Abstract: According to the embodiment, the electrostatic chuck includes a ceramic dielectric substrate having a first major surface and a second major surface on an opposite side to the first major surface, a base plate supporting the ceramic dielectric substrate and including a gas introduction path, and a first porous part provided at a position between the base plate and the first major surface and being opposite to the gas introduction path. The ceramic dielectric substrate includes a first hole part positioned between the first major surface and the first porous part. At least one of the ceramic dielectric substrate or the first porous part includes a second hole part positioned between the first hole part and the first porous part, and a dimension of the second hole part is smaller than a dimension of the first porous part and larger than a dimension of the first hole part.

Abstract: According to the embodiment, an electrostatic chuck includes a ceramic dielectric substrate having a first major surface placing a suction object, a second major surface on an opposite side to the first major surface, a base plate supporting the ceramic dielectric substrate and including a gas introduction path, and a first porous part provided at a position between the base plate and the first major surface of the ceramic dielectric substrate and being opposite to the gas introduction path. The first porous part includes a first region positioned on the ceramic dielectric substrate side. The ceramic dielectric substrate includes a first substrate region positioned on the first region side. The first region and the first substrate region are provided in contact with each other, and an average particle diameter in the first region is different from an average particle diameter in the first substrate region.

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, an electrode layer, a base plate, and a heater plate. The ceramic dielectric substrate has a first major surface where a processing object is placed. The electrode layer is provided in the ceramic dielectric substrate. The base plate supports the ceramic dielectric substrate. The heater plate is provided between the base plate and the first major surface. The heater plate includes a first heater element and a second heater element. The first heater element emits heat due to a current flowing. The second heater element emits heat due to a current flowing. When viewed along a direction perpendicular to the first major surface, bends of the first heater element is more than bends of the second heater element, and the first heater element includes a portion positioned at a gap of the second heater element.

Abstract: An inverter-control element operates with a power-supply potential supplied to an inverter-control-system power-supply terminal to output a signal for controlling an inverter switching element. A brake control element operates with a power-supply potential supplied to a brake-control-system power-supply terminal to output a signal for controlling a brake switching element. A first metal component includes a plurality of protrusions protruding from a sealing resin, is supported by the sealing resin with a portion embedded in the sealing resin, and is electrically connected to each of the inverter-control-system power-supply terminal and the brake-control-system power-supply terminal.

Abstract: According to an aspect of the invention, an electrostatic chuck comprises: a ceramic dielectric substrate; a base plate; and a heater plate. The heater plate includes a first and a second support plates including a metal, a heater element provided between the first and the second support plates, a first resin layer provided between the first support plate and the heater element, and a second resin layer provided between the second support plate and the heater element. A surface of the first support plate on the second support plate side includes a first region and a second region, the first region overlapping the heater element when viewed along the stacking direction, the second region not overlapping the heater element when viewed along the stacking direction. In a cross section parallel to the stacking direction, the second region protrudes toward the second support plate side compared to the first region.

Abstract: According to an aspect of the invention, an electrostatic chuck includes: a ceramic dielectric substrate having a first major surface, and a second major surface on a side opposite to the first major surface; a base plate supporting the ceramic dielectric substrate and being provided at a position separated from the ceramic dielectric substrate; and a heater plate provided between the ceramic dielectric substrate and the base plate, the heater plate including a first support plate including a metal, a heater element emitting heat due to a current flowing, and a first resin layer provided between the first support plate and the heater element, the heater element having a first surface and a second surface, the first surface opposing the first resin layer, the second surface facing a side opposite to the first surface, a width of the first surface being different from a width of the second surface.

Abstract: Converter output terminals of a converter are located adjacent to each other on a first side and an external terminal for external connection of a composite module is located adjacent to the converter output terminal. AC input terminals of the converter are located on a second side. Each of the distances between the converter output terminals and between the converter output terminal and the external terminal is set to a first formation pitch. Each of the distances between the AC input terminals is set to a second formation pitch. The first formation pitch is set to be equal to the second formation pitch.

