Abstract: A driving apparatus has a problem in that foreign matter, such as grease, in a reduction gear moves from the reduction gear to a coupling side. Therefore, a driving apparatus includes an input shaft with a hollow space, a motor that rotates the input shaft, a reduction gear that receives the power of the motor from the input shaft, an output shaft inserted through the hollow space of the input shaft and adapted to rotate about the rotation axis of the motor, and a coupling connected to a tip end of the output shaft. A first limiting member for limiting the movement of foreign matter in the reduction gear toward the coupling side is arranged between the reduction gear and the coupling.

Abstract: A driving apparatus has a problem in that a tip end of an output shaft, which is inserted through a hollow space, is difficult to be fitted into the apparatus body during the maintenance. Therefore, a driving apparatus includes an input shaft with a hollow space formed therein that penetrates therethrough in the axial direction, a motor that rotates the input shaft, a reduction gear that receives the power of the motor from the input shaft, an output shaft inserted through the hollow space of the input shaft and adapted to rotate about the rotation axis with power output from the reduction gear, and a coupling connected to a tip end of the output shaft. A first bearing for supporting the output shaft is arranged, and a second bearing for supporting the output shaft is arranged in the hollow space between the input shaft and the output shaft.

Abstract: A driving apparatus has a problem in that during the maintenance operation, foreign matter moves from the tip end side of an input shaft into a hollow space. Therefore, a driving apparatus includes an input shaft with a hollow space formed therein, the hollow space penetrating therethrough in the axial direction, a motor that rotates the input shaft, a reduction gear that receives the power of the motor 1 from the input shaft, an output shaft inserted through the hollow space of the input shaft and adapted to rotate about the rotation axis with power output from the reduction gear, and a detector that detects information on the rotation of the input shaft and the output shaft. A limiting member, which limits the movement of foreign matter into the hollow space of the input shaft from one side to the other side of the motor, is arranged in the hollow space between the input shaft and the output shaft.

Abstract: A driving apparatus has a problem in that during the maintenance operation, foreign matter moves from the tip end side of an input shaft into a hollow space. Therefore, a driving apparatus includes an input shaft with a hollow space formed therein, the hollow space penetrating therethrough in the axial direction, a motor that rotates the input shaft, a reduction gear that receives the power of the motor 1 from the input shaft, an output shaft inserted through the hollow space of the input shaft and adapted to rotate about the rotation axis with power output from the reduction gear, and a detector that detects information on the rotation of the input shaft and the output shaft. A limiting member, which limits the movement of foreign matter into the hollow space of the input shaft from one side to the other side of the motor, is arranged in the hollow space between the input shaft and the output shaft.

Abstract: A driving apparatus has a problem in that foreign matter, such as grease, in a reduction gear moves from the reduction gear to a coupling side. Therefore, a driving apparatus includes an input shaft with a hollow space, a motor that rotates the input shaft, a reduction gear that receives the power of the motor from the input shaft, an output shaft inserted through the hollow space of the input shaft and adapted to rotate about the rotation axis of the motor, and a coupling connected to a tip end of the output shaft. A first limiting member for limiting the movement of foreign matter in the reduction gear toward the coupling side is arranged between the reduction gear and the coupling.

Abstract: A driving apparatus has a problem in that a tip end of an output shaft, which is inserted through a hollow space, is difficult to be fitted into the apparatus body during the maintenance. Therefore, a driving apparatus includes an input shaft with a hollow space formed therein that penetrates therethrough in the axial direction, a motor that rotates the input shaft, a reduction gear that receives the power of the motor from the input shaft, an output shaft inserted through the hollow space of the input shaft and adapted to rotate about the rotation axis with power output from the reduction gear, and a coupling connected to a tip end of the output shaft. A first bearing for supporting the output shaft is arranged, and a second bearing for supporting the output shaft is arranged in the hollow space between the input shaft and the output shaft.

Abstract: A workpiece transfer apparatus includes a stationary base, an elevation base, first and second arms, a workpiece-holding hand, and a driving mechanism for the hand. The first arm is supported on the elevation base so as to be rotatable about a first vertical axis. The second arm is supported on the distal end of the first arm such that the second arm is rotatable about a second vertical axis. The hand is supported on the distal end of the second arm so as to be rotatable about a third vertical axis. A motor is arranged in the first arm, whereas a transmission is arranged to extend in a region from the interior of the first arm through the interior of the second arm.

Abstract: A workpiece transfer system includes a transfer chamber in which a workpiece transfer apparatus is installed, and a load port provided adjacent to the transfer chamber. The transfer chamber includes a frame structure made of steel. The frame structure includes a first frame member and a second frame member. The first frame member is set on the floor, and the workpiece transfer apparatus is installed thereon. The second frame member is arranged in a standing posture with respect to the first frame member and which supports the load port.

Abstract: A workpiece transfer apparatus includes a stationary base, an elevation base, first and second arms, a workpiece-holding hand, and a driving mechanism for the hand. The first arm is supported on the elevation base so as to be rotatable about a first vertical axis. The second arm is supported on the distal end of the first arm such that the second arm is rotatable about a second vertical axis. The hand is supported on the distal end of the second arm so as to be rotatable about a third vertical axis. A motor is arranged in the first arm, whereas a transmission is arranged to extend in a region from the interior of the first arm through the interior of the second arm.

Abstract: A workpiece conveying system includes at least three workpiece storage chambers arranged in a predetermined arrangement direction. A conveyance chamber is provided adjacent to the workpiece storage chambers. A workpiece processing chamber is provided adjacent to the conveyance chamber on the side opposite the workpiece storage chambers. First and second workpiece conveying robots are disposed in the conveyance chamber. The workpiece conveying robots are controlled by a controller and convey workpieces between the workpiece processing chamber and the workpiece storage chambers. The first and second workpiece conveying robots are spaced from each other in the arrangement direction. Each workpiece conveying robot conveys a workpiece into and out of at least two of the workpiece storage chambers.