like remaining on the one surface of the substrate by polishing. It is possible to change the capacity for removing contaminants by adjusting a pushing force exerted on the one surface of the substrate from the polishing head, for example.

Abstract: A substrate cleaning device includes a cleaning brush having a circular upper end surface, and cleans a lower surface of a substrate by bringing the upper end surface of the cleaning brush into contact with the lower surface of the substrate rotated by a spin chuck. A space forming member is provided for cleaning of the cleaning brush. The space forming member has a lower end surface. Further, the space forming member has a circular opening in a lower end surface and forms an inner space. A cleaning liquid is supplied to the inner space of the space forming member with the circular opening closed by the upper end surface of the cleaning brush, whereby the cleaning liquid is allowed to flow out from the inner space through the circular opening and a gap between the upper end surface of the cleaning brush and the lower end surface of the space forming member.

Abstract: A substrate on which exposure processing has not been performed is carried into a placement cooling unit and cooled. The cooled substrate is held and carried out from the placement cooling unit by a transport device. In the case where an exposure device is able to receive the substrate, the substrate that has been carried out from the placement cooling unit is transported to the exposure device by the transport device. In the case where the exposure device is unable to receive the substrate, the substrate that has been carried out from the platform cooling unit is carried into a cooling buffer unit by the transport device. In the cooling buffer unit, a temperature of the substrate is maintained. After the exposure device becomes able to receive the substrate, the substrate is carried out from the cooling buffer unit and transported to the exposure device by the transport device.

Abstract: Disclosed is a substrate treating apparatus that treats a substrate with processing liquids. The apparatus includes a substrate holder, an exterior cup, and an interior cup. The interior cup includes an interior cup body, and an interior cup outlet. The exterior cup includes an exterior cup body, an exterior bottom cup, a first drain outlet, a first exhaust port, a second drain outlet, a second exhaust port, and a separation partition. The apparatus further includes an annular member movable upwardly/downwardly, and a drive unit that causes the annular member to move to shift the interior cup body between a collecting position and a retracting position.

Abstract: A virtual computer system includes an external event acquisition controller, an external event storing unit, and a snap shot creating unit. The external event acquisition controller performs control for acquiring an event regarding an external device provided outside a virtual computer which mounts a guest operating system in which an application program is installed. The external event storing unit stores the external event acquired by the external event acquisition controller. The snap shot creating unit creates a snap shot of the guest operating system including the application program after the external event is stored in the external event storing unit.

Abstract: A cooling pipe for an internal combustion engine includes with a resin-made water outlet for forming a circulation path for circulating a coolant for cooling an engine body, and an attachment part for retaining a water temperature sensor for sensing the temperature of the coolant flowing through the water outlet, the attachment part being attached to the water outlet, a portion of the attachment part being in contact with the engine body, and the attachment part formed from a material whereby heat from the engine body is transmitted.

Abstract: An image forming apparatus includes a receiving unit that receives plural pieces of print data described in plural types of page description languages, plural drawing processors that respectively correspond to the plural types of page description languages, extract specific drawing objects from the plural pieces of print data, and convert the specific drawing objects into print image data, and an output unit that compares the print image data that the drawing processors have converted the specific drawing objects into, and outputs comparison results.

Abstract: A signal processing device is provided. The signal processing device processes reception signals received by an object detector that detects existence of objects. The signal processing device includes a coordinate detecting module configured to detect a plurality of sets of representative coordinates of each of two echo images at two or more timings, the two echo images obtained from the reception signals and caused by two target objects. The signal processing device also includes a determining module configured to determine, based on the plurality of sets of representative coordinates at the two or more timings, whether the two echo images are obtained from towing object signals caused by a pair of a towing object and a towed object.