Abstract: An electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a heater plate. The heater plate is provided between the ceramic dielectric substrate and the base plate. The heater plate includes first and second support plates, first and second resin layers, and a heater element. Each of the first and second resin layers is provided between the first support plate and the second support plate. The heater element includes first and second electrically conductive portions. The first electrically conductive portion is provided between the first resin layer and the second resin layer. The second electrically conductive portion is separated from the first electrically conductive portion in an in-plane direction. The first resin layer contacts the second resin layer between the first electrically conductive portion and the second electrically conductive portion.

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate having a first major surface placing an object to be processed and a second major surface on an opposite side of the first major surface, and a base plate provided on a side of the second major surface and supporting the ceramic dielectric substrate. The base plate includes a first communicating passage passing a medium which adjusts a temperature of the object to be processed. The first communicating passage has an upper surface, a side surface, and a lower surface. A ratio of variation of a maximum height Sz in the upper surface to a height of the first communicating passage is not more than 1%.

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, an electrode layer, a base plate, and a heater plate. The ceramic dielectric substrate has a first major surface where a processing object is placed. The electrode layer is provided in the ceramic dielectric substrate. The base plate supports the ceramic dielectric substrate. The heater plate is provided between the base plate and the first major surface. The heater plate includes a first heater element and a second heater element. The first heater element emits heat due to a current flowing. The second heater element emits heat due to a current flowing. When viewed along a direction perpendicular to the first major surface, bends of the first heater element is more than bends of the second heater element, and the first heater element includes a portion positioned at a gap of the second heater element.

Abstract: An inverter-control element operates with a power-supply potential supplied to an inverter-control-system power-supply terminal to output a signal for controlling an inverter switching element. A brake control element operates with a power-supply potential supplied to a brake-control-system power-supply terminal to output a signal for controlling a brake switching element. A first metal component includes a plurality of protrusions protruding from a sealing resin, is supported by the sealing resin with a portion embedded in the sealing resin, and is electrically connected to each of the inverter-control-system power-supply terminal and the brake-control-system power-supply terminal.

Abstract: An electrostatic chuck includes: a ceramic dielectric substrate having a first major surface, a second major surface, and a through-hole; a metallic base plate which has a gas introduction path that communicates with the through-hole; and a bonding layer which is provided between the ceramic dielectric substrate and the base plate and includes a resin material. The bonding layer has a space which is provided between an opening of the through-hole in the second major surface and the gas introduction path and is larger than the opening in a horizontal direction, and a first area in which an end face of the bonding layer on a side of the space intersects with the second major surface being recessed from the opening further than a second area of the end face which is different from the first area.

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate, a base plate, and a heater plate. The ceramic dielectric substrate has a surface where a processing object is placed. The base plate supports the ceramic dielectric substrate. The heater plate is provided between the ceramic dielectric substrate and the base plate. The heater plate includes a first support plate including a metal, a second support plate including a metal, a heater element, a first resin layer, and a second resin layer. The heater element is provided between the first support plate and the second support plate. The heater element emits heat due to a current flowing. The first resin layer is provided between the first support plate and the heater element. The second resin layer is provided between the second support plate and the heater element.

Abstract: An electrostatic chuck includes: a ceramic dielectric substrate having a first major surface, a second major surface, and a through-hole; a metallic base plate which has a gas introduction path that communicates with the through-hole; and a bonding layer which is provided between the ceramic dielectric substrate and the base plate and includes a resin material. The bonding layer has a space which is provided between an opening of the through-hole in the second major surface and the gas introduction path and is larger than the opening in a horizontal direction, and a first area in which an end face of the bonding layer on a side of the space intersects with the second major surface being recessed from the opening further than a second area of the end face which is different from the first area.

Abstract: According to an aspect of the invention, there is provided an electrostatic chuck including: a ceramic dielectric substrate having a first major surface, a second major surface, and a through-hole; a metallic base plate which has a gas introduction path that communicates with the through-hole; and a bonding layer which is provided between the ceramic dielectric substrate and the base plate and includes a resin material, the bonding layer having a space which is provided between an opening of the through-hole in the second major surface and the gas introduction path and is larger than the opening in a horizontal direction, and a first area in which an end face of the bonding layer on a side of the space intersects with the second major surface being recessed from the opening further than another second area of the end face which is different from the first area.

