Patents by Inventor Kotlanka Rama Krishna

Kotlanka Rama Krishna has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Suspended microelectromechanical system (MEMS) devices
    Patent number: 10843920
    Abstract: A microelectromechanical system (MEMS) device is provided that includes a substrate having a dielectric cavity formed therein and a movable electromechanical device suspended in the dielectric cavity. The dielectric cavity includes a substantially planar bottom surface and at least one sidewall surface extending substantially perpendicularly from the bottom surface. The movable electromechanical device is suspended in the dielectric cavity such that the movable electromechanical device is spaced apart from the bottom surface and the at least one sidewall surface of the dielectric cavity. The bottom surface of the cavity and each of the at least one sidewall surface of the cavity meet at a rectilinear corner.
    Type: Grant
    Filed: March 8, 2019
    Date of Patent: November 24, 2020
    Assignee: Analog Devices International Unlimited Company
    Inventors: Kotlanka Rama Krishna, Michael John Flynn, Lynn Khine, Seamus Paul Whiston, Paul Lambkin
  • Planar processing of suspended microelectromechanical systems (MEMS) devices
    Patent number: 10800649
    Abstract: Suspended microelectromechanical systems (MEMS) devices including a stack of one or more materials over a cavity in a substrate are described. The suspended MEMS device may be formed by forming the stack, which may include one or more electrode layers and an active layer, over the substrate and removing part of the substrate underneath the stack to form the cavity. The resulting suspended MEMS device may include one or more channels that extend from a surface of the device to the cavity and the one or more channels have sidewalls with a spacer material. The cavity may have rounded corners and may extend beyond the one or more channels to form one or more undercut regions. The manner of fabrication may allow for forming the stack layers with a high degree of planarity.
    Type: Grant
    Filed: November 28, 2016
    Date of Patent: October 13, 2020
    Assignee: Analog Devices International Unlimited Company
    Inventors: Michael John Flynn, Paul Lambkin, Seamus Paul Whiston, Christina B. McLoughlin, Kotlanka Rama Krishna, Lynn Khine
  • SUSPENDED MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICES
    Publication number: 20200283291
    Abstract: A microelectromechanical system (MEMS) device is provided that includes a substrate having a dielectric cavity formed therein and a movable electromechanical device suspended in the dielectric cavity. The dielectric cavity includes a substantially planar bottom surface and at least one sidewall surface extending substantially perpendicularly from the bottom surface. The movable electromechanical device is suspended in the dielectric cavity such that the movable electromechanical device is spaced apart from the bottom surface and the at least one sidewall surface of the dielectric cavity. The bottom surface of the cavity and each of the at least one sidewall surface of the cavity meet at a rectilinear corner.
    Type: Application
    Filed: March 8, 2019
    Publication date: September 10, 2020
    Applicant: Analog Devices International Unlimited Company
    Inventors: Kotlanka Rama Krishna, Michael John Flynn, Lynn Khine, Seamus Paul Whiston, Paul Lambkin