Abstract: A screw-type rotary fluid machine such as a compressor or a vacuum pump has male and female rotors which rotate within a casing, with or without mutual contact. At least one of the male and female rotors being surface-treated to have a treated surface structure. The treated surface structure is a multi-layered structures composed of a plurality of layers including a non-electrolytic Ni plating layer and at least one covering layer of organic resin. The organic resin may be one or more kinds selected from a group of engineering plastics, so as to improve mechanical strength.

Abstract: A method treating a surface of rotors in a screw-type rotary fluid machine, with the method comprising the steps of: conducting a non-electrolytic Ni plating on the surface of each rotor so as to form a first layer of non-electrolytic Ni plating layer; heating the rotor having the first layer at a temperature not lower than 500.degree. C.; and forming, at least, a second layer of an organic resin so as to cover the first layer.

Abstract: A vacuum pump apparatus comprises a male and female screw rotors meshing with each other, a casing for accommodating the male and female screw rotors and having a working space, a suction port and a discharge port both communicating with the working space, bearing portions for supporting shafts of the male and female screw rotors on the suction and discharge sides thereof. Shaft seal portions which are respectively disposed between the working space and each of the bearing portions and are adapted to seal the shafts of the male and female screw rotors on the suction and discharge sides thereof. Seal gas introducing device introduces seal gas into the shaft seal portions, and a controller controls the pressure of the seal gas introduced into the shaft seal portions.

Abstract: A vacuum evacuation system comprising a non-positive displacement type vacuum pump called molecular pump which obtains high pumping speed in a high vacuum range, and an oil-free, positive displacement type vacuum pump called screw vacuum pump. The non-positive displacement type vacuum pump and the positive displacement type vacuum pump are connected to each other such that the non-positive displacement type vacuum pump is located on a high vacuum side and the positive displacement type vacuum pump is located on a low pressure or atmospheric side, to thereby prevent oil from being penetrated into a system to be evacuated.

Abstract: A two-stage vacuum pump apparatus has a first stage of vacuum pump constituted by a screw-type vacuum pump and a second stage vacuum pump constituted by an oil-sealed rotary vacuum pump operative to maintain the back pressure of the first stage vacuum pump at a level ranging from 1 to 100 Torr., whereby a high level of vacuum can be attained in a system to be evacuated without any risk of contamination of the evacuated system by oil. Also disclosed is a method of operating the two-stage vacuum pump apparatus.

Abstract: A screw vacuum pump including a plurality of casings and a pair of rotors defining a plurality of working chambers. The working chambers are constituted by working chambers whose volumes undergo a change as the rotors rotate, and working chambers whose volumes undergo substantially no change as the rotors rotate. The screw vacuum pump is capable of achieving pressure of 10.sup.-1 to 10.sup.-4 Torr or a low or medium vacuum by means of a single pump operating in a single stage.