Abstract: The present invention provides a plasma etching method with an EUV-exposed resist capable of preventing variations of device feature dimensions. The plasma etching method of the present invention is to plasma-etch a target material with a multilayer resist that serves as a mask and composed of an EUV-exposed resist, an antireflective coating, an inorganic film and an organic film. The plasma etching method includes a first step of depositing a deposition film on a surface of the EUV-exposed resist before the antireflective coating is etched, a second step of etching the deposition film deposited on the antireflective coating and the antireflective coating with a gas mixture of Cl2 gas, HBr gas and N2 gas after the first step, a third step of etching the inorganic film after the second step, and a fourth step of etching the organic film after the third step.

Abstract: A controller samples a motor current value detected by a motor current detector at a sampling start timing for turning on a switching device to start holding in a motor current hold section, and fetches the motor current value held in the motor current hold section at a hold timing for turning off the switching device. The sampling start timing and the hold timing are variable.

Abstract: A controller samples a motor current value detected by a motor current detector at a sampling start timing for turning on a switching device to start holding in a motor current hold section, and fetches the motor current value held in the motor current hold section at a hold timing for turning off the switching device. The sampling start timing and the hold timing are variable.

Abstract: A phosphor improved against luminance deterioration with time under vacuum ultraviolet irradiation, a phosphor paste composition, and a vacuum ultraviolet excitation light emitting element high in luminance retaining rate and improved in luminance, are presented. An alkaline earth aluminate phosphor which is a phosphor represented by the formula a (M1-xEux)O.6Al2O3 (wherein M represents at least one alkaline earth metal element selected from the group consisting of Ba, Sr and Ca, and x and a satisfy 0<x<1 and O.9?a?1.8, respectively) and which has a wide-band peak over an angle region of diffraction angle (2?) of from 28° to 31° in powder diffraction X-ray spectrum by CuK?1 characteristics X-ray, and a vacuum ultraviolet excitation light emitting element provided with a fluorescent layer made of the phosphor.

Abstract: A blue-emitting bivalent metal silicate phosphor improved in the luminance efficiency, the durability against deterioration by VUV and the powder characteristic, and a process for its production, a phosphor paste composition employing such an improved phosphor, and a VUV excitation type light-emitting device having high luminance. The phosphor is an Eu-activated bivalent metal silicate phosphor represented by the compositional formula CaMgSi2O6:Eu, wherein a specific amount of at least one member among La, Ba, Sr, Zn, Y, Ce, In, Bi, chlorine, bromine and iodine, is contained in the crystalline matrix.

Abstract: A phosphor improved against luminance deterioration with time under vacuum ultraviolet irradiation, a phosphor paste composition, and a vacuum ultraviolet excitation light emitting element high in luminance retaining rate and improved in luminance, are presented. An alkaline earth aluminate phosphor which is a phosphor represented by the formula a(M1-xEux)O.6Al2O3 (wherein M represents at least one alkaline earth metal element selected from the group consisting of Ba, Sr and Ca, and x and a satisfy 0<x<1 and O.9≦a≦1.8, respectively) and which has a wide-band peak over an angle region of diffraction angle (2&thgr;) of from 28° to 31° in powder diffraction X-ray spectrum by CuK&agr;1 characteristics X-ray, and a vacuum ultraviolet excitation light emitting element provided with a fluorescent layer made of the phosphor.

Abstract: A blue-emitting bivalent metal silicate phosphor improved in the luminance efficiency, the durability against deterioration by VUV and the powder characteristic, and a process for its production, a phosphor paste composition employing such an improved phosphor, and a VUV excitation type light-emitting device having high luminance. The phosphor is an Eu-activated bivalent metal silicate phosphor represented by the compositional formula CaMgSi2O6:Eu, wherein a specific amount of at least one member among La, Ba, Sr, Zn, Y, Ce, In, Bi, chlorine, bromine and iodine, is contained in the crystalline matrix.

Abstract: An aluminate phosphor activated with Eu or coactivated with Eu and Mn, which contains sulfur; a process for its production; a phosphor paste composition; and a vacuum ultraviolet ray excitation type light-emitting device having a fluorescent layer made of such a phosphor.

Abstract: An aluminate phosphor activated with Eu or coactivated with Eu and Mn, which contains sulfur; a process for its production; a phosphor paste composition; and a vacuum ultraviolet ray excitation type light-emitting device having a fluorescent layer made of such a phosphor.