Abstract: A flow generator has an electrolyte feed device for feeding an electrolyte and an electrolyte distribution device. There is also described a deposition device having such a flow generator and a method for the deposition of a material on a surface of an object.

Abstract: The present invention relates to methods and apparatuses for the transporting of substantially flat, freely movable objects, wherein at least the holding and guiding takes place by use of a streaming liquid. The apparatus according to the invention comprises at least one treatment surface with at least one inflow region with a multitude of pass-through openings, at least one discharge region for discharging the liquid after provision of the inflow, but no non-fluidic edges, limiters, or other mechanical guiding aids for guiding the flat object. A transport device which bases on the invention can preferably be used within and between treatment plants for flat objects or substrates. Further; a preferably wet chemical treatment can take place simultaneously to the transport, provided that the transport liquid has according characteristics or involves according substances or active agents, respectively.

Abstract: The present invention relates to an apparatus and a method for the fluidic inline-treatment of flat substrates with at least one process module. In particular, the invention relates to such a treatment during the gentle and controlled transport of the substrates, wherein the treatment can also just relate to the transport of the substrates. According to the invention, a process module 1 is provided which comprises a treatment chamber 2 having at least one treatment surface 7A being substantially horizontally arranged in a treatment plane 5 and being designed for the formation of a lower fluid cushion 6A, wherein two openings in the form of entry 3 and exit 4 for the linear feed-through of the substrates 22 in the same plane are assigned to the treatment surface 7A, and at least one feed device with at least one catch 10 for the controlled feed 9 of the substrates 22 within the treatment chamber 2. Furthermore, the invention provides a method using the apparatus according to the invention.

Abstract: The present invention relates to methods and apparatuses for the transporting of substantially flat, freely movable objects, wherein at least the holding and guiding takes place by use of a streaming liquid. The apparatus according to the invention comprises at least one treatment surface with at least one inflow region with a multitude of pass-through openings, at least one discharge region for discharging the liquid after provision of the inflow, but no non-fluidic edges, limiters, or other mechanical guiding aids for guiding the flat object. A transport device which bases on the invention can preferably be used within and between treatment plants for flat objects or substrates. Further; a preferably wet chemical treatment can take place simultaneously to the transport, provided that the transport liquid has according characteristics or involves according substances or active agents, respectively.

Abstract: The invention in general relates to the single-sided wet chemical surface modification as in particular the coating of flat substrates. In particular, the present invention relates to a method as well as to an apparatus for the coating of substrates in the course of the production of thin film solar cells or modules made from glass, metal, or plastic with metallic compounds such as i.e. cadmium sulphide or zinc sulphide.

Abstract: The invention relates in particular to the separation and transportation of a disc shaped substrate (102; 202) such as e.g. a solar wafer. The invention is characterized by the fact that separations take place within a fluid, and that adhesion forces resulting from a thin fluid film develop between a gripper (108; 208) and the substrate to be separated (102; 202) that enable adherence to the gripper (108; 208). Through unloading perpendicular to the feed direction (105; 205) or particularly in parallel to the planar design of the substrates (102; 202), a very gentle and efficient separation of disc shaped substrates (102; 202) is possible with a short cycle time.