Abstract: A substrate processing apparatus includes a supply channel through which a liquid to be supplied to a substrate flows; and a foreign substance detecting unit configured to detect a foreign substance in the liquid based on a signal obtained when light, which is near-infrared light, is radiated toward a flow path forming unit constituting a part of the supply channel by a light projector so that light is emitted from the flow path forming unit and a light receiver receives the light emitted from the flow path forming unit.

Abstract: A liquid container includes a negative pressure producing member accommodating chamber accommodating a negative pressure producing member for absorbing and retaining the liquid, and a liquid containing chamber for containing the liquid. The liquid containing chamber is in fluid communication with the negative pressure producing member accommodating chamber through a communicating portion, and is substantially sealed except for the communicating portion. A partition wall partitions the liquid container into the negative pressure producing member accommodating chamber and the liquid containing chamber except for the communicating portion. The negative pressure producing member is provided with a recess at a position corresponding to the communicating portion, wherein the recess forms a space and a ceiling portion of the space provided functions as a gas introduction surface which is substantially horizontal when the liquid container is in an in-use orientation.

Abstract: A liquid container includes a negative pressure producing member accommodating chamber accommodating a negative pressure producing member for absorbing and retaining the liquid, the negative pressure producing member accommodating chamber having a supply port for supplying the liquid to liquid an ejection recording head and an air vent for fluid communication with ambient air; a liquid containing chamber for containing the liquid, the liquid containing chamber being in fluid communication with the negative pressure producing member accommodating chamber through the communicating portion and being substantially sealed except for the communicating portion; and a partition wall for partitioning the liquid container into the negative pressure producing member accommodating chamber and the liquid containing chamber except for the communicating portion; wherein the negative pressure producing member is provided with a recess at a position corresponding to the communicating portion; wherein a ceiling portion of a sp