Patents by Inventor Kou-Wei Yang

Kou-Wei Yang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of reducing boron outgassing at trench power IC's oxidation process for sacrificial oxide layer
    Patent number: 6680261
    Abstract: Embodiments of the present invention are directed to a method of reducing boron outgassing at trench power IC's oxidation process for the sacrificial oxide layer whereby the threshold voltage of the power ICs can be improved and the yield of the product can be enhanced. Nitrogen is introduced into the furnace in the entire oxidation process, including the main oxidation steps. In the preparing step of ramp up, the ramp up step and the stable step, prior to the main oxidation, nitrogen is introduced in a sufficient flow rate to make the environment near the saturated vapor pressure to reduce boron outgassing at the trench.
    Type: Grant
    Filed: April 25, 2002
    Date of Patent: January 20, 2004
    Assignee: Mosel Vitelic, Inc.
    Inventors: Jen-Te Chen, Kou-Liang Jaw, Mao-Song Tseng, Kou-Wei Yang
  • Method of reducing boron outgassing at trench power IC's oxidation process for sacrificial oxide layer
    Publication number: 20030054665
    Abstract: Embodiments of the present invention are directed to a method of reducing boron outgassing at trench power IC's oxidation process for the sacrificial oxide layer whereby the threshold voltage of the power ICs can be improved and the yield of the product can be enhanced. Nitrogen is introduced into the furnace in the entire oxidation process, including the main oxidation steps. In the preparing step of ramp up, the ramp up step and the stable step, prior to the main oxidation, nitrogen is introduced in a sufficient flow rate to make the environment near the saturated vapor pressure to reduce boron outgassing at the trench.
    Type: Application
    Filed: April 25, 2002
    Publication date: March 20, 2003
    Applicant: MOSEL VITELIC, INC.
    Inventors: Jen-Te Chen, Kou-Liang Jaw, Mao-Song Tseng, Kou-Wei Yang