Patents by Inventor Koji Tometsuka

Koji Tometsuka has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer transfer mechanism in vertical CVD diffusion apparatus
    Patent number: 5217340
    Abstract: A wafer transfer method and mechanism in a vertical CVD diffusion apparatus and a control device for the method and mechanism. The vertical-type CVD diffusion apparatus has a boat containing many wafers in a horizontal orientation, stacked vertically. Product wafers are transferred to the boat five by five, dummy wafers are transferred five by five or a fraction less than five, and monitor wafers are inserted one by one between a block of the product wafers and another block of the product wafers, or a block of the dummy wafers.
    Type: Grant
    Filed: April 23, 1992
    Date of Patent: June 8, 1993
    Assignee: Kokusai Electric Co., Ltd.
    Inventors: Yasuhiro Harada, Toshikazu Karino, Ryoji Saito, Koji Tometsuka, Shoichiro Izumi
  • Wafer transfer method in vertical CVD diffusion apparatus
    Patent number: 5112641
    Abstract: A wafer transfer method and mechanism in a vertical CVD diffusion apparatus and a control device for the method and mechanism. The vertical-type CVD diffusing apparatus has a boat containing many wafers in a horizontal orientation, stacked vertically. Product wafers are transferred to the boat five by five, dummy wafers are transferred five by five or a fraction less than five, and monitor wafers are inserted one by one between a block of the product wafers and another block of the product wafers, or a block of the dummy wafers.
    Type: Grant
    Filed: January 18, 1990
    Date of Patent: May 12, 1992
    Assignee: Kokusai Electric Co., Ltd.
    Inventors: Yasuhiro Harada, Toshikazu Karino, Ryoji Saito, Koji Tometsuka, Shoichiro Izumi