Abstract: A projection optical system is disclosed with which undistorted images can be obtained at any image position within a specification range, and whose projection angle can be changed. The projection optical system includes a plurality of optical elements and a first optical system constituted by at least one of the plurality of optical elements having the ability to form an image with light onto a predetermined surface different from the projection surface. A projection image of the original image can be moved by rotating a first optical element of the plurality of optical elements substantially around a center of an exit pupil position of the first optical system as the rotation center.

Abstract: A catoptric projection optical system for projecting a pattern on an object surface onto an image surface includes plural mirrors, wherein a second mirror from the image surface through the optical path receives convergent pencil of rays, and has a paraxial magnification of ?0.14 or smaller.

Abstract: A zoom lens system includes plural optical units each of which includes plural optical elements each having a rotationally asymmetrical surface, and changes optical power as the optical elements in each of the plural optical units move in directions different from an optical axis, wherein the plural optical units have first and second units, and when the optical power of the first unit changes from positive to negative, the second unit changes from negative to positive, wherein a variation range of the optical power of an entire system includes a point where the first and second units have the same optical power, and wherein the point shifts to a side where optical power is greater than a center of the variation range of the optical power of the entire system.

Abstract: At least one exemplary embodiment is directed to a zoom optical system which includes a plurality of optical groups with variable optical power arranged along an optical axis; and at least one optical group arranged along the optical axis, and where the system is zoomed by changing the power of at least one of the plurality of the optical groups with variable optical power, where the plurality of the optical groups with variable optical power each includes a rotationally asymmetric surface and each has a plurality of optical devices, which change the power within the respective optical groups by moving the respective optical devices in a direction different from the optical axis, and the system at a telephoto end satisfies the condition: |?dt|?|?st|, where |?dt| is the absolute value of the power total sum of a plurality of the optical groups with variable optical power, and |?st| is the absolute value of the power total sum of the at least one optical group.

Abstract: At least one exemplary embodiment is directed to a zoom optical system which includes a plurality of variable power optical units of which optical power varies accompanied by variable power, a fixed optical unit of which optical power does not vary accompanied by variable power, and a moving optical unit which moves accompanied by variable power.

Abstract: A catoptric projection optical system for projecting a reduced size of a pattern on an object surface onto an image surface includes six mirrors that include a first convex mirror, a second mirror, a third mirror, a fourth mirror, a fifth mirror, and a sixth mirror in order of reflections of light, wherein the light incident upon the third mirror from the second mirror intersects with the light incident upon the fifth mirror from the fourth mirror.

Abstract: A zoom lens system includes plural optical units each of which includes plural optical elements each having a rotationally asymmetrical surface, and changes optical power as the optical elements in each of the plural optical units move in directions different from an optical axis, wherein a principal point position moves in an optical-axis direction without causing the optical element to move in the optical-axis direction, the zoom lens system having such a shape that the principal point position of at least one unit of the plural optical units is located outside the one unit.

Abstract: A zoom optical system includes followings: a plurality of lens units for magnification, the plurality of lens unit for zooming including in order from a reduction conjugate side to a magnification conjugate side, a first lens unit having a positive optical power, a second lens unit having a negative optical power and a third lens unit having a positive optical power, wherein during zooming, respective intervals between the above described first, second and third lens unit vary, and across the entire zooming range, a magnification-side conjugate position with respect to a reduction-side conjugate position and a position of a pupil of the above described zoom optical system with respect to a reduction-side conjugate position are substantially immobile respectively.

Abstract: A zoom optical system provided, in order from a reduction side toward a magnification side, with: a first lens unit having positive optical power; a second lens unit having positive optical power; a third lens unit having positive optical power; and a fourth lens unit having negative optical power; wherein the interval between adjacent ones of the first, second, third and fourth lens units is varied during zooming, and in an entire zooming range, a magnification side conjugate position relative to a reduction side conjugate position, and the position of the pupil of the zoom optical system relative to the reduction side conjugate position are substantially immovable.

Abstract: A compact image-forming optical system is disclosed which has a high optical performance due to arranging a reflective optical unit and a refractive optical unit at suitable positions. The image-forming optical system is an optical system performing image formation from a magnifying side to a demagnifying side or from the demagnifying side to the magnifying side, and includes, in order from the magnifying side to the demagnifying side, a refractive optical unit having a positive optical power as a whole, and a reflective optical unit including at least three reflective surfaces. The image-forming optical system has a pupil on the magnifying side further from the reflective surface furthest on the magnifying side the reflective optical unit, and the focal length of the refractive optical unit is set to be within a range of 0.2 to 5 times the focal length of the reflective optical unit.