Abstract: To provide a sample analyzer capable of accurately obtaining the number of analyzable samples. When analyzing a sample collected from a subject, a CPU of the sample analyzer calculates the number of analyzable samples based on a remaining number of tests of a reagent set in a reagent holding section and the number of tests of the reagent to be consumed in measurement of a control, and causes a output section to display the number of analyzable samples. When creating a calibration curve, the CPU calculates the number of analyzable samples based on a remaining number of tests of the reagent set in the reagent holding section, the number of tests of the reagent to be consumed in measurement of the control, and the number of tests of the reagent to be consumed in measurement of a calibrator, and causes the output section to display the number of analyzable samples.

Abstract: There is provided a motor drive device including, a current detection section that detects current flowing between a power source and an inverter circuit generating voltage to be supplied to a motor, a voltage control section that outputs a first control signal to cause the inverter circuit to generate a voltage for rotating the motor at a rotation speed based on an instructed value, and a rotation speed suppression section that, in cases in which current, detected by the current detection section at a timing at which a voltage generated by the inverter circuit rises from low level to high level, is a predetermined threshold value or higher, outputs a second control signal to the voltage control section to cause the inverter circuit to generate a voltage for rotating the motor at a lower rotation speed than the rotation speed based on the instructed value.

Abstract: Provided are an optical glass with a high refractive index which has excellent devitrification resistance both in a molten state and during reheating, and a glass material for press molding and an optical element which are comprised of the optical glass. This optical glass includes, in mass %, 15-37% of B2O3 and SiO2 in total, 15-45% of TiO2, Nb2O5 and ZrO2 in total, and 12-40% of BaO, SrO, CaO, MgO, K2O, Na2O and Li2O in total, has a mass ratio (B2O3/(B2O3+SiO2)) of 0.15 or more, a mass ratio (TiO2/(TiO2+Nb2O5+ZrO2)) of 0.01 to 0.8, a mass ratio ((BaO+SrO+CaO)/(BaO+SrO+CaO+MgO+K2O+Na2O+Li2O)) of 0.4 or more, and a mass ratio ((K2O+Na2O+Li2O)/(BaO+SrO+CaO+MgO+K2O+Na2O+Li2O)) of 0.1 or more, substantially does not include PbO, and has a refractive index nd of 1.78-1.84, and an Abbe's number ?d of 26-32.

Abstract: Converter output terminals of a converter are located adjacent to each other on a first side and an external terminal for external connection of a composite module is located adjacent to the converter output terminal. AC input terminals of the converter are located on a second side. Each of the distances between the converter output terminals and between the converter output terminal and the external terminal is set to a first formation pitch. Each of the distances between the AC input terminals is set to a second formation pitch. The first formation pitch is set to be equal to the second formation pitch.

Abstract: Provided are an optical glass with a high refractive index which has excellent devitrification resistance both in a molten state and during reheating, and a glass material for press molding and an optical element which are comprised of the optical glass. This optical glass includes, in mass %, 15-37% of B2O3 and SiO2 in total, 15-45% of TiO2, Nb2O5 and ZrO2 in total, and 12-40% of BaO, SrO, CaO, MgO, K2O, Na2O and Li2O in total, has a mass ratio (B2O3/(B2O3+SiO2)) of 0.15 or more, a mass ratio (TiO2/(TiO2+Nb2O5+ZrO2)) of 0.01 to 0.8, a mass ratio ((BaO+SrO+CaO)/(BaO+SrO+CaO+MgO+K2O+Na2O+Li2O)) of 0.4 or more, and a mass ratio ((K2O+Na2O+Li2O)/(BaO+SrO+CaO+MgO+K2O+Na2O+Li2O)) of 0.1 or more, substantially does not include PbO, and has a refractive index nd of 1.78-1.84, and an Abbe's number ?d of 26-32.