Abstract: A substrate processing apparatus includes a liquid processing tank, a movement mechanism, an ejector, and a controller. The liquid processing tank stores a processing liquid. The movement mechanism moves a plurality of substrates immersed in the liquid processing tank to a position above the liquid surface of the processing liquid. The ejector ejects a vapor of an organic solvent toward portions of the plurality of substrates that are exposed from the liquid surface. The controller changes an ejection flow rate of the vapor ejected by the ejector as the plurality of substrates are moved up.

Abstract: An air-conditioning apparatus includes a refrigeration circuit, a first shut-off device provided at a pipe connecting a heat-source-side heat exchanger and an expansion device, a refrigerant leak detection device, and a controller. The controller controls a flow switching device to switch a connection state between a first connection state in which a discharge side of a compressor is connected to the heat-source-side heat exchanger, and a second connection state in which a suction side of the compressor is connected to the heat-source-side heat exchanger via an accumulator. When a refrigerant leak is detected, the controller performs a refrigerant retrieval operation and a refrigerant transfer operation.

Abstract: An air-conditioning apparatus includes a refrigeration circuit, a first shut-off device, a leakage detection device, and a controller configured to perform a refrigerant recovery operation in a case where refrigerant leakage is detected. At the time of the refrigerant recovery operation, the controller performs control to perform a first operation of recovering refrigerant from a load-side heat exchanger into an accumulator and a heat-source-side heat exchanger, and a second operation of moving refrigerant in the heat-source-side heat exchanger to the accumulator. In the first operation, the first shut-off device is closed, a flow passage switching device is brought into a first connection state, and a compressor is driven. The second operation is performed after the first operation, and in the second operation, the connection state of the flow passage switching device is switched to a second connection state in a state where the compressor is being operated.

Abstract: A liquid processing method can remove pure water existing within a pattern of a substrate and replace the pure water with a solvent rapidly. The liquid processing method of supplying the pure water onto the substrate, which is horizontally held and has the pattern formed on a surface thereof, and drying the substrate includes a pure water supplying process of supplying the pure water onto the surface of the substrate; a heated solvent supplying process of supplying, after the pure water supplying process, the solvent in a liquid state, which is heated to a temperature equal to or higher than a boiling point of water, onto the surface of the substrate on which the pure water exists; and a removing process of drying the substrate by removing the solvent form the surface of the substrate.

Abstract: Provided is a steel for a mechanical structure for cold working, which contains C, Si, Mn, P, S, Al and N and in which the metal structure includes pearlite and ferrite, the total areal proportion of pearlite and ferrite relative to the overall structure is 90% or higher, the average circle-equivalent diameter of bcc-Fe crystal grains surrounded by large angle grain boundaries is 5-15 ?m, the average aspect ratio of pro-eutectoid ferrite crystal grains is 3.0 or lower, and the average spacing at the narrowest pearlite lamellar spacing is 0.20 ?m or less.

Abstract: There is provided a semiconductor device manufacturing method which includes: loading a substrate with a magnetic substance film formed thereon into a process container; regulating an internal pressure of the process container to a first pressure lower than an atmospheric pressure; regulating the internal pressure of the process container from the first pressure to a second pressure higher than the first pressure; and magnetizing the magnetic substance film by applying a magnetic field to the magnetic substance film under the second pressure.

Abstract: A battery pack includes multiple sub-modules each of which includes multiple battery cells electrically connected to each other, and an exhaust duct that is provided between and integrated with at least the two battery modules facing each other. The exhaust duct includes therein an exhaust passage that communicates with an outer surface of a safety valve provided in each battery cell in each of the facing battery modules.

