Patents by Inventor Koji Takeishi

Koji Takeishi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic attracting method, electrostatic attracting apparatus, and bonding apparatus
    Publication number: 20040223284
    Abstract: There is disclosed an electrostatic attracting method in which a direct-current voltage is applied to an electrode disposed at a table formed of a dielectric material to attract/hold a substrate onto a holding surface of the table with an electrostatic force produced thereby, the method comprising a first step of applying a voltage having a predetermined polarity to the electrode to charge the holding surface with an electric charge having a polarity different from that applied to the electrode, a second step of holding the substrate in contact with the holding surface to prevent electric charges charged on the holding surface from disappearing, and a third step of applying a voltage having a polarity different from that applied in the first step to the electrode in a state in which the substrate contacts the holding surface to produce an electric charge having the same polarity as that charged at the holding surface in the first step on the holding surface of the table, and attracting/holding the substrate w
    Type: Application
    Filed: December 2, 2003
    Publication date: November 11, 2004
    Applicant: Shibaura Mechatronics Corporation
    Inventors: Munenori Iwami, Noboru Kuriyama, Koji Takeishi, Ikuo Hayafuji, Hirokazu Masuda