Abstract: A substrate processing apparatus includes: a processing container, a mixing device, a liquid feeding path, and a controller. The processing container processes a substrate by immersing the substrate in a processing liquid. The mixing device mixes a phosphoric acid aqueous solution and an additive, to produce a mixed liquid to be used as a raw material of the processing liquid. The liquid feeding path feeds the mixed liquid from the mixing device to the processing container. The controller controls the substrate processing apparatus. The controller performs a control to feed the mixed liquid from the mixing device to the processing container in which the substrate is immersed, after a phosphoric acid concentration of the mixed liquid is regulated from a first concentration to a second concentration higher than the first concentration. The first concentration is a concentration when the phosphoric acid aqueous solution is supplied to the mixing device.

Abstract: A substrate processing apparatus, a substrate processing method and a recording medium capable of shortening an etching processing time are provided. The substrate processing apparatus includes a substrate processing tub, a mixing unit and a supply line. The substrate processing tub is configured to perform an etching processing therein with an etching liquid. The mixing unit is configured to mix a new liquid with a silicon-containing compound or a liquid containing the silicon-containing compound. The supply line is configured to supply a mixed solution mixed by the mixing unit into the substrate processing tub.

Abstract: One aspect of the present invention is an electric power transmission device that periodically shifts a frequency of a magnetic field to a plurality of predetermined shift values and that transmits electric power by utilizing the magnetic field. The device includes a plurality of power transmitters and an instructor. Each of the plurality of power transmitters configured to generate a magnetic field. The instructor outputs an instruction signal indicating a shift value to be shifted to each of the power transmitters to instruct the shift value to be shifted to each of the power transmitters. Further, the instructor instructs the shift value to be shifted in such a manner that at least a part of the magnetic fields of the plurality of power transmitters are different in frequency at the same time point.

Abstract: According to one embodiment, an apparatus includes a transmitter, a sensor, a controller and an adjustment circuit. The transmitter is configured to transmit a power signal wirelessly. The sensor is configured to measure a value of the power signal. The controller is configured to: determine a frequency characteristic of the power signal based on the value measured by the sensor; and switch a frequency of the power signal between a plurality of frequencies. The adjustment circuit is configured to adjust an amplitude of the power signal based on a change of the frequency characteristic of the provided power signal by switching the frequency of the power signal.

Abstract: A storage device according to an aspect of the present disclosure includes a storage tank, a heating mechanism, and a controller. The storage tank stores a processing liquid that contains an aqueous solution of phosphoric acid and an additive. The heating mechanism heats the processing liquid that is stored in the storage tank. The controller controls the heating mechanism to execute a concentration maintaining process where a temperature of the processing liquid is adjusted in such a manner that an amount of evaporation of water for the processing liquid in the storage tank approaches an amount of absorption of moisture for the processing liquid in the storage tank.

Abstract: A substrate processing apparatus includes: a processing container, a mixing device, a liquid feeding path, and a controller. The processing container processes a substrate by immersing the substrate in a processing liquid. The mixing device mixes a phosphoric acid aqueous solution and an additive, to produce a mixed liquid to be used as a raw material of the processing liquid. The liquid feeding path feeds the mixed liquid from the mixing device to the processing container. The controller controls the substrate processing apparatus. The controller performs a control to feed the mixed liquid from the mixing device to the processing container in which the substrate is immersed, after a phosphoric acid concentration of the mixed liquid is regulated from a first concentration to a second concentration higher than the first concentration. The first concentration is a concentration when the phosphoric acid aqueous solution is supplied to the mixing device.

Abstract: According to one embodiment, power transmission circuitry configured to generate a magnetic field by AC current flowing through a coil, and to transmit AC power by coupling the magnetic field with a coil of a power reception apparatus, wherein a frequency of the AC current is higher than a frequency of AC power supply to the power transmission apparatus; and control circuitry configured to change a frequency of the AC current in accordance with a first order of first to n-th frequencies during a power transmission of the power transmission circuitry, wherein the first order comprises each of the first to n-th frequencies one time.

Abstract: An electric power transmission device as one aspect of the present invention comprises: a power transmitter that generates a magnetic field; a storage; and a power transmission controller. The storage stores a first parameter set concerning frequency hopping performed on a first frequency band and a second parameter set concerning frequency hopping performed on a second frequency band. The power transmission controller controls the power transmitter such that the frequency hopping is performed based on the parameter set acquired from the storage. The first frequency band is a band corresponding to a first resolution bandwidth for measuring a leakage magnetic field. The second frequency band is a band corresponding to a second resolution bandwidth intended for a higher band than the first resolution bandwidth.

Abstract: An electric power transmission device as an aspect of the present invention includes a plurality of power transmitters configured to respectively generate magnetic fields. Phases of the respective magnetic fields are set such that the respective magnetic fields cancel out each other. The power transmitters sequentially shift frequencies of the respective magnetic fields to the same value at the same timing. A shift width of each of the frequencies for one-time shifting is limited by an upper limit value.

