Abstract: An EGR valve includes: an inner housing including a flow passage; a valve element which opens and closes the flow passage; a valve shaft on which the valve element is provided; an outer housing in which the inner housing is assembled; and a drive unit which drives the valve shaft. The flow passage of the inner housing includes an inlet and an outlet. The outer housing includes an assembly hole and separate flow passages. When the inner housing is assembled in the assembly hole, the inlet and the outlet of the inner housing communicate with the separate flow passages of the outer housing; an inlet sealing member is provided between the inner housing and the outer housing to correspond to the periphery of the inlet; and an outlet sealing member is provided between the inner housing and the outer housing to correspond to the periphery of the outlet.

Abstract: A dry etching apparatus with the use of reactive gas plasma is disclosed. The apparatus comprises a vacuum chamber, and first and second electrodes opposite to each other in the chamber for generating therebetween gas plasma by discharging while introducing reactive gas in the chamber thereby etching a sample placed on the first electrode. A cover member is provided for covering at least the periphery portion positioned at the outer side of the sample on the surface of the first electrode. The reactive gas introducer is provided on the second electrode at the position opposite to the sample thereby directing the gas to the sample.