Abstract: In a device for the purification of exhaust gases, especially exhaust gases consisting of fluorine-containing compounds, bore holes (7,8) are made in a ring burner (5) for the separate supply of combustion gas and oxygen on a single hole circle around a central exhaust gas supply (9). The ring burner is arranged in a combustion chamber (1). The combustion chamber is closed up to an annular gap (20) between a cylindrical jacket (4) and a front face (16). Additional oxygen or additional air is introduced into the annular gap (20).

Abstract: The invention relates to an apparatus for the thermal treatment of process exhaust gases containing pollutants, which can be used for a very wide range of surface modification processes carried out under a vacuum. The intention is to achieve the object of thermally treating process exhaust gases containing pollutants in such a way that accumulations of particles on the inner wall of a combustion chamber and an undesirable adverse effect on the thermal conversion can be avoided with little outlay.

Abstract: Exhaust gases from CVD and plasma processes contain toxic pollutants, particularly fluorine-containing compounds, and must therefore be purified. In a device for the purification of exhaust gases, frequently one comprising a combustion chamber and a fuel gas flame, the pollutants are converted by means of a thermally activated, chemical reaction. A special design of the combustion chamber and the burner improves the economy of the exhaust gas purification process and, above all, reduces the amount of nitrogen oxide contained in the purified exhaust gas. To this end, it is ensured that a flame having a reducing effect over its entire cross section forms in the burner by separately supplying fuel gas and oxygen in an alternate manner into drill holes arranged on a single hole circle and by sealing the combustion chamber such that no additional air is supplied to the vicinity of the burner.

Abstract: The invention relates to an apparatus and a process for the separation of particles from thermally after-treated process offgases which are obtained, in particular, in the surface modification of various substrates in vacuum units. The invention provides, in accordance with its object, an inexpensive and effective way of carrying out the separation of very small solid particles present in thermally after-treated process offgases. The apparatus of the invention is configured so that the process offgases which have been thermally after-treated in combustion chambers are conveyed via a cooler through an agglomeration stage and solid particles present in the after-treated process offgas can be separated off in a scrubbing stage.

Abstract: The invention relates to a modular system for the treatment of process exhaust gases containing pollutants. The object is to propose a possible way of carrying out the aftertreatment of process exhaust gases of this type which allows reliable operation at low cost. The intention is to allow sufficient redundancy and also flexible adaptation to increasing capacities to undergo aftertreatment. The modular system according to the invention is in this case designed in such a way that there is an electronic control for burners, the supply of process exhaust gases, washing liquid and/or of fuel gases in reaction chambers. At least two reaction chambers form modules which can be controlled by means of the electronic control for simultaneous or alternating treatment of process exhaust gases, taking account of detected operating states at the system or at least one module.

Abstract: The invention relates to an apparatus for the thermal treatment of process exhaust gases containing pollutants, which can be used in particular for a very wide range of surface modification processes carried out under a vacuum. The intention is to achieve the object of thermally treating process exhaust gases containing pollutants in such a way that accumulations of particles on the inner wall of a combustion chamber and an undesirable adverse effect on the thermal conversion can be avoided with little outlay. In a combustion chamber of the apparatus according to the invention, at least one burner with a process exhaust gas feed is arranged at the top cover of the combustion chamber. Furthermore, there is a feed for washing liquid, which forms a film for the removal of particles on the inner wall of the combustion chamber, and a discharge for exhaust gas and washing liquid arranged at the base.

Abstract: Waste gas, in particular from plants for the chemical vapor-phase deposition and for the separation and etching by plasma processes, is purified from toxic agents by a method in which partial processes of the purification, such as thermal decomposition and oxidation, sorption of solid and gaseous reaction products, hydrolysis and cooling, are combined to act in a single reaction chamber. The reaction products of the waste gas burnt in a flame are led, directly in the combustion chamber, through a space filled with a finely dispersed liquid. This liquid forms a liquid film on all parts and inside walls of the reaction chamber. In a combustion chamber with a burner, the mentioned liquid distribution is obtained by a spraying device.Effective purification from toxic agents, and little corrosion of the components of the reaction chamber are achieved, any growth of solid reaction products in the combustion chamber being avoided.