Abstract: The present invention provides a holding apparatus for holding an optical element with an edge whose thickness increases or decreases inwardly, the apparatus including a barrel having an internal diameter larger than an external diameter of the optical element, a support configured to support and position the optical element relative to the barrel via a first surface of the edge in a direction of an axis of the barrel, and a restriction device including a regulation member which faces a second surface of the edge opposite to the first surface in the direction of the axis, is apart from the second surface if an amount of decentering of the optical element is less than a predetermined amount within a tolerance, and contacts with the second surface if the amount of decentering reaches the predetermined amount, and configured to restrict decentering of the optical element.

Abstract: A holding apparatus for holding an optical element includes: a barrel; a first member having one end connected to the barrel, and an opposite end located apart from the one end in a direction perpendicular to an axis of the barrel and outside the barrel; a second member passing through the hole and having one end connected to the opposite end of the first member and the other end located apart from the opposite end of the first member in the direction and inside the barrel. Their linear expansion coefficients and dimensions are configured so that the opposite end of the second member is in contact with a side of the optical element, and the amounts of displacement of the side of the optical element and the opposite end of the second member due to a change in temperature correspond to each other.

Abstract: The present invention provides a holding apparatus for holding an optical element with an edge whose thickness increases or decreases inwardly, the apparatus including a barrel having an internal diameter larger than an external diameter of the optical element, a support configured to support and position the optical element relative to the barrel via a first surface of the edge in a direction of an axis of the barrel, and a restriction device including a regulation member which faces a second surface of the edge opposite to the first surface in the direction of the axis, is apart from the second surface if an amount of decentering of the optical element is less than a predetermined amount within a tolerance, and contacts with the second surface if the amount of decentering reaches the predetermined amount, and configured to restrict decentering of the optical element.

Abstract: A holding apparatus adapted to hold an optical element above a base includes at least two held members provided at different positions on an outer periphery of the optical element; and holding members provided above the base for respective held members, the holding members being supported above the base by flexure members. Each held member is held by the corresponding holding member in a kinematic coupling.

Abstract: A holding apparatus for holding an optical element includes: a barrel; a first member having one end connected to the barrel, and an opposite end located apart from the one end in a direction perpendicular to an axis of the barrel and outside the barrel; a second member passing through the hole and having one end connected to the opposite end of the first member and the other end located apart from the opposite end of the first member in the direction and inside the barrel. Their linear expansion coefficients and dimensions are configured so that the opposite end of the second member is in contact with a side of the optical element, and the amounts of displacement of the side of the optical element and the opposite end of the second member due to a change in temperature correspond to each other.

Abstract: A holding apparatus that holds an optical element above a base includes three holding units provided at different positions along an outer periphery of the optical element. Each holding unit includes a first member provided on the optical element, a second member provided on the base, a columnar third member extending in a direction perpendicular to both a tangential direction and a radial direction of the optical element, and a plate-shaped fourth member having a thickness in the radial direction of the optical element. The first member and the second member are connected to each other with the third member and the fourth member disposed therebetween.

Abstract: An exposure apparatus exposes a substrate in a vacuum atmosphere through an optical system. The apparatus includes a partition which separates a first space including at least part of the optical system from a second space adjacent to it, and includes an opening to pass light through it. The apparatus further includes a first pressure regulator which regulates the pressure in the first space, a second pressure regulator which regulates the pressure in the second space, and a controller which outputs manipulated variables for the first and second pressure regulators. The controller outputs the manipulated variables for the first and second pressure regulators to change the pressure in the first space and the pressure in the second space in the range of a vacuum to the atmospheric pressure while maintaining a pressure relationship in which the pressure in the first space is higher than that in the second space.

Abstract: A holding apparatus that holds an optical element above a base includes three holding units provided at different positions along an outer periphery of the optical element. Each holding unit includes a first member provided on the optical element, a second member provided on the base, a columnar third member extending in a direction perpendicular to both a tangential direction and a radial direction of the optical element, and a plate-shaped fourth member having a thickness in the radial direction of the optical element. The first member and the second member are connected to each other with the third member and the fourth member disposed therebetween.

Abstract: A holding apparatus adapted to hold an optical element above a base includes at least two held members provided at different positions on an outer periphery of the optical element; and holding members provided above the base for respective held members, the holding members being supported above the base by flexure members. Each held member is held by the corresponding holding member in a kinematic coupling.

Abstract: An exposure apparatus exposes a substrate in a vacuum atmosphere through an optical system. The apparatus includes a partition which separates a first space including at least part of the optical system from a second space adjacent to it, and includes an opening to pass light through it. The apparatus further includes a first pressure regulator which regulates the pressure in the first space, a second pressure regulator which regulates the pressure in the second space, and a controller which outputs manipulated variables for the first and second pressure regulators. The controller outputs the manipulated variables for the first and second pressure regulators to change the pressure in the first space and the pressure in the second space in the range of a vacuum to the atmospheric pressure while maintaining a pressure relationship in which the pressure in the first space is higher than that in the second space.