Abstract: A projection optical system is disclosed with which undistorted images can be obtained at any image position within a specification range, and whose projection angle can be changed. The projection optical system includes a plurality of optical elements and a first optical system constituted by at least one of the plurality of optical elements having the ability to form an image with light onto a predetermined surface different from the projection surface. A projection image of the original image can be moved by rotating a first optical element of the plurality of optical elements substantially around a center of an exit pupil position of the first optical system as the rotation center.

Abstract: A catoptric projection optical system for projecting a pattern on an object surface onto an image surface includes plural mirrors, wherein a second mirror from the image surface through the optical path receives convergent pencil of rays, and has a paraxial magnification of ?0.14 or smaller.

Abstract: A projection optical system is disclosed with which undistorted images can be obtained at any image position within a specification range, and whose projection angle can be changed. The projection optical system includes a plurality of optical elements and a first optical system constituted by at least one of the plurality of optical elements having the ability to form an image with light onto a predetermined surface different from the projection surface. A projection image of the original image can be moved by rotating a first optical element of the plurality of optical elements substantially around a center of an exit pupil position of the first optical system as the rotation center.

Abstract: A catoptric projection optical system for projecting a pattern on an object surface onto an image surface includes plural mirrors, wherein a second mirror from the image surface through the optical path receives convergent pencil of rays, and has a paraxial magnification of ?0.14 or smaller.

Abstract: A zoom optical system includes, in order from the reduction conjugate side to the magnification conjugate side, a first lens unit having a positive optical power; a second lens unit having a negative optical power; a third lens unit having a positive optical power; and a fourth lens unit having a negative optical power, wherein in an entire zoom range, a magnification-side conjugate position relative to a reduction-side conjugate position, and the position of a pupil of the zoom optical system relative to the reduction-side conjugate position are each substantially fixed, and the interval between the first lens unit and the second lens unit at a telephoto end is larger than the interval between the first lens unit and the second lens unit at a wide-angle end; the interval between the second lens unit and the third lens unit at the telephoto end is larger than the interval between the second lens unit and the third lens unit at the wide-angle end; and the interval between the third lens unit and the fourth len

Abstract: A zoom optical system includes in order from a reduction side to a magnification side: a first lens unit having a positive optical power; a second lens unit having a negative optical power; a third lens unit having a positive optical power; and a fourth lens unit having a positive optical power, wherein respective intervals between the above described first, second, third and fourth lens units vary during zooming; a magnification-side conjugate position with respect to a reduction-side conjugate position and a position of a pupil of the above described zoom optical system with respect to a reduction-side conjugate position are substantially immobile respectively across the entire zooming range, and the above described fourth lens unit moves toward the magnification side and an interval between the above described first lens unit and the above described fourth lens unit increases during zooming from a wide-angle end to a telephoto end.

Abstract: An image-formation optical system is disclosed which is an off-axial optical system configured using reflective surfaces, with which the performance deterioration with respect to manufacturing discrepancies is reduced, and which can be made sufficiently compact. The image-formation optical system comprises a reflective optical unit including a plurality of reflective surfaces. Each of the reflective surfaces has a curvature and a rotationally asymmetric shape. Moreover, L/{Er(S?1)} is smaller than 2.2 and L/{Eo (S?1)} is larger than 3.

Abstract: A zoom optical system, in order from a reduction side to a magnification side, includes a first lens unit having positive optical power, a second lens unit having the positive optical power, a third lens unit having negative optical power, and a fourth lens unit having the positive optical power, wherein respective intervals between the first, second, third and fourth lens units change during zooming, a conjugate position on the magnification side with respect to a conjugate position on the reduction side, and a position of a pupil of the zoom optical system with respect to the conjugate position on the reduction side, are substantially fixed over an entire zooming range, and during zooming from a wide angle end to a telephoto end, the fourth lens unit moves toward the magnification side, and an interval between the first lens unit and the fourth lens unit increases.

Abstract: A zoom optical system includes followings: a plurality of lens units for magnification, the plurality of lens unit for zooming including in order from a reduction conjugate side to a magnification conjugate side, a first lens unit having a positive optical power, a second lens unit having a negative optical power and a third lens unit having a positive optical power, wherein during zooming, respective intervals between the above described first, second and third lens unit vary, and across the entire zooming range, a magnification-side conjugate position with respect to a reduction-side conjugate position and a position of a pupil of the above described zoom optical system with respect to a reduction-side conjugate position are substantially immobile respectively.

Abstract: A zoom optical system provided, in order from a reduction side toward a magnification side, with: a first lens unit having positive optical power; a second lens unit having positive optical power; a third lens unit having positive optical power; and a fourth lens unit having negative optical power; wherein the interval between adjacent ones of the first, second, third and fourth lens units is varied during zooming, and in an entire zooming range, a magnification side conjugate position relative to a reduction side conjugate position, and the position of the pupil of the zoom optical system relative to the reduction side conjugate position are substantially immovable.