Patents by Inventor Kong Son

Kong Son has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for evaluating the runability of a photomask inspection tool
    Patent number: 6721695
    Abstract: A method and apparatus evaluates the runability of a photomask inspection tool that inspects plural sets of die, each die having a standard simulated industrial device feature at plural technology nodes. A technology node size is determined for each feature at which inspection by the tool provides no false detection of faults. A sensitivity module included on a photomask test plate along with a runability module allows determination of inspection tool sensitivity and runability in a single test sequence.
    Type: Grant
    Filed: November 20, 2001
    Date of Patent: April 13, 2004
    Assignee: DuPont Photomasks, Inc.
    Inventors: Xiaoming Chen, Charles H. Howard, Franklin Dean Kalk, Kong Son, Paul Chipman
  • Method and apparatus for evaluating the runability of a photomask inspection tool
    Patent number: 6482557
    Abstract: A method and apparatus evaluates the runability of a photomask inspection tool that inspects plural sets of die, each die having a standard simulated industrial device feature at plural technology nodes. A technology node size is determined for each feature at which inspection by the tool provides no false detection of faults. A sensitivity module included on a photomask test plate along with a runability module allows determination of inspection tool sensitivity and runability in a single test sequence.
    Type: Grant
    Filed: March 24, 2000
    Date of Patent: November 19, 2002
    Assignee: DuPont Photomasks, Inc.
    Inventors: Xiaoming Chen, Charles H. Howard, Franklin Dean Kalk, Kong Son, Paul Chipman