Abstract: An air-conditioning apparatus is capable of efficiently performing defrosting operation without suspending a heating operation of an indoor unit. The air-conditioning apparatus includes a main circuit sequentially connecting, via a pipe, a compressor, indoor heat exchangers, first flow control devices, and a plurality of parallel heat exchangers connected in parallel to each other to allow refrigerant to circulate, first defrost pipes branching a part of the refrigerant discharged from the compressor and causing the part of the refrigerant to flow into one of the plurality of parallel heat exchangers to be defrosted, an interface heat exchanger located between the plurality of parallel heat exchangers, a first bypass pipe branching a part of the refrigerant discharged from the compressor and causing the part of the refrigerant to flow into the interface heat exchanger, and a second bypass pipe causing the part of the refrigerant flowing out of the interface heat exchanger to flow into the main circuit.

Abstract: An air-conditioning apparatus includes a selection unit and a determination unit, the selection unit selecting a reverse-defrosting operation mode or a heating-defrosting simultaneous operation mode, the reverse-defrosting operation mode being a mode in which all of parallel heat exchangers are defrosted by stopping a heating operation, the heating-defrosting simultaneous operation mode being a mode in which each parallel heat exchanger is sequentially defrosted while continuing a heating operation, the determination unit determining whether or not a defrosting operation is to be started, in which the determination unit is configured to start the defrosting operation in a state where the amount of frost deposited on the parallel heat exchangers is smaller in a case where the heating-defrosting simultaneous operation mode is selected than in a case where the reverse-defrosting operation is selected.

Abstract: A battery pack includes: a battery assembly including a plurality of batteries; a fluid drive member driving a fluid which cools the battery assembly; a housing that houses the battery assembly and the fluid drive member; and a beam provided integrally with a bottom wall of the housing to support the battery assembly from a lower side. A circulation passage provided in the housing includes: a first fluid passage between the battery assembly and a side wall of the housing; a battery passage between the batteries; and a second fluid passage downstream of the battery passage and extending toward the fluid drive member. The second fluid passage is surrounded by at least the beams, the bottom wall, and a lower end of the battery assembly.

Abstract: An air-conditioning apparatus includes: a compressor allowing refrigerant injection thereto and compress and discharge the refrigerant at a high temperature; an indoor heat exchanger exchanging heat between air and refrigerant; a first flow rate control device adjusting and controlling a flow rate of refrigerant; and a plurality of outdoor heat exchangers being in parallel to exchange heat between outside air and refrigerant, a first defrosting pipe allowing a branched part of the refrigerant discharged from the compressor to pass and flow into the outdoor heat exchanger to be defrosted; a reducing device adjusting a pressure of refrigerant passing through the first defrosting pipe to a medium pressure; a second defrosting pipe from which the refrigerant having passed through the outdoor heat exchanger to be defrosted is injected into the compressor; and a reducing device adjusting a pressure of refrigerant passing through the second defrosting pipe to an injection pressure.

Abstract: An air-conditioning apparatus, including an outdoor unit including a compressor and an outdoor heat exchanger, a plurality of indoor units each including an indoor heat exchanger, and a relay unit configured to distribute refrigerant supplied from the outdoor unit to the plurality of indoor units, the relay unit including a first branch unit in which liquid-side pipes connected to the plurality of indoor units join together, and a refrigerant shutoff valve, which is configured to control bidirectional flow of the refrigerant, and is provided to the first branch unit, the number of the refrigerant shut off valve being smaller than a number of the plurality of indoor units.

Abstract: A drying fluid can be uniformly supplied to a substrate. A substrate drying apparatus includes a processing chamber and a cover unit. The processing chamber is provided with an opening through which the substrate is carried in and out. The cover unit is configured to open or close the opening. Further, the cover unit includes a diffusion space and a rectifying member. The diffusion space is configured to diffuse a drying fluid therein. The rectifying member is configured to rectify a flow of the drying fluid diffused in the diffusion space and allow the rectified drying fluid to be flown out into the processing chamber from the diffusion space.