Abstract: According to one embodiment, power transmission circuitry configured to generate a magnetic field by AC current flowing through a coil, and to transmit AC power by coupling the magnetic field with a coil of a power reception apparatus, wherein a frequency of the AC current is higher than a frequency of AC power supply to the power transmission apparatus; and control circuitry configured to change a frequency of the AC current in accordance with a first order of first to n-th frequencies during a power transmission of the power transmission circuitry, wherein the first order comprises each of the first to n-th frequencies one time.

Abstract: According to one embodiment, an apparatus includes a transmitter, a sensor, a controller and an adjustment circuit. The transmitter is configured to transmit a power signal wirelessly. The sensor is configured to measure a value of the power signal. The controller is configured to: determine a frequency characteristic of the power signal based on the value measured by the sensor; and switch a frequency of the power signal between a plurality of frequencies. The adjustment circuit is configured to adjust an amplitude of the power signal based on a change of the frequency characteristic of the provided power signal by switching the frequency of the power signal.

Abstract: One aspect of the present invention is an electric power transmission device that periodically shifts a frequency of a magnetic field to a plurality of predetermined shift values and that transmits electric power by utilizing the magnetic field. The device includes a plurality of power transmitters and an instructor. Each of the plurality of power transmitters configured to generate a magnetic field. The instructor outputs an instruction signal indicating a shift value to be shifted to each of the power transmitters to instruct the shift value to be shifted to each of the power transmitters. Further, the instructor instructs the shift value to be shifted in such a manner that at least a part of the magnetic fields of the plurality of power transmitters are different in frequency at the same time point.

Abstract: An electric power transmission device as one aspect of the present invention comprises: a power transmitter that generates a magnetic field; a storage; and a power transmission controller. The storage stores a first parameter set concerning frequency hopping performed on a first frequency band and a second parameter set concerning frequency hopping performed on a second frequency band. The power transmission controller controls the power transmitter such that the frequency hopping is performed based on the parameter set acquired from the storage. The first frequency band is a band corresponding to a first resolution bandwidth for measuring a leakage magnetic field. The second frequency band is a band corresponding to a second resolution bandwidth intended for a higher band than the first resolution bandwidth.

Abstract: An electric power transmission device as an aspect of the present invention includes a plurality of power transmitters configured to respectively generate magnetic fields. Phases of the respective magnetic fields are set such that the respective magnetic fields cancel out each other. The power transmitters sequentially shift frequencies of the respective magnetic fields to the same value at the same timing. A shift width of each of the frequencies for one-time shifting is limited by an upper limit value.

Abstract: A substrate processing apparatus, a substrate processing method and a recording medium capable of shortening an etching processing time are provided. The substrate processing apparatus includes a substrate processing tub, a mixing unit and a supply line. The substrate processing tub is configured to perform an etching processing therein with an etching liquid. The mixing unit is configured to mix a new liquid with a silicon-containing compound or a liquid containing the silicon-containing compound. The supply line is configured to supply a mixed solution mixed by the mixing unit into the substrate processing tub.

Abstract: According to one embodiment, a power transmission device includes: a power transmitter, a frequency control circuit and a voltage control circuit. The power transmitter transmits AC power by causing a coil to generate a magnetic field in response to AC power and coupling the magnetic field to a coil of a power receiver. The frequency control circuit sweeps a frequency of the AC power during the power transmission. The voltage control circuit controls a voltage of the AC power, based on a target condition of a ratio between a voltage of power received by the power receiver and a voltage of the AC power.

Abstract: A power transmission device in a mode of the present invention includes a first power transmitter configured to generate a first magnetic field; and a second power transmitter configured to generate a second magnetic field having a phase opposite to a phase of the first magnetic field. Further, changing a frequency of the first magnetic field to a new value by the first power transmitter and changing a frequency of the second magnetic field to the new value by the second power transmitter are performed at the same timing.

Abstract: A receiving apparatus includes a variable gain unit to change between a first gain and a smaller second gain, and to amplify a received signal to obtain an amplified signal; a comparator to compare a power of the amplified signal with a reference value; and a controller to set a gain to the first gain while in a standby state, to reset a gain to a third gain between the first and second gains if in a standby state the power of the received signal is larger than the reference value, and then to set a gain to the first gain and return to the standby state if the power is equal to or lower than the reference value, or if not, to a fourth gain between the first and third gains.

Abstract: According to one embodiment, a wireless communication apparatus includes a transceiver, an estimator and a controller. The transceiver transmits and receives a frame in a frequency band which is used by a first system executing communication in a first communication range determined by a first transmission power and a first antenna gain. The estimator determines whether an amount of interference in the frequency band from a second system is no less than a threshold, the second system executing communication in a second communication range which is larger than the first communication range and which is determined by a second transmission power and a second antenna gain. The controller increases a transmission power when the amount of interference is no less than the threshold.

Abstract: A stationary proximity wireless communication apparatus has an electromagnetic-wave transmitting and receiving part comprising a first indicator that indicates a zone to place a portable proximity wireless communication apparatus and an antenna that is installed in the zone to emit electromagnetic waves having directivity in a direction of a recommended optimum position suitable to place the portable proximity wireless communication apparatus in the zone from a position different from the recommended optimum position, and a wireless communication part configured to perform modulation and demodulation processes of electromagnetic waves transmitted and received at the antenna.