Abstract: An extreme ultraviolet light generation system includes a chamber, a target supply unit supplying a target substance to a plasma generation region including a first point in the chamber, a window allowing pulse laser light with which the target substance is irradiated to pass therethrough, an EUV light concentrating mirror concentrating extreme ultraviolet light generated at the first point on a second point, a planar mirror arranged on an optical path of the extreme ultraviolet light reflected by the EUV light concentrating mirror and between the first and second points, an actuator causing the second point to be switched between a first position and a second position, a connection portion connectable to an external apparatus, a first EUV measurement unit on which the extreme ultraviolet light having passed through the second position is incident, and a processor controlling the actuator based on a signal from the external apparatus.

Abstract: An extreme ultraviolet light sensor unit according to one aspect of the present disclosure includes: a mirror configured to reflect extreme ultraviolet light; a wavelength filter configured to selectively transmit the extreme ultraviolet light reflected by the mirror; an optical sensor configured to detect the extreme ultraviolet light having transmitted through the wavelength filter; and a purge gas supply unit disposed to supply purge gas to a space between the wavelength filter and the optical sensor.

Abstract: An extreme ultraviolet light sensor unit according to one aspect of the present disclosure includes: a mirror configured to reflect extreme ultraviolet light; a wavelength filter configured to selectively transmit the extreme ultraviolet light reflected by the mirror; an optical sensor configured to detect the extreme ultraviolet light having transmitted through the wavelength filter; and a purge gas supply unit disposed to supply purge gas to a space between the wavelength filter and the optical sensor.

Abstract: Output timing of laser light is controlled with high accuracy. An extreme ultraviolet light generation device may include a chamber in which plasma is generated to generate extreme ultraviolet light, a window provided in the chamber, an optical path pipe connected to the chamber, a light source disposed in the optical path pipe and configured to output light into the chamber via the window, a gas supply unit configured to supply gas into the optical path pipe, and an exhaust port configured to discharge the gas in the optical path pipe to an outside of the optical path pipe.

Abstract: Output timing of laser light is controlled with high accuracy. An extreme ultraviolet light generation device may include a chamber in which plasma is generated to generate extreme ultraviolet light, a window provided in the chamber, an optical path pipe connected to the chamber, a light source disposed in the optical path pipe and configured to output light into the chamber via the window, a gas supply unit configured to supply gas into the optical path pipe, and an exhaust port configured to discharge the gas in the optical path pipe to an outside of the optical path pipe.

Abstract: An electric load system and method for a vehicle includes an electric load, electric devices, an electrically driven element operating in an operating state, an electric load detector to measure an electric load generated by the electric devices, and an electric control unit communicating with the electric load detector and the electrically driven element to determine an electric load of the electric load system. The method includes estimating an electric load of the electrically driven element based on an operating state of the electrically driven element via the electric control unit and adding the electric load from the electrically driven element to an electric load measured by the electric load detector.

Abstract: An electric load system and method for a vehicle includes an electric load, electric devices, an electrically driven element operating in an operating state, an electric load detector to measure an electric load generated by the electric devices, and an electric control unit communicating with the electric load detector and the electrically driven element to determine an electric load of the electric load system. The method includes estimating an electric load of the electrically driven element based on an operating state of the electrically driven element via the electric control unit and adding the electric load from the electrically driven element to an electric load measured by the electric load detector.

Abstract: An exhaust emission control system for an internal combustion engine is disclosed. The system includes a NOx removing device provided in an exhaust system of the engine for removing NOx contained in exhaust gases, and an oxygen concentration sensor provided in the exhaust system. The air-fuel ratio of the air-fuel mixture to be supplied to the engine is changed from a value which is leaner than the stoichiometric ratio to a value which is richer than the stoichiometric ratio. It is determined whether or not a sulfur oxide concentration in the exhaust gases is high according to a transient characteristic of an oxygen concentration detected by the oxygen concentration sensor after the air-fuel ratio is changed.