Abstract: A first fin is formed on a first inside wall surface to protrude therefrom. The first fin exchanges heat between fluid and the first inside wall surface. A first fluid passage is divided between a first region that is a space where the first fin is arranged, and a second region that is a space where the first fin is not arranged. Fluid flows from the second region into the first region. The first fin includes an inflow port through which fluid flows into the first region, and an outflow port through which fluid flows out of the first region. The first fin is formed to extend from the inflow port to the outflow port. An area of the inflow port is larger than a cross-sectional area of the first fluid passage when viewed in a flow direction of fluid.

Abstract: A controller, at least during the heating operation, controls the opening degree of a second expansion device and/or a third expansion device based on a discharge refrigerant temperature detected by a discharge refrigerant temperature detector, or a value computed using the discharge refrigerant temperature, and causes refrigerant having a quality equal to or greater than 0.9 and less than or equal to 0.99 to be suctioned into a compressor.

Abstract: When it is confirmed that a distal end portion of an attachment has reached a predetermined distance detection start position apart from a cab on the basis of a posture of the attachment detected by posture detector, a control apparatus determines whether or not an object to be detected has reached a predetermined stop position closer to the cab than the distance detection start position on the basis of a distance of the object to be detected by a distance detection sensor, and controls the drive unit so as to stop the attachment when determining that the object to be detected has reached the stop position, and the control apparatus controls the drive unit so that the speed of the distal end portion of the attachment becomes a predetermined target speed or lower when the distal end portion of the attachment reaches the distance detection start position.

Abstract: According to one embodiment, a testing device includes a signal generator that generates a first signal output to a device under test, a channel selector provided after the signal generator and configured to select one of a plurality of channels, a signal receiver that receives the second signal supplied from the device under test, a correction value calculator that calculates a correction value for calibrating loss of a respective one of the channels, wherein the correction value calculator calculates a correction value for calibrating loss of a respective one of the channels included in the channel selector, based on a signal level received by the signal receiver via a loopback channel, when a calibration-level output state indicating a state where a signal level of the first signal generated by the signal generator reaches a predetermined transmission reference level of calibration is assumed.

Abstract: Substrates can be suppressed from being separated from supporting grooves. A substrate processing apparatus includes a substrate holding unit and a processing tub. The substrate holding unit is configured to hold multiple substrates. The processing tub is configured to store a processing liquid therein. The substrate holding unit includes a supporting body, an elevating device and a restriction unit. The supporting body has multiple supporting grooves and is configured to support the multiple substrates with a vertically standing posture from below in the multiple supporting grooves, respectively. The elevating device is configured to move the supporting body between a standby position above the processing tub and a processing position within the processing tub. The restriction unit is configured to be moved up and down along with the supporting body by the elevating device and configured to restrict an upward movement of the substrates with respect to the supporting body.

Abstract: Provided are a refrigeration cycle that is formed by connecting a compressor, a condenser, expansion means, and an evaporator and that performs cooling operation; an evaporator heating device that heats the evaporator; a drain pan that receives drain-water from the evaporator and drains the drain-water; a drain-pan heating device that heats the drain pan; frost detecting means including a light-emitting element that emits light to the evaporator and a light-receiving element that receives reflected light from the evaporator and outputs a voltage according to the reflected light; and a control device that controls on-off operation of the evaporator heating device and the drain-pan heating device. The control device determines a frosting condition on the evaporator from an output of the frost detecting means and individually controls the evaporator heating device and the drain-pan heating device in accordance with the determination result.

Abstract: An air-conditioning apparatus includes a bypass pipe that has one end connected to the discharge side of a compressor and through which refrigerant exiting the compressor flows, an auxiliary heat exchanger that is connected to the other end of the bypass pipe and the suction part of the compressor, and cools refrigerant flowing through the bypass pipe and supplies the cooled refrigerant to the suction part of the compressor, and a flow regulating unit that is provided on the refrigerant outlet side of the auxiliary heat exchanger, and regulates the flow rate of refrigerant routed into the suction part of the compressor from the auxiliary heat exchanger.