Abstract: A plurality of units (4) constituted by a projector (6) that projects a periodic lattice onto a measurement target (1) and a camera (8) that images the projected lattice are included around the measurement target (1), and three-dimensional coordinates measured by the respective units (4) are composited by coordinate conversion. A first lattice that is displayed on a reference surface (42) is imaged, and phases with respect to the first lattice are obtained for respective pixels of the cameras (8) and stored. A second lattice is projected from the projector (6) onto the reference surface (42) and imaged, and three-dimensional coordinates of the reference surface (42) are stored for respective pixels of the cameras (8). The phases of the respective pixels of the cameras (8) are interpolated, and sub-pixels whose phases match each other between the cameras (8) are generated.