Abstract: The method for forming nano size turfs on a surface of a transparent polymer film used in a solar cell is disclosed, which comprises a first step for attaching a transparent polymer film on a glass, a second step for installing the glass prepared in the first step on an upper side of the electrodes provided in the interior of a chamber and forming either a vacuum environment or an atmospheric environment, and a third step for supplying an electric power to the electrodes under the environment formed in the second step, etching the transparent polymer film attached on the surface of the glass and forming nano size turfs in circular cone shapes.

Abstract: The method for forming nano size turfs on a surface of a transparent polymer film used in a solar cell is disclosed, which comprises a first step for attaching a transparent polymer film on a glass, a second step for installing the glass prepared in the first step on an upper side of the electrodes provided in the interior of a chamber and forming either a vacuum environment or an atmospheric environment, and a third step for supplying an electric power to the electrodes under the environment formed in the second step, etching the transparent polymer film attached on the surface of the glass and forming nano size turfs in circular cone shapes.

Abstract: Disclosed is an apparatus for generating low-temp plasma at atmospheric pressure, comprising: a couple of electrodes facing each other at a distance, one of them being connected to a power supply, the other being grounded; a couple of dielectrics with a thickness of 25 &mgr;m-10 mm, positioned on the facing surfaces of the electrodes in such a way as to face each other, one of them having at least one discharge gap therein; and a conductor electrode having at least one tip positioned within the discharge gap, in which an electric field is applied at an intensity of 1-100 KV/cm through the power supply across the electrodes by use of a pulse direct current or an alternating current in a frequency bandwidth of 50 Hz-10 GHz while a reaction gas is fed between the electrodes, so as to induce a hollow cathode discharge, a capillary discharge or the high accumulation of charges from the discharge gap.

Abstract: Disclosed is an apparatus for generating low-temp plasma at atmospheric pressure, comprising: a couple of electrodes facing each other at a distance, one of them being connected to a power supply, the other being grounded; a couple of dielectrics with a thickness of 25 &mgr;m-10 mm, positioned on the facing surfaces of the electrodes in such a way as to face each other, one of them having at least one discharge gap therein; and a conductor electrode having at least one tip positioned within the discharge gap, in which an electric field is applied at an intensity of 1-100 KV/cm through the power supply across the electrodes by use of a pulse direct current or an alternating current in a frequency bandwidth of 50 Hz-10 GHz while a reaction gas is fed between the electrodes, so as to induce a hollow cathode discharge, a capillary discharge or the high accumulation of charges from the discharge gap.