Patents by Inventor Konstantin Tkachuk

Konstantin Tkachuk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Dual membrane transducer
    Patent number: 11905167
    Abstract: A microfabricated structure includes a perforated stator; a first isolation layer on a first surface of the perforated stator; a second isolation layer on a second surface of the perforated stator; a first membrane on the first isolation layer; a second membrane on the second isolation layer; and a pillar coupled between the first membrane and the second membrane, wherein the first isolation layer includes a first tapered edge portion having a common surface with the first membrane, wherein the second isolation layer includes a first tapered edge portion having a common surface with the second membrane, and wherein an endpoint of the first tapered edge portion of the first isolation layer is laterally offset with respect to an endpoint of the first tapered edge portion of the second isolation layer.
    Type: Grant
    Filed: September 15, 2022
    Date of Patent: February 20, 2024
    Assignee: Infineon Technologies AG
    Inventors: Wolfgang Klein, Evangelos Angelopoulos, Stefan Barzen, Marc Fueldner, Stefan Geissler, Matthias Friedrich Herrmann, Ulrich Krumbein, Konstantin Tkachuk, Giordano Tosolini, Juergen Wagner
  • MEMS Device
    Publication number: 20230339743
    Abstract: A MEMS device includes a first deflectable membrane structure, a rigid electrode structure and a second deflectable membrane structure in a vertically spaced configuration. The rigid electrode structure is arranged between the first and second deflectable membrane structures. The first and second deflectable membrane structures each includes a deflectable portion, and the deflectable portions of the first and second deflectable membrane structures are mechanically coupled by mechanical connection elements to each other and are mechanically decoupled from the rigid electrode structure. At least a subset of the mechanical connection elements are elongated mechanical connection elements.
    Type: Application
    Filed: April 24, 2023
    Publication date: October 26, 2023
    Inventors: Hans-Jörg Timme, Stefan Barzen, Marc Füldner, Stefan Geißler, Matthias Friedrich Herrmann, Maria Kiriak, Abidin Güçlü Onaran, Konstantin Tkachuk, Arnaud Walther
  • Membrane Support for Dual Backplate Transducers
    Publication number: 20230002219
    Abstract: A microfabricated structure includes a perforated stator; a first isolation layer on a first surface of the perforated stator; a second isolation layer on a second surface of the perforated stator; a first membrane on the first isolation layer; a second membrane on the second isolation layer; and a pillar coupled between the first membrane and the second membrane, wherein the first isolation layer includes a first tapered edge portion having a common surface with the first membrane, wherein the second isolation layer includes a first tapered edge portion having a common surface with the second membrane, and wherein an endpoint of the first tapered edge portion of the first isolation layer is laterally offset with respect to an endpoint of the first tapered edge portion of the second isolation layer.
    Type: Application
    Filed: September 15, 2022
    Publication date: January 5, 2023
    Inventors: Wolfgang Klein, Evangelos Angelopoulos, Stefan Barzen, Marc Fueldner, Stefan Geissler, Matthias Friedrich Hermann, Ulrich Krumbien, Konstantin Tkachuk, Giordano Tosolini, Juergen Wagner
  • Membrane support for dual backplate transducers
    Patent number: 11524891
    Abstract: A microfabricated structure includes a perforated stator; a first isolation layer on a first surface of the perforated stator; a second isolation layer on a second surface of the perforated stator; a first membrane on the first isolation layer; a second membrane on the second isolation layer; and a pillar coupled between the first membrane and the second membrane, wherein the first isolation layer includes a first tapered edge portion having a common surface with the first membrane, wherein the second isolation layer includes a first tapered edge portion having a common surface with the second membrane, and wherein an endpoint of the first tapered edge portion of the first isolation layer is laterally offset with respect to an endpoint of the first tapered edge portion of the second isolation layer.
    Type: Grant
    Filed: January 18, 2021
    Date of Patent: December 13, 2022
    Assignee: Infineon Technologies AG
    Inventors: Wolfgang Klein, Evangelos Angelopoulos, Stefan Barzen, Marc Fueldner, Stefan Geissler, Matthias Friedrich Herrmann, Ulrich Krumbein, Konstantin Tkachuk, Giordano Tosolini, Juergen Wagner
  • Membrane Support for Dual Backplate Transducers
    Publication number: 20210139319
    Abstract: A microfabricated structure includes a deflectable membrane, a first clamping layer on a first surface of the deflectable membrane, a second clamping layer on a second surface of the deflectable membrane, a first perforated backplate on the first clamping layer, and a second perforated backplate on the second clamping layer, wherein the first clamping layer comprises a first tapered edge portion having a negative slope between the first perforated backplate and the deflectable membrane.
    Type: Application
    Filed: January 18, 2021
    Publication date: May 13, 2021
    Inventors: Wolfgang Klein, Evangelos Angelopoulos, Stefan Barzen, Marc Fueldner, Stefan Geissler, Matthias Friedrich Herrmann, Ulrich Krumbein, Konstantin Tkachuk, Giordano Tosolini, Juergen Wagner
  • Membrane support for dual backplate transducers
    Patent number: 10981780
    Abstract: A microfabricated structure includes a deflectable membrane, a first clamping layer on a first surface of the deflectable membrane, a second clamping layer on a second surface of the deflectable membrane, a first perforated backplate on the first clamping layer, and a second perforated backplate on the second clamping layer, wherein the first clamping layer comprises a first tapered edge portion having a negative slope between the first perforated backplate and the deflectable membrane.
    Type: Grant
    Filed: August 19, 2019
    Date of Patent: April 20, 2021
    Assignee: INFINEON TECHNOLOGIES AG
    Inventors: Wolfgang Klein, Evangelos Angelopoulos, Stefan Barzen, Marc Fueldner, Stefan Geissler, Matthias Friedrich Herrmann, Ulrich Krumbein, Konstantin Tkachuk, Giordano Tosolini, Juergen Wagner
  • MEMBRANE SUPPORT FOR DUAL BACKPLATE TRANSDUCERS
    Publication number: 20210053821
    Abstract: A microfabricated structure includes a deflectable membrane, a first clamping layer on a first surface of the deflectable membrane, a second clamping layer on a second surface of the deflectable membrane, a first perforated backplate on the first clamping layer, and a second perforated backplate on the second clamping layer, wherein the first clamping layer comprises a first tapered edge portion having a negative slope between the first perforated backplate and the deflectable membrane.
    Type: Application
    Filed: August 19, 2019
    Publication date: February 25, 2021
    Inventors: Wolfgang Klein, Evangelos Angelopoulos, Stefan Barzen, Marc Fueldner, Stefan Geissler, Matthias Friedrich Herrmann, Ulrich Krumbein, Konstantin Tkachuk, Giordano Tosolini, Juergen Wagner