Abstract: An exhaust emission control system for an internal combustion engine having nitrogen oxides removing device provided in an exhaust system of the engine for removing nitrogen oxides in exhaust gases and an oxygen concentration sensor provided downstream of the nitrogen oxides removing device for detecting the concentration of oxygen in the exhaust gases. Deterioration of the nitrogen oxides removing device is determined on the basis of an output of the oxygen concentration sensor after the air-fuel ratio has been changed from the lean region to a rich region with respect to the stoichiometric ratio. Abnormality of the oxygen concentration sensor is determined on the basis of an output of the oxygen concentration sensor during a period in which the air-fuel ratio is kept in the rich region with respect to the stoichiometric ratio immediately after execution of the deterioration determination of the nitrogen oxides removing device.

Abstract: An exhaust emission control system for an internal combustion engine, having a nitrogen oxide removing device provided in an exhaust system of the internal combustion engine for absorbing nitrogen oxides contained in exhaust gases in an exhaust lean condition. The exhaust emission control system includes first and second oxygen concentration sensors respectively provided upstream and downstream of the nitrogen oxide removing device for detecting an oxygen concentration in the exhaust gases. The air-fuel ratio of an air-fuel mixture to be supplied to the engine is changed from a lean region to a rich region with respect to a stoichiometric ratio. An amount of reducing components flowing into the nitrogen oxide removing device from the time when an output value from the first oxygen concentration sensor has changed to a value indicative of a rich air-fuel ratio after enrichment of the air-fuel ratio is calculated.

Abstract: An exhaust emission control system for an internal combustion engine is disclosed. The system includes a NOx removing device provided in an exhaust system of the engine for removing NOx contained in exhaust gases, and an oxygen concentration sensor provided in the exhaust system. The air-fuel ratio of the air-fuel mixture to be supplied to the engine is changed from a value which is leaner than the stoichiometric ratio to a value which is richer than the stoichiometric ratio. It is determined whether or not a sulfur oxide concentration in the exhaust gases is high according to a transient characteristic of an oxygen concentration detected by the oxygen concentration sensor after the air-fuel ratio is changed.

Abstract: An exhaust emission control system for an internal combustion engine having nitrogen oxides removing device provided in an exhaust system of the engine for removing nitrogen oxides in exhaust gases and an oxygen concentration sensor provided downstream of the nitrogen oxides removing device for detecting the concentration of oxygen in the exhaust gases. Deterioration of the nitrogen oxides removing device is determined on the basis of an output of the oxygen concentration sensor after the air-fuel ratio has been changed from the lean region to a rich region with respect to the stoichiometric ratio. Abnormality of the oxygen concentration sensor is determined on the basis of an output of the oxygen concentration sensor during a period in which the air-fuel ratio is kept in the rich region with respect to the stoichiometric ratio immediately after execution of the deterioration determination of the nitrogen oxides removing device.

Abstract: In order to effectively perform on/off control for an air-conditioning system carried on an automobile during idling operation of the automobile, if a state, in which a difference between a target idling number of revolution and a net idling number of revolution is larger than a preset difference value, is continued for a preset period of time, then an electromagnetic clutch is disconnected, and a compressor is allowed to be in an operation stop state. After that, if the difference is smaller than the preset difference value, and a state, in which the difference is smaller than the preset difference value, is continued for a preset period of time, then the electromagnetic clutch is connected, and the compressor is restored to be in an operating state. By doing so, it is possible to previously avoid the occurrence of vibration of the vehicle body due to vibration of the engine, and the occurrence of booming noise in the vehicle's cabin caused by the vibration.

Abstract: An air-fuel ratio control system for an internal combustion engine includes an air-fuel ratio sensor arranged in an exhaust system thereof for generating an output substantially proportional in value to an air-fuel ratio of exhaust gases emitted from the engine. An amount of variation in combustion of the engine is detected. A desired air-fuel ratio of a mixture supplied to the engine is set to a value leaner than a stoichiometric air-fuel ratio based on the amount of variation in combustion of the engine, when the engine is in a predetermined operating condition. Feedback control of an air-fuel ratio of the mixture to the desired air-fuel ratio is carried out in response to the output from the air-fuel ratio sensor.

Abstract: An air-fuel ratio control system for an internal combustion engine includes an air-fuel ratio sensor arranged in the exhaust system of the engine, for generating an output indicative of the air-fuel ratio of exhaust gases emitted from the engine. An ECU carries out feedback control of controlling the air-fuel ratio of a mixture supplied to the engine to a predetermined desired air-fuel ratio in response to the output from the air-fuel ratio sensor, by using at least one feedback control gain. A purge control valve purges evaporative fuel generated in the fuel tank to the engine. The at least one feedback control gain is set to a smaller value when the degree of influence of evaporative fuel purged by the purge control valve upon the air-fuel ratio of the mixture is larger, and set to a larger value when the degree of influence of the purged evaporative fuel upon the air-fuel ratio of the mixture is smaller.

Abstract: A fuel supply control system for an internal combustion engine has an exhaust gas-purifying device arranged in the exhaust system of the engine. When a predetermined high load condition of the engine is detected, an amount of fuel supplied to the engine is increased. Temperature values indicative of the temperature of the exhaust gas-purifying device are stored and a stored temperature value is read out according to operating conditions of the engine. A correction coefficient for correcting the read-out temperature value is determined, and the temperature of the exhaust gas-purifying device is estimated based on the read-out temperature value and the determined correction coefficient. When the predetermined high load condition is detected and at the same time the estimated temperature is higher than a predetermined temperature value, the amount of fuel supplied to the engine is actually increased.

Abstract: An ignition timing control system for an internal combustion engine that estimates the octane number of the fuel being used based on the state of engine combustion knocking and controls the ignition timing to a value not exceeding the knocking limit. The basic ignition timing is set along the knocking limit of fuel having least octane number and the maximum advance amount is set between the knocking limit and the second knocking limit of fuel having maximum octane number. Octane number is estimated from the occurrence of knocking. On the other hand, upper limit of the estimated octane number is set based on the MBT of the engine such that the estimated octane number is limited with the upper limit. Advance rate is determined based on the estimated octane number and is multiplied to the maximum advance amount to determine an ignition timing correction amount. The ignition timing is finally determined from the basic ignition timing and the ignition timing correction amount.

Abstract: An evaporative fuel-processing system for an internal combustion engine includes a canister, a charging passage extending between the canister and the fuel tank, a purging passage extending between the canister and the intake system of the engine, an open-to-atmosphere passage for relieving the interior of the canister to atmosphere, a charge control valve, a purge control valve, a vent shut valve, a pressure sensor for detecting pressure within the charging passage, and a float valve arranged at an end of the charging passage opening into the fuel tank. When the engine is in a predetermined operating condition, the interior of the canister is negatively pressurized into a predetermined negatively pressurized state by opening the purge control valve and the charge control valve and closing the vent shut valve. The interior of the changing passage is stabilized by closing the charge control valve and the purge control valve over a predetermined time period after the negative pressurization.

Abstract: There is provided an air-fuel ratio control system for an internal combustion engine. The air-fuel ratio control system has an air-fuel ratio sensor arranged in an exhaust passage of the engine, which generates an output proportional to concentration of oxygen in exhaust gases emitted from the engine. The air-fuel ratio of a mixture supplied to the engine is controlled to a desired air-fuel ratio in response to the output from the air-fuel ratio sensor by the use of a proportional term and an integral term. A repetition period of inversion of the output from the air-fuel ratio sensor with respect to a predetermined reference value is calculated. Deterioration of the air-fuel ratio sensor is detected based the repetition period of inversion of the output from the air-fuel ratio sensor.

Abstract: An air-fuel ratio control system for an internal combustion engine having at least one catalytic converter arranged in the exhaust passage, comprises an ECU which changes air intake characteristics of the engine, based on operating conditions of the engine, and a plurality of exhaust gas component concentration sensors including at least upstream and downstream exhaust gas component concentration sensors arranged in the exhaust passage at respective locations upstream and downstream of the at least one catalytic converter. The air-fuel ratio of an air-fuel mixture to be supplied to the engine is controlled to a desired air-fuel ratio in a feedback manner responsive to an output from the upstream exhaust gas component concentration sensor. A feedback control parameter for use in the air-fuel ratio feedback control is calculated based on an output from the downstream exhaust gas component concentration sensor.