Abstract: A method for producing a multilayer coil component includes forming, on a main face of a substrate, a first coil conductor extending along the main face having conductivity, forming a second coil conductor and a third coil conductor apart from each other in a direction in which the first coil conductor extends and each extending from the first coil conductor in a first direction orthogonal to the main face, and forming a fourth coil conductor electrically connected to an end of the second coil conductor opposite to the first coil conductor and extending along the main face. The forming the first coil conductor includes forming, on the main face, a first insulator layer provided with a first penetration portion having a shape corresponding to the first coil conductor and exposing a part of the main face, and forming, by plating, the first coil conductor in the first penetration portion.

Abstract: The present invention relates to a switching valve device used for vacuum suction of a member such as a semiconductor chip, and the object thereof is to break a vacuum rapidly and smoothly. The switching valve device includes a vacuum suction switching valve function for vacuum suction, a vacuum break switching valve function for vacuum break, and an open-to-atmosphere switching valve function which in conjunction with an operation of the vacuum suction switching valve function, opens a passage to the atmosphere side when the vacuum suction switching valve function is off and closes the passage to the atmosphere side when the vacuum suction switching valve function is on. The vacuum suction switching valve function, the vacuum break switching valve function, and the open-to-atmosphere switching valve function are integrally incorporated into a body portion.

Abstract: The present invention relates to a switching valve device used for vacuum suction of a member such as a semiconductor chip, and the object thereof is to break a vacuum rapidly and smoothly. The switching valve device includes a vacuum suction switching valve function for vacuum suction, a vacuum break switching valve function for vacuum break, and an open-to-atmosphere switching valve function which in conjunction with an operation of the vacuum suction switching valve function, opens a passage to the atmosphere side when the vacuum suction switching valve function is off and closes the passage to the atmosphere side when the vacuum suction switching valve function is on. The vacuum suction switching valve function, the vacuum break switching valve function, and the open-to-atmosphere switching valve function are integrally incorporated into a body portion.