Abstract: A secondary sense loop for a MEMS gyroscope comprises a secondary element comprising at least one mechanical resonator, an analog front end circuitry, a digital secondary loop circuitry and an analog back end circuitry. The digital secondary loop circuitry comprises a signal path receiving at its input an analog secondary input signal representing a detection motion of a mechanical resonator and providing at its output an output signal indicating an angular velocity said MEMS gyroscope is subject to, said signal path comprising an analog-to-digital converter configured to digitize the analog secondary input signal into a digitized secondary signal, and a digital force feedback circuitry controlling operation of a closed force feedback loop configured to adjust response function of the secondary sense loop.

Abstract: An apparatus includes a reflector system having a support, a reflector and a spring structure for scanning motion of the reflector in two orthogonal oscillation modes. A frequency response peaks at a natural resonant frequency with an initial bandwidth. A first transducer structure provides mechanical actuation of the reflector; a second transducer structure generates sense signals representing mechanical motion of the reflector. A feedback circuit receives from the second transducer structure a sense signal and generates to the first transducer structure a drive signal. The feedback circuit is adjusts amplitude and frequency of the drive signal to a non-linear vibration range where a frequency shift at the peak frequency is at least ten times the initial bandwidth, varies the amplitude of the drive signal in proportion to a waveform of a modulation signal, and sets frequency of the modulation signal component smaller than the frequency shift at the peak frequency.

Abstract: A digital control circuitry for a MEMS gyroscope is provided. The digital control circuitry comprises a digital primary loop circuitry configured to process a digitized primary signal, a digital secondary loop circuitry configured to process a digitized secondary signal and a digital phase shifting filter circuitry configured to generate two phase shifted demodulation signals from the digitized primary signal. The digital secondary loop is configured to demodulate the digitized secondary signal using the two phase shifted demodulation signals.

Abstract: An apparatus includes a reflector system having a support, a reflector and a spring structure for scanning motion of the reflector in two orthogonal oscillation modes. A frequency response peaks at a natural resonant frequency with an initial bandwidth. A first transducer structure provides mechanical actuation of the reflector; a second transducer structure generates sense signals representing mechanical motion of the reflector. A feedback circuit receives from the second transducer structure a sense signal and generates to the first transducer structure a drive signal. The feedback circuit is adjusts amplitude and frequency of the drive signal to a non-linear vibration range where a frequency shift at the peak frequency is at least ten times the initial bandwidth, varies the amplitude of the drive signal in proportion to a waveform of a modulation signal, and sets frequency of the modulation signal component smaller than the frequency shift at the peak frequency.

Abstract: A secondary sense loop for a MEMS gyroscope comprises a secondary element comprising at least one mechanical resonator, an analog front end circuitry, a digital secondary loop circuitry and an analog back end circuitry. The digital secondary loop circuitry comprises a signal path receiving at its input an analog secondary input signal representing a detection motion of a mechanical resonator and providing at its output an output signal indicating an angular velocity said MEMS gyroscope is subject to, said signal path comprising an analog-to-digital converter configured to digitize the analog secondary input signal into a digitized secondary signal, and a digital force feedback circuitry controlling operation of a closed force feedback loop configured to adjust response function of the secondary sense loop.

Abstract: A digital control circuitry for a MEMS gyroscope is provided. The digital control circuitry comprises a digital primary loop circuitry configured to process a digitized primary signal, a digital secondary loop circuitry configured to process a digitized secondary signal and a digital phase shifting filter circuitry configured to generate two phase shifted demodulation signals from the digitized primary signal. The digital secondary loop is configured to demodulate the digitized secondary signal using the two phase shifted demodulation signals.