Patents by Inventor Konstantin N. Koshelev

Konstantin N. Koshelev has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Radiation source for use in lithographic projection apparatus
    Patent number: 6452194
    Abstract: A radiation source of a radiation system of a lithographic projection apparatus comprises electrodes for creating a discharge in a space between them such that the discharge collapses into a pinch volume. The collapsing discharge creates a highly ionized, high temperature plasma in the pinch volume. A working fluid is ejected from a jet nozzle into the pinching volume and is thereby raised to a high temperature state and emits extreme ultraviolet radiation.
    Type: Grant
    Filed: December 14, 2000
    Date of Patent: September 17, 2002
    Assignee: ASML Netherlands B.V.
    Inventors: Frederik Bijkerk, Henryk Fiedorowicz, Cornelis C. de Bruijn, Andrzej Bartnik, Konstantin N. Koshelev, Vadim Y